Thomas Missalla

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Wismar, DE

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Patents Grantslast 30 patents

Information Patent Grant
Microscopic system for testing structures and defects on EUV lithog...
- Patent number 11,615,897
- Issue date Mar 28, 2023
- RI Research Institute GmbH
- Rainer Lebert
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for the spatially resolved measurement of parameters in a cr...
- Patent number 8,686,372
- Issue date Apr 1, 2014
- Ushio Denki Kabushiki Kaisha
- Thomas Missalla
- G01 - MEASURING TESTING
Information Patent Grant
Plasma radiation source and device for creating a gas curtain for p...
- Patent number 7,328,885
- Issue date Feb 12, 2008
- Xtreme technologies GmbH
- Max C. Schuermann
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Narrow-band transmission filter for EUV radiation
- Patent number 7,329,876
- Issue date Feb 12, 2008
- Xtreme technologies GmbH
- Max Christian Schuermann
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
MICROSCOPIC SYSTEM FOR TESTING STRUCTURES AND DEFECTS ON EUV LITHOG...
- Publication number 20220392660
- Publication date Dec 8, 2022
- RI Research Instruments GmbH
- Rainer LEBERT
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Method for the Spatially Resolved Measurement of Parameters in a Cr...
- Publication number 20120138805
- Publication date Jun 7, 2012
- XTREME TECHNOLOGIES GMBH
- Thomas Missalla
- G01 - MEASURING TESTING
Information Patent Application
NARROW-BAND TRANSMISSION FILTER FOR EUV RADIATION
- Publication number 20070170367
- Publication date Jul 26, 2007
- XTREME technologies GmbH;
- Max Christian Schuermann
- G02 - OPTICS
Information Patent Application
Plasma radiation source and device for creating a gas curtain for p...
- Publication number 20060158126
- Publication date Jul 20, 2006
- Max C. Schuermann
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement for determining the spectral reflectivity of a measurem...
- Publication number 20040062350
- Publication date Apr 1, 2004
- JENOPTIK Mikrotechnik GmbH
- Max Christian Schuermann
- G01 - MEASURING TESTING