Thomas WIRNSBERGER

Person

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People

Patents Grantslast 30 patents

Information Patent Grant
Substrate holding and locking system for chemical and/or electrolyt...
- Patent number 11,965,263
- Issue date Apr 23, 2024
- SEMSYSCO GMBH
- Herbert Ötzlinger
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate locking system, device and procedure for chemical and/or...
- Patent number 11,566,337
- Issue date Jan 31, 2023
- Semsysco GmbH
- Andreas Gleissner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 11,195,730
- Issue date Dec 7, 2021
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for plating a recess in a substrate
- Patent number 11,164,748
- Issue date Nov 2, 2021
- Semsyso GMBH
- Franz Markut
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,490,426
- Issue date Nov 26, 2019
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 10,269,615
- Issue date Apr 23, 2019
- Lam Research AG
- Ulrich Tschinderle
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 10,056,287
- Issue date Aug 21, 2018
- Lam Research AG
- Ulrich Tschinderle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 9,887,120
- Issue date Feb 6, 2018
- Lam Research AG
- Andreas Gleissner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for surface treatment using inorganic acid and...
- Patent number 9,653,328
- Issue date May 16, 2017
- Lam Research AG
- Harald Okorn-Schmidt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for treating surfaces of wafer-shaped articles and gripping...
- Patent number 9,633,890
- Issue date Apr 25, 2017
- Lam Research AG
- Ulrich Tschinderle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for holding wafer shaped articles
- Patent number 9,418,883
- Issue date Aug 16, 2016
- Lam Research AG
- Andreas Gleissner
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaning fluid, method and apparatus
- Patent number 9,044,794
- Issue date Jun 2, 2015
- Lam Research AG
- Frank Ludwig Holsteyns
- B08 - CLEANING
Information Patent Grant
Device for treating disc-like articles
- Patent number 8,833,380
- Issue date Sep 16, 2014
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface treatment using inorganic acid and...
- Patent number 8,709,165
- Issue date Apr 29, 2014
- Lam Research AG
- Harald Okorn-Schmidt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for holding wafer shaped articles
- Patent number 8,646,767
- Issue date Feb 11, 2014
- Lam Research AG
- Franz Kumnig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating disc-like articles
- Patent number 8,490,634
- Issue date Jul 23, 2013
- Lam Research AG
- Rainer Obweger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDING AND LOCKING SYSTEM FOR CHEMICAL AND/OR ELECTROLYT...
- Publication number 20230053226
- Publication date Feb 16, 2023
- Semsysco GmbH
- Herbert ÖTZLINGER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND DEVICE FOR PLATING A RECESS IN A SUBSTRATE
- Publication number 20220020591
- Publication date Jan 20, 2022
- Semsysco GmbH
- Franz Markut
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE LOCKING SYSTEM, DEVICE AND PROCEDURE FOR CHEMICAL AND/OR...
- Publication number 20210017662
- Publication date Jan 21, 2021
- Semsysco GmbH
- Andreas Gleissner
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20200090956
- Publication date Mar 19, 2020
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR PLATING A RECESS IN A SUBSTRATE
- Publication number 20190228975
- Publication date Jul 25, 2019
- Semsysco GmbH
- Franz Markut
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20170125281
- Publication date May 4, 2017
- LAM RESEARCH AG
- Andreas GLEISSNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160064242
- Publication date Mar 3, 2016
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20160027680
- Publication date Jan 28, 2016
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20150008632
- Publication date Jan 8, 2015
- LAM RESEARCH AG
- Andreas GLEISSNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...
- Publication number 20140209129
- Publication date Jul 31, 2014
- LAM RESEARCH AB
- Harald OKORN-SCHMIDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...
- Publication number 20130154203
- Publication date Jun 20, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130101372
- Publication date Apr 25, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20130062839
- Publication date Mar 14, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...
- Publication number 20120138097
- Publication date Jun 7, 2012
- LAM RESEARCH AG
- Harald OKORN-SCHMIDT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20120018940
- Publication date Jan 26, 2012
- LAM RESEARCH AG
- FRANZ KUMNIG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLES
- Publication number 20110304107
- Publication date Dec 15, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLES
- Publication number 20110253181
- Publication date Oct 20, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRASONIC CLEANING FLUID, METHOD AND APPARATUS
- Publication number 20110155169
- Publication date Jun 30, 2011
- LAM RESEARCH AG
- Frank Ludwig HOLSTEYNS
- B08 - CLEANING

Thomas WIRNSBERGER

Person

Patents Grantslast 30 patents

Substrate holding and locking system for chemical and/or electrolyt...

Substrate locking system, device and procedure for chemical and/or...

Method and apparatus for processing wafer-shaped articles

Method and device for plating a recess in a substrate

Method and apparatus for processing wafer-shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Method and apparatus for surface treatment using inorganic acid and...

Device for treating surfaces of wafer-shaped articles and gripping...

Device for holding wafer shaped articles

Ultrasonic cleaning fluid, method and apparatus

Device for treating disc-like articles

Method and apparatus for surface treatment using inorganic acid and...

Device for holding wafer shaped articles

Device for treating disc-like articles

Patents Applicationslast 30 patents

SUBSTRATE HOLDING AND LOCKING SYSTEM FOR CHEMICAL AND/OR ELECTROLYT...

METHOD AND DEVICE FOR PLATING A RECESS IN A SUBSTRATE

SUBSTRATE LOCKING SYSTEM, DEVICE AND PROCEDURE FOR CHEMICAL AND/OR...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND DEVICE FOR PLATING A RECESS IN A SUBSTRATE

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...

DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

DEVICE FOR TREATING DISC-LIKE ARTICLES

DEVICE FOR TREATING DISC-LIKE ARTICLES

ULTRASONIC CLEANING FLUID, METHOD AND APPARATUS