Thorsten Rassel

Person

Buehlerzell, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 9,341,807
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Grant
Multi facet mirror of a microlithographic projection exposure appar...
- Patent number 9,298,101
- Issue date Mar 29, 2016
- Carl Zeiss SMT GmbH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Grant
Multi facet mirror of a microlithographic projection exposure appar...
- Patent number 9,041,910
- Issue date May 26, 2015
- Carl Zeiss SMT GmbH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 8,854,603
- Issue date Oct 7, 2014
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning method for an optical arrangement of a projection illum...
- Patent number 8,810,934
- Issue date Aug 19, 2014
- Carl Zeiss SMT GmbH
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device
- Patent number 7,548,387
- Issue date Jun 16, 2009
- Carl Zeiss SMT AG
- Thorsten Rassel
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...
- Publication number 20150227053
- Publication date Aug 13, 2015
- Carl Zeiss SMT GMBH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20150009557
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...
- Publication number 20130128252
- Publication date May 23, 2013
- Carl Zeiss SMT GMBH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20110267596
- Publication date Nov 3, 2011
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUM...
- Publication number 20110235005
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE
- Publication number 20060230413
- Publication date Oct 12, 2006
- Thorsten Rassel
- G02 - OPTICS
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure facility
- Publication number 20040263812
- Publication date Dec 30, 2004
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Thorsten Rassel

Person

Patents Grantslast 30 patents

Projection exposure apparatus for microlithography for the producti...

Gravitation compensation for optical elements in projection exposur...

Multi facet mirror of a microlithographic projection exposure appar...

Multi facet mirror of a microlithographic projection exposure appar...

Projection exposure apparatus for microlithography for the producti...

Gravitation compensation for optical elements in projection exposur...

Positioning method for an optical arrangement of a projection illum...

Imaging device in a projection exposure facility

Imaging device in a projection exposure facility

Imaging device in a projection exposure machine

Optical imaging device

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Patents Applicationslast 30 patents

MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

MULTI FACET MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPAR...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUM...

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

OPTICAL IMAGING DEVICE

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility