Thomas KORB

Person

Schwaebisch Gmuend, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Processing image data sets
- Patent number 12,175,650
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and evaluation devices for analyzing three-dimensional data...
- Patent number 12,148,139
- Issue date Nov 19, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer-tilt determination for slice-and-image process
- Patent number 12,056,865
- Issue date Aug 6, 2024
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated root cause analysis for defect detection during fabricati...
- Patent number 12,045,969
- Issue date Jul 23, 2024
- Carl Zeiss SMT GmbH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,915,908
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,848,172
- Issue date Dec 19, 2023
- Carl Zeiss SMT GmbH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, method of operating a charged particl...
- Patent number 11,810,749
- Issue date Nov 7, 2023
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of recording an image using a particle microscope
- Patent number 11,728,130
- Issue date Aug 15, 2023
- Carl Zeiss SMT GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and devices for determining metrology sites
- Patent number 11,436,506
- Issue date Sep 6, 2022
- Carl Zeiss SMT GmbH
- Abhilash Srikantha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-scanning electron microscopy for wafer alignment
- Patent number 10,901,391
- Issue date Jan 26, 2021
- Carl Zeiss SMT GmbH
- Jagdish Chandra Saraswatula
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Illumination system of a microlithographic projection device and me...
- Patent number 10,539,883
- Issue date Jan 21, 2020
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a microlithographic projection apparatus and il...
- Patent number 10,444,631
- Issue date Oct 15, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Lighting system of a microlithographic projection exposure system a...
- Patent number 10,274,828
- Issue date Apr 30, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam distributing optical device and associated unit, system and ap...
- Patent number 10,061,203
- Issue date Aug 28, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for a mask inspection system and mask ins...
- Patent number 10,042,248
- Issue date Aug 7, 2018
- Carl Zeiss SMT GmbH
- Markus Degünther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of a microlithographic projection exposure apparatus
- Patent number 10,012,907
- Issue date Jul 3, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting system of a microlithographic projection exposure system a...
- Patent number 9,977,334
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for a microlithographic projection exposure apparatu...
- Patent number 9,946,161
- Issue date Apr 17, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting system of a microlithographic projection exposure system a...
- Patent number 9,910,360
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,910,359
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,500,954
- Issue date Nov 22, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,310,690
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G02 - OPTICS
Information Patent Grant
Method for measuring an optical system
- Patent number 8,786,849
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Thomas Korb
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
- Publication number 20250022680
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER IMPLEMENTED METHOD FOR THE DETECTION OF ANOMALIES IN AN IM...
- Publication number 20250021828
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Anna Alperovich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER IMPLEMENTED METHOD FOR THE DETECTION AND CLASSIFICATION OF...
- Publication number 20240411296
- Publication date Dec 12, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
- Publication number 20240328970
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G01 - MEASURING TESTING
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
- Publication number 20240331179
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20240311698
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DEFECT DETECTION IN A SEMICONDUCTOR SAMPLE IN SAMPLE IMA...
- Publication number 20240242334
- Publication date Jul 18, 2024
- Carl Zeiss MultiSEM GmbH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20240087134
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20240038482
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...
- Publication number 20230343619
- Publication date Oct 26, 2023
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G01 - MEASURING TESTING
Information Patent Application
TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...
- Publication number 20230267627
- Publication date Aug 24, 2023
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT DETECTION FOR SEMICONDUCTOR STRUCTURES ON A WAFER
- Publication number 20230260105
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20230196189
- Publication date Jun 22, 2023
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20230178327
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND EVALUATION DEVICES FOR ANALYZING THREE-DIMENSIONAL DATA...
- Publication number 20230169636
- Publication date Jun 1, 2023
- Carl Zeiss SMT GMBH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230145897
- Publication date May 11, 2023
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230120847
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER-TILT DETERMINATION FOR SLICE-AND-IMAGE PROCESS
- Publication number 20230115376
- Publication date Apr 13, 2023
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
- Publication number 20220392793
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...
- Publication number 20220230899
- Publication date Jul 21, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
- Publication number 20220223445
- Publication date Jul 14, 2022
- Carl Zeiss SMT GMBH
- Amir Avishai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...
- Publication number 20220138973
- Publication date May 5, 2022
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FO...
- Publication number 20220044949
- Publication date Feb 10, 2022
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING IMAGE DATA SETS
- Publication number 20210358101
- Publication date Nov 18, 2021
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE
- Publication number 20210296089
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROOT CAUSE ANALYSIS FOR FABRICATION PROCESSES OF SEMICONDUCTOR STRU...
- Publication number 20210097673
- Publication date Apr 1, 2021
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS FOR DEFINING A PROCESS WINDOW
- Publication number 20200402863
- Publication date Dec 24, 2020
- Carl Zeiss SMT GMBH
- Jagdish Chandra Saraswatula
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICES FOR DETERMINING METROLOGY SITES
- Publication number 20200285976
- Publication date Sep 10, 2020
- Carl Zeiss SMT GMBH
- Abhilash Srikantha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ERROR REDUCTION IN IMAGES WHICH WERE GENERATED WITH CHARGED PARTICL...
- Publication number 20200258212
- Publication date Aug 13, 2020
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING

