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Thomas Robert Fisher Jr.
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Beacon, NY, US
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last 30 patents
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Patent Grant
Method and apparatus for monitoring polishing pad wear during proce...
Patent number
6,186,864
Issue date
Feb 13, 2001
International Business Machines Corporation
Thomas R. Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus of monitoring polishing pad wear during proces...
Patent number
6,045,434
Issue date
Apr 4, 2000
International Business Machines Corporation
Thomas R. Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer carrier assembly
Patent number
6,030,487
Issue date
Feb 29, 2000
International Business Machines Corporation
Thomas R. Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Vertical polishing tool and method
Patent number
5,897,425
Issue date
Apr 27, 1999
International Business Machines Corporation
Thomas Robert Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Selective polish process for titanium, titanium nitride, tantalum a...
Patent number
5,676,587
Issue date
Oct 14, 1997
International Business Machines Corporation
William Francis Landers
H01 - BASIC ELECTRIC ELEMENTS