Thomas Tatry

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Hard mask layer stack and a method of patterning
- Patent number 7,662,721
- Issue date Feb 16, 2010
- Infineon Technologies AG
- Dirk Manger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Hard Mask Layer Stack And A Method Of Patterning
- Publication number 20070243707
- Publication date Oct 18, 2007
- QIMONDA AG
- Dirk Manger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hard mask layer stack and a method of patterning
- Publication number 20070215986
- Publication date Sep 20, 2007
- Dirk Manger
- H01 - BASIC ELECTRIC ELEMENTS