Thomas Parrill

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North Andover, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ion beam incident angle detector for ion implant systems
- Patent number 6,828,572
- Issue date Dec 7, 2004
- Axcelis Technologies, Inc.
- Ronald N. Reece
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective nitride etching with silicate ion pre-loading
- Patent number 6,287,983
- Issue date Sep 11, 2001
- Texas Instruments Incorporated
- Der'E Jan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for trench isolation of semiconductor devices
- Patent number 6,228,741
- Issue date May 8, 2001
- Texas Instruments Incorporated
- Shawn T. Walsh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM INCIDENT ANGLE DETECTOR FOR ION IMPLANT SYSTEMS
- Publication number 20040195528
- Publication date Oct 7, 2004
- Ronald N. Reece
- H01 - BASIC ELECTRIC ELEMENTS