Tohru KIUCHI

Person

Higashikurume-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate case and substrate accommodation apparatus
- Patent number 11,342,206
- Issue date May 24, 2022
- Nikon Corporation
- Hideo Mizutani
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 11,073,767
- Issue date Jul 27, 2021
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,691,027
- Issue date Jun 23, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,591,827
- Issue date Mar 17, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate case and substrate accommodation apparatus
- Patent number 10,541,160
- Issue date Jan 21, 2020
- Nikon Corporation
- Hideo Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,527,945
- Issue date Jan 7, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,156,795
- Issue date Dec 18, 2018
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,007,190
- Issue date Jun 26, 2018
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 9,651,868
- Issue date May 16, 2017
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Leader member, substrate, substrate cartridge, substrate-processing...
- Patent number 9,193,560
- Issue date Nov 24, 2015
- Nikon Corporation
- Tomohide Hamada
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Flexible substrate, manufacturing method of display element, and ma...
- Patent number 9,178,155
- Issue date Nov 3, 2015
- Nikon Corporation
- Kei Nara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern forming device, pattern forming method, and device manufact...
- Patent number 9,152,062
- Issue date Oct 6, 2015
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cartridge, substrate processing apparatus, substrate proc...
- Patent number 9,072,210
- Issue date Jun 30, 2015
- Nikon Corporation
- Tohru Kiuchi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 8,922,748
- Issue date Dec 30, 2014
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cartridge, substrate processing apparatus, substrate proc...
- Patent number 8,801,307
- Issue date Aug 12, 2014
- Nikon Corporation
- Tohru Kiuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 8,780,326
- Issue date Jul 15, 2014
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus and immersion exposure method, and dev...
- Patent number 8,743,341
- Issue date Jun 3, 2014
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 8,605,249
- Issue date Dec 10, 2013
- Nikon Corporation
- Hideya Inoue
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,508,714
- Issue date Aug 13, 2013
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and electronic device manufacturing method
- Patent number 8,440,375
- Issue date May 14, 2013
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring expansion/contraction, method for processing s...
- Patent number 8,399,263
- Issue date Mar 19, 2013
- Nikon Corporation
- Tohru Kiuchi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,384,875
- Issue date Feb 26, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern formation apparatus, pattern formation method, and device m...
- Patent number 8,379,186
- Issue date Feb 19, 2013
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 8,289,500
- Issue date Oct 16, 2012
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 8,264,666
- Issue date Sep 11, 2012
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming device, pattern forming method, and device manufact...
- Patent number 8,235,695
- Issue date Aug 7, 2012
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion exposure apparatus, exposure method, and method fo...
- Patent number 8,040,490
- Issue date Oct 18, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,013,975
- Issue date Sep 6, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus and immersion exposure method, and dev...
- Patent number 7,872,730
- Issue date Jan 18, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 7,573,052
- Issue date Aug 11, 2009
- Nikon Corporation
- Hideya Inoue
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METAL WIRING MANUFACTURING METHOD, TRANSISTOR MANUFACTURING METHOD,...
- Publication number 20240164012
- Publication date May 16, 2024
- Nikon Corporation
- Shohei KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLEXIBLE SENSOR
- Publication number 20220082458
- Publication date Mar 17, 2022
- Nikon Corporation
- Shohei KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20200310253
- Publication date Oct 1, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS
- Publication number 20200118847
- Publication date Apr 16, 2020
- Nikon Corporation
- Hideo MIZUTANI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20200089129
- Publication date Mar 19, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20190332018
- Publication date Oct 31, 2019
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20190025713
- Publication date Jan 24, 2019
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20180267413
- Publication date Sep 20, 2018
- NIKON CORPORATION
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20170168400
- Publication date Jun 15, 2017
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Processing Apparatus, Processing Apparatus, and Method fo...
- Publication number 20150241778
- Publication date Aug 27, 2015
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CARTRIDGE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROC...
- Publication number 20140290041
- Publication date Oct 2, 2014
- NIKON CORPORATION
- Tohru KIUCHI
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
MOTOR APPARATUS, METHOD OF DRIVING ROTOR, AND ROBOT APPARATUS
- Publication number 20130038172
- Publication date Feb 14, 2013
- Nikon Corporation
- Takashi Nagase
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
EXPOSURE APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND DEVICE MANU...
- Publication number 20130027684
- Publication date Jan 31, 2013
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20130010276
- Publication date Jan 10, 2013
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...
- Publication number 20120270144
- Publication date Oct 25, 2012
- NIKON CORPORATION
- Tohru KIUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LEADER MEMBER, SUBSTRATE, SUBSTRATE CARTRIDGE, SUBSTRATE-PROCESSING...
- Publication number 20120231694
- Publication date Sep 13, 2012
- Tomohide HAMADA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Exposure apparatus, exposure method, and device manufacturing method
- Publication number 20110222037
- Publication date Sep 15, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS
- Publication number 20110155838
- Publication date Jun 30, 2011
- Hideo MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARTRIDGE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROC...
- Publication number 20110085841
- Publication date Apr 14, 2011
- Tohru KIUCHI
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Immersion exposure apparatus and immersion exposure method, and dev...
- Publication number 20110080568
- Publication date Apr 7, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20110026005
- Publication date Feb 3, 2011
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMATION APPARATUS, PATTERN FORMATION METHOD, AND DEVICE M...
- Publication number 20110013162
- Publication date Jan 20, 2011
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...
- Publication number 20110012294
- Publication date Jan 20, 2011
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTRUING DE...
- Publication number 20100265483
- Publication date Oct 21, 2010
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLEXIBLE SUBSTRATE, MANUFACTURING METHOD OF DISPLAY ELEMENT, AND MA...
- Publication number 20100143595
- Publication date Jun 10, 2010
- Kei NARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING S...
- Publication number 20100105153
- Publication date Apr 29, 2010
- Tohru Kiuchi
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20100079743
- Publication date Apr 1, 2010
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20090263736
- Publication date Oct 22, 2009
- NIKON CORPORATION
- Hideya INOUE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and device manufacturing method
- Publication number 20090208885
- Publication date Aug 20, 2009
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20090002658
- Publication date Jan 1, 2009
- Nikon Corporation
- Tohru Kiuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tohru KIUCHI

