Timothy J. Franklin

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ring for an anti-rotation process kit for a substrate processing ch...
- Patent number D1049067
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Rohan Vijay Rane
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods to fabricate chamber component holes using laser drilling
- Patent number 12,030,135
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Sumit Agarwal
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lift pin assembly
- Patent number 12,020,977
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Alexander Sulyman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to fabricate chamber component holes using laser drilling
- Patent number 11,992,900
- Issue date May 28, 2024
- Applied Materials, Inc.
- Sumit Agarwal
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shunt door for magnets in plasma process chamber
- Patent number 11,959,174
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Kallol Bera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to fabricate chamber component holes using laser drilling
- Patent number 11,819,948
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Sumit Agarwal
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor processing chambers for deposition and etch
- Patent number 11,699,571
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic housing systems
- Patent number 11,587,764
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber
- Patent number 11,560,626
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Timothy Joseph Franklin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuneable uniformity control utilizing rotational magnetic housing
- Patent number 11,557,466
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Samuel E. Gottheim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal repeatability and in-situ showerhead temperature monitoring
- Patent number 11,508,558
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Timothy Joseph Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulating film properties by optimizing plasma coupling materials
- Patent number 11,270,905
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etch rate monitor
- Patent number 11,257,698
- Issue date Feb 22, 2022
- Applied Materials, Inc.
- Philip Allan Kraus
- G01 - MEASURING TESTING
Information Patent Grant
RF electrostatic chuck filter circuit
- Patent number 11,189,517
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure steam anneal processing apparatus
- Patent number 10,854,483
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etch rate monitor
- Patent number 10,790,175
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal repeatability and in-situ showerhead temperature monitoring
- Patent number 10,607,817
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Timothy Joseph Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etch rate monitor
- Patent number 9,978,621
- Issue date May 22, 2018
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interchangeable sputter gun head
- Patent number 9,318,306
- Issue date Apr 19, 2016
- Intermolecular, Inc.
- Owen Fong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for atomic hydrogen surface treatment during G...
- Patent number 8,975,166
- Issue date Mar 10, 2015
- Intermolecular, Inc.
- Thai Cheng Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer apparatus for drying semiconductor substrates using an...
- Patent number 8,322,045
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing materials on a non-planar surface
- Patent number 8,318,609
- Issue date Nov 27, 2012
- Solyndra LLC
- Dan Marohl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems incorporating microwave heaters within fluid supply lines o...
- Patent number 7,845,308
- Issue date Dec 7, 2010
- Lam Research Corporation
- Jason Corneille
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stable cell platform
- Patent number 7,114,693
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Donald J. K. Olgado
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Integrated platen assembly for a chemical mechanical planarization...
- Patent number 6,837,964
- Issue date Jan 4, 2005
- Applied Materials, Inc.
- Timothy J. Franklin
- B24 - GRINDING POLISHING
Information Patent Grant
Multiple blade robot adjustment apparatus and associated method
- Patent number 6,571,657
- Issue date Jun 3, 2003
- Applied Materials Inc.
- Donald J. Olgado
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transfer chamber with side wall port
- Patent number 6,568,896
- Issue date May 27, 2003
- Applied Materials, Inc.
- Timothy J. Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated platen assembly for a chemical mechanical planarization...
- Patent number 6,503,131
- Issue date Jan 7, 2003
- Applied Materials, Inc.
- Timothy J. Franklin
- B24 - GRINDING POLISHING
Information Patent Grant
Powered lift for ECP chamber
- Patent number 6,361,674
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Timothy J. Franklin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for baking out a gate valve in a semiconductor...
- Patent number 6,274,854
- Issue date Aug 14, 2001
- Applied Materials, Inc.
- Timothy Joseph Franklin
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20240271284
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Kallol BERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS
- Publication number 20240266152
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Michael Andrew STEARNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
- Publication number 20230413446
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Phillip A. Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR DEPOSITION AND ETCH
- Publication number 20230343552
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING INTERIOR SURFACES OF COMPLEX BODIES BY ATOMIC LAYER DEPOSITION
- Publication number 20230323531
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Joseph Frederick Behnke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA RESISTANT ARC PREVENTATIVE COATINGS FOR MANUFACTURING EQUPIM...
- Publication number 20230187182
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Joseph Frederick Sommers
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
POROUS PLUG FOR ELECTROSTATIC CHUCK GAS DELIVERY
- Publication number 20230170241
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC HOUSING SYSTEMS
- Publication number 20230154726
- Publication date May 18, 2023
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
- Publication number 20230139431
- Publication date May 4, 2023
- Applied Materials, Inc.
- Samuel E. GOTTHEIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION
- Publication number 20230118651
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN ASSEMBLY
- Publication number 20220293451
- Publication date Sep 15, 2022
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN MECHANISM
- Publication number 20220293452
- Publication date Sep 15, 2022
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO FABRICATE CHAMBER COMPONENT USING LASER DRILLING
- Publication number 20220111468
- Publication date Apr 14, 2022
- Sumit AGARWAL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS TO FABRICATE CHAMBER COMPONENT USING LASER DRILLING
- Publication number 20220111467
- Publication date Apr 14, 2022
- Sumit AGARWAL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
THREAD PROFILES FOR SEMICONDUCTOR PROCESS CHAMBER COMPONENTS
- Publication number 20220102117
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Reyn Tetsuro WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ASSEMBLY WITH RECURSIVE GAS CHANNELS
- Publication number 20220093361
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Reyn Tetsuro WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ASSEMBLY WITH RECURSIVE GAS CHANNELS
- Publication number 20220093362
- Publication date Mar 24, 2022
- Joseph Frederick BEHNKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS FOR DEPOSITION AND ETCH
- Publication number 20220076920
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Khokan Chandra Paul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF FREQUENCY CONTROL AND GROUND PATH RETURN IN SEMICONDUCTOR PROCES...
- Publication number 20210391146
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING HOLES FROM BOTH SIDES OF SUBSTRATE
- Publication number 20210310122
- Publication date Oct 7, 2021
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES
- Publication number 20210287881
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONDUCTANCE LINERS IN SEMICONDUCTOR PROCE...
- Publication number 20210285101
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- TIMOTHY JOSEPH FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER
- Publication number 20210269919
- Publication date Sep 2, 2021
- Applied Materials, Inc.
- Kallol BERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ASSEMBLY
- Publication number 20210238746
- Publication date Aug 5, 2021
- Applied Materials, Inc.
- TIMOTHY JOSEPH FRANKLIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY
- Publication number 20210238745
- Publication date Aug 5, 2021
- Applied Materials, Inc.
- TIMOTHY JOSEPH FRANKLIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD ASSEMBLY
- Publication number 20210238744
- Publication date Aug 5, 2021
- Applied Materials, Inc.
- TIMOTHY JOSEPH FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
- Publication number 20210050189
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Samuel E. GOTTHEIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATING FILM PROPERTIES BY OPTIMIZING PLASMA COUPLING MATERIALS
- Publication number 20210005500
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCH RATE MONITOR
- Publication number 20200381280
- Publication date Dec 3, 2020
- Philip Allan Kraus
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING CHAMBER
- Publication number 20200370177
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS

