Thomas POIESZ

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of clamping a substrate to a clamping system, a substrate ho...
- Patent number 12,158,704
- Issue date Dec 3, 2024
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, substrate and system for estimating stress in a substrate
- Patent number 11,953,837
- Issue date Apr 9, 2024
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method for unloading a substrate and method...
- Patent number 11,664,264
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate holder for use in a lithographic apparatus
- Patent number 11,448,976
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 11,269,259
- Issue date Mar 8, 2022
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, substrate support and method of clamping a substr...
- Patent number 11,187,998
- Issue date Nov 30, 2021
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder and a method of manufacturing a device
- Patent number 11,086,234
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 10,871,715
- Issue date Dec 22, 2020
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, a lithographic apparatus and a device manufactur...
- Patent number 10,768,535
- Issue date Sep 8, 2020
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder and a method of manufacturing a substrate holder
- Patent number 10,719,019
- Issue date Jul 21, 2020
- ASML Holding N.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support, method for loading a substrate on a substrate su...
- Patent number 10,656,536
- Issue date May 19, 2020
- ASML Netherlands B.V.
- Martinus Hendrikus Antonius Leenders
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method for loading a substrate
- Patent number 10,599,053
- Issue date Mar 24, 2020
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,514,615
- Issue date Dec 24, 2019
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
- Patent number 10,453,734
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Thomas Poiesz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and method for loading a substrate
- Patent number 10,353,303
- Issue date Jul 16, 2019
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate support, method of compensating unflatness of an upper su...
- Patent number 10,310,393
- Issue date Jun 4, 2019
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder and support table for lithography
- Patent number 9,939,736
- Issue date Apr 10, 2018
- ASML Netherlands B.V.
- Martijn Houben
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
- Patent number 9,798,253
- Issue date Oct 24, 2017
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OBJECT HOLDER, LITHOGRAPHIC APPARATUS COMPRISING SUCH OBJECT HOLDER...
- Publication number 20250069932
- Publication date Feb 27, 2025
- ASML NETHERLANDS B.V.
- Martinus Cornelis REIJNEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMP FOR HOLDING AN OBJECT AND METHOD
- Publication number 20240385536
- Publication date Nov 21, 2024
- ASML Netherlands B.V.
- Thomas Poiesz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE RESTRAINING SYSTEM
- Publication number 20240234196
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Marinus Augustinus Christiaan VERSCHUREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE RESTRAINING SYSTEM
- Publication number 20240136218
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Marinus Augustinus Christiaan VERSCHUREN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...
- Publication number 20230260820
- Publication date Aug 17, 2023
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20220357675
- Publication date Nov 10, 2022
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, SUBSTRATE AND SYSTEM FOR ESTIMATING STRESS IN A SUBSTRATE
- Publication number 20220113640
- Publication date Apr 14, 2022
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM, A SUBSTRATE HO...
- Publication number 20220082952
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Abraham Alexander SOETHOUDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20210165334
- Publication date Jun 3, 2021
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20210072649
- Publication date Mar 11, 2021
- ASML NETHERLANDS B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
- Publication number 20210053177
- Publication date Feb 25, 2021
- ASML NETHERLANDS B.V.
- Bert Dirk SCHOLTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER, SUBSTRATE SUPPORT AND METHOD OF CLAMPING A SUBSTR...
- Publication number 20200326635
- Publication date Oct 15, 2020
- ASML NETHERLANDS B.V.
- Abraham Alexander SOETHOUDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE
- Publication number 20200292947
- Publication date Sep 17, 2020
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20200183289
- Publication date Jun 11, 2020
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTUR...
- Publication number 20200142317
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR LOADING A SUBSTRATE
- Publication number 20190339627
- Publication date Nov 7, 2019
- ASML NETHERLANDS B.V.
- Abraham Alexander SOETHOUDT
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
- Publication number 20190332015
- Publication date Oct 31, 2019
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...
- Publication number 20190043749
- Publication date Feb 7, 2019
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20180231897
- Publication date Aug 16, 2018
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT, METHOD OF COMPENSATING UNFLATNESS OF AN UPPER SU...
- Publication number 20180188660
- Publication date Jul 5, 2018
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTUR...
- Publication number 20180190534
- Publication date Jul 5, 2018
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR LOADING A SUBSTRATE
- Publication number 20180149983
- Publication date May 31, 2018
- ASML NETHERLANDS B.V.
- Abraham Alexander SOETHOUDT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SU...
- Publication number 20170192359
- Publication date Jul 6, 2017
- ASML NETHERLANDS B.V.
- Martinus Hendrikus Antonius LEENDERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20170045828
- Publication date Feb 16, 2017
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER AND SUPPORT TABLE FOR LITHOGRAPHY
- Publication number 20160334710
- Publication date Nov 17, 2016
- ASML NETHERLANDS B.V.
- Martijn HOUBEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Thomas POIESZ

Person

Patents Grantslast 30 patents

Method of clamping a substrate to a clamping system, a substrate ho...

Method, substrate and system for estimating stress in a substrate

Lithographic apparatus, method for unloading a substrate and method...

Substrate holder for use in a lithographic apparatus

Lithographic apparatus and a device manufacturing method

Substrate holder, substrate support and method of clamping a substr...

Substrate holder and a method of manufacturing a device

Lithographic apparatus and a device manufacturing method

Support apparatus, a lithographic apparatus and a device manufactur...

Substrate holder and a method of manufacturing a substrate holder

Substrate support, method for loading a substrate on a substrate su...

Lithographic apparatus and method for loading a substrate

Support apparatus, lithographic apparatus and device manufacturing...

Substrate holder, a lithographic apparatus and method of manufactur...

Lithographic apparatus and method for loading a substrate

Substrate support, method of compensating unflatness of an upper su...

Substrate holder and support table for lithography

Support table for a lithographic apparatus, lithographic apparatus...

Patents Applicationslast 30 patents

OBJECT HOLDER, LITHOGRAPHIC APPARATUS COMPRISING SUCH OBJECT HOLDER...

CLAMP FOR HOLDING AN OBJECT AND METHOD

SUBSTRATE RESTRAINING SYSTEM

SUBSTRATE RESTRAINING SYSTEM

VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...

LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

METHOD, SUBSTRATE AND SYSTEM FOR ESTIMATING STRESS IN A SUBSTRATE

METHOD OF CLAMPING A SUBSTRATE TO A CLAMPING SYSTEM, A SUBSTRATE HO...

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT

SUBSTRATE HOLDER, SUBSTRATE SUPPORT AND METHOD OF CLAMPING A SUBSTR...

SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTUR...

LITHOGRAPHIC APPARATUS AND METHOD FOR LOADING A SUBSTRATE

A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER

LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

SUBSTRATE SUPPORT, METHOD OF COMPENSATING UNFLATNESS OF AN UPPER SU...

SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTUR...

LITHOGRAPHIC APPARATUS AND METHOD FOR LOADING A SUBSTRATE

SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SU...

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

SUBSTRATE HOLDER AND SUPPORT TABLE FOR LITHOGRAPHY