Person

Patents Grantslast 30 patents

Substrate case and substrate accommodation apparatus

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

Substrate case and substrate accommodation apparatus

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

Leader member, substrate, substrate cartridge, substrate-processing...

Flexible substrate, manufacturing method of display element, and ma...

Pattern forming device, pattern forming method, and device manufact...

Substrate cartridge, substrate processing apparatus, substrate proc...

Exposure apparatus, exposure method, and device manufacturing method

Substrate cartridge, substrate processing apparatus, substrate proc...

Exposure apparatus, exposure method, and device manufacturing method

Immersion exposure apparatus and immersion exposure method, and dev...

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus, exposure method, and method for producing device

Exposure method and electronic device manufacturing method

Method for measuring expansion/contraction, method for processing s...

Exposure apparatus, exposure method, and method for producing device

Pattern formation apparatus, pattern formation method, and device m...

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus, exposure method, and method of manufacturing de...

Pattern forming device, pattern forming method, and device manufact...

Liquid immersion exposure apparatus, exposure method, and method fo...

Exposure apparatus, exposure method, and method for producing device

Immersion exposure apparatus and immersion exposure method, and dev...

Exposure apparatus, exposure method, and device manufacturing method

Patents Applicationslast 30 patents

METAL WIRING MANUFACTURING METHOD, TRANSISTOR MANUFACTURING METHOD,...

FLEXIBLE SENSOR

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

Substrate Processing Apparatus, Processing Apparatus, and Method fo...

SUBSTRATE CARTRIDGE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROC...

MOTOR APPARATUS, METHOD OF DRIVING ROTOR, AND ROBOT APPARATUS

EXPOSURE APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND DEVICE MANU...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...

LEADER MEMBER, SUBSTRATE, SUBSTRATE CARTRIDGE, SUBSTRATE-PROCESSING...

Exposure apparatus, exposure method, and device manufacturing method

SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS

SUBSTRATE CARTRIDGE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROC...

Immersion exposure apparatus and immersion exposure method, and dev...

Exposure apparatus, exposure method, and method for producing device

PATTERN FORMATION APPARATUS, PATTERN FORMATION METHOD, AND DEVICE M...

PATTERN FORMING DEVICE, PATTERN FORMING METHOD, AND DEVICE MANUFACT...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTRUING DE...

FLEXIBLE SUBSTRATE, MANUFACTURING METHOD OF DISPLAY ELEMENT, AND MA...

METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING S...

Exposure apparatus, exposure method, and method for producing device

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus, exposure method, and method for producing device