Thomas KORB

Person

Patents Grantslast 30 patents

Processing image data sets

Methods and evaluation devices for analyzing three-dimensional data...

Wafer-tilt determination for slice-and-image process

Automated root cause analysis for defect detection during fabricati...

Method for measuring a sample and microscope implementing the method

Method for measuring a sample and microscope implementing the method

Charged particle beam system, method of operating a charged particl...

Method of recording an image using a particle microscope

Method and devices for determining metrology sites

Multi-scanning electron microscopy for wafer alignment

Illumination system of a microlithographic projection device and me...

Method of operating a microlithographic projection apparatus and il...

Lighting system of a microlithographic projection exposure system a...

Beam distributing optical device and associated unit, system and ap...

Illumination optical unit for a mask inspection system and mask ins...

Optical system of a microlithographic projection exposure apparatus

Lighting system of a microlithographic projection exposure system a...

Optical system for a microlithographic projection exposure apparatu...

Lighting system of a microlithographic projection exposure system a...

Illumination system of a microlithographic projection exposure appa...

Illumination system of a microlithographic projection exposure appa...

Illumination system of a microlithographic projection exposure appa...

Method for measuring an optical system

Patents Applicationslast 30 patents

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...

COMPUTER IMPLEMENTED METHOD FOR THE DETECTION OF ANOMALIES IN AN IM...

COMPUTER IMPLEMENTED METHOD FOR THE DETECTION AND CLASSIFICATION OF...

METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

METHOD FOR DEFECT DETECTION IN A SEMICONDUCTOR SAMPLE IN SAMPLE IMA...

SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES

CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...

PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...

TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...

DEFECT DETECTION FOR SEMICONDUCTOR STRUCTURES ON A WAFER

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...

METHODS AND EVALUATION DEVICES FOR ANALYZING THREE-DIMENSIONAL DATA...

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

WAFER-TILT DETERMINATION FOR SLICE-AND-IMAGE PROCESS

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...

FIB-SEM 3D Tomography for measuring shape deviations of HAR structures

CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...

INTERACTIVE AND ITERATIVE TRAINING OF A CLASSIFICATION ALGORITHM FO...

PROCESSING IMAGE DATA SETS

METHOD OF RECORDING AN IMAGE USING A PARTICLE MICROSCOPE

ROOT CAUSE ANALYSIS FOR FABRICATION PROCESSES OF SEMICONDUCTOR STRU...

METHODS AND SYSTEMS FOR DEFINING A PROCESS WINDOW

METHOD AND DEVICES FOR DETERMINING METROLOGY SITES

ERROR REDUCTION IN IMAGES WHICH WERE GENERATED WITH CHARGED PARTICL...