Timothy J. Franklin

Person

Patents Grantslast 30 patents

Ring for an anti-rotation process kit for a substrate processing ch...

Methods to fabricate chamber component holes using laser drilling

Lift pin assembly

Methods to fabricate chamber component holes using laser drilling

Shunt door for magnets in plasma process chamber

Methods to fabricate chamber component holes using laser drilling

Semiconductor processing chambers for deposition and etch

Magnetic housing systems

Substrate processing chamber

Tuneable uniformity control utilizing rotational magnetic housing

Thermal repeatability and in-situ showerhead temperature monitoring

Modulating film properties by optimizing plasma coupling materials

Selective etch rate monitor

RF electrostatic chuck filter circuit

High pressure steam anneal processing apparatus

Selective etch rate monitor

Thermal repeatability and in-situ showerhead temperature monitoring

Selective etch rate monitor

Interchangeable sputter gun head

Method and apparatus for atomic hydrogen surface treatment during G...

Single wafer apparatus for drying semiconductor substrates using an...

Method of depositing materials on a non-planar surface

Systems incorporating microwave heaters within fluid supply lines o...

Stable cell platform

Integrated platen assembly for a chemical mechanical planarization...

Multiple blade robot adjustment apparatus and associated method

Transfer chamber with side wall port

Integrated platen assembly for a chemical mechanical planarization...

Powered lift for ECP chamber

Method and apparatus for baking out a gate valve in a semiconductor...

Patents Applicationslast 30 patents

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER

PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS

DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...

SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR DEPOSITION AND ETCH

COATING INTERIOR SURFACES OF COMPLEX BODIES BY ATOMIC LAYER DEPOSITION

PLASMA RESISTANT ARC PREVENTATIVE COATINGS FOR MANUFACTURING EQUPIM...

POROUS PLUG FOR ELECTROSTATIC CHUCK GAS DELIVERY

MAGNETIC HOUSING SYSTEMS

TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING

REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION

LIFT PIN ASSEMBLY

LIFT PIN MECHANISM

METHODS TO FABRICATE CHAMBER COMPONENT USING LASER DRILLING

METHODS TO FABRICATE CHAMBER COMPONENT USING LASER DRILLING

THREAD PROFILES FOR SEMICONDUCTOR PROCESS CHAMBER COMPONENTS

SHOWERHEAD ASSEMBLY WITH RECURSIVE GAS CHANNELS

SHOWERHEAD ASSEMBLY WITH RECURSIVE GAS CHANNELS

SEMICONDUCTOR PROCESSING CHAMBERS FOR DEPOSITION AND ETCH

RF FREQUENCY CONTROL AND GROUND PATH RETURN IN SEMICONDUCTOR PROCES...

METHOD OF FORMING HOLES FROM BOTH SIDES OF SUBSTRATE

METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES

METHODS AND APPARATUS FOR CONDUCTANCE LINERS IN SEMICONDUCTOR PROCE...

SHUNT DOOR FOR MAGNETS IN PLASMA PROCESS CHAMBER

SHOWERHEAD ASSEMBLY

SHOWERHEAD ASSEMBLY

SHOWER HEAD ASSEMBLY

TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING

MODULATING FILM PROPERTIES BY OPTIMIZING PLASMA COUPLING MATERIALS

SELECTIVE ETCH RATE MONITOR

SUBSTRATE PROCESSING CHAMBER