Tom Anderson

Person

Hayward, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compact high density plasma source
- Patent number 12,198,896
- Issue date Jan 14, 2025
- Lam Research Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic shielding for plasma sources
- Patent number 11,177,067
- Issue date Nov 16, 2021
- Lam Research Corporation
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,770,363
- Issue date Sep 8, 2020
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF antenna producing a uniform near-field Poynting vector
- Patent number 10,685,810
- Issue date Jun 16, 2020
- Lam Research Corporation
- Hema Swaroop Mopidevi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ferrite cage RF isolator for power circuitry
- Patent number 10,460,914
- Issue date Oct 29, 2019
- Lam Research Corporation
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF antenna producing a uniform near-field Poynting vector
- Patent number 10,354,838
- Issue date Jul 16, 2019
- Lam Research Corporation
- Hema Swaroop Mopidevi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,049,948
- Issue date Aug 14, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency (RF) power filters and plasma processing systems in...
- Patent number 8,742,666
- Issue date Jun 3, 2014
- Lam Research Corporation
- Maolin Long
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Megasonic cleaning efficiency using auto-tuning of a RF generator a...
- Patent number 7,909,934
- Issue date Mar 22, 2011
- Lam Research Corporation
- John Boyd
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Matching circuit for a complex radio frequency (RF) waveform
- Patent number 7,811,410
- Issue date Oct 12, 2010
- Lam Research Corporation
- Andres Leming
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Solidifying layer for wafer cleaning
- Patent number 7,503,977
- Issue date Mar 17, 2009
- Lam Research Corporation
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for automatic control of an RF generat...
- Patent number 7,326,581
- Issue date Feb 5, 2008
- Lam Research Corporation
- Thomas W. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distribution of energy in a high frequency resonating wafer process...
- Patent number 7,237,564
- Issue date Jul 3, 2007
- Lam Research Corporation
- Tom Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Apparatus for oscillating a head and methods for implementing the same
- Patent number 7,170,190
- Issue date Jan 30, 2007
- Lam Research Corporation
- Randolph E. Treur
- A46 - BRUSHWARE
Information Patent Grant
System, method and apparatus for constant voltage control of RF gen...
- Patent number 7,053,000
- Issue date May 30, 2006
- Lam Research Corporation
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Phase control of megasonic RF generator for optimum operation
- Patent number 7,033,845
- Issue date Apr 25, 2006
- Lam Research Corporation
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Pad conditioner control using feedback from a measured polishing pa...
- Patent number 7,018,269
- Issue date Mar 28, 2006
- Lam Research Corporation
- Thomas W. Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
System, method and apparatus for automatic control of an RF generat...
- Patent number 6,998,349
- Issue date Feb 14, 2006
- Lam Research Corporation
- Thomas W. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Megasonic cleaning efficiency using auto-tuning of an RF generator...
- Patent number 6,995,067
- Issue date Feb 7, 2006
- Lam Research Corporation
- John Boyd
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Phobic barrier meniscus separation and containment
- Patent number 6,988,326
- Issue date Jan 24, 2006
- Lam Research Corporation
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer lifting device and methods for implementing the...
- Patent number 6,646,857
- Issue date Nov 11, 2003
- Lam Research Corporation
- Thomas W. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular control system for manufacturing facility
- Patent number 6,101,419
- Issue date Aug 8, 2000
- Lam Research Corporation
- Robert D. Kennedy
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CONTROL OF PLASMA FORMATION BY RF COUPLING STRUCTURES
- Publication number 20230326720
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC SHIELDING FOR PLASMA SOURCES
- Publication number 20220044864
- Publication date Feb 10, 2022
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT HIGH DENSITY PLASMA SOURCE
- Publication number 20210183619
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF ANTENNA PRODUCING A UNIFORM NEAR-FIELD POYNTING VECTOR
- Publication number 20200118792
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC SHIELDING FOR PLASMA SOURCES
- Publication number 20200035409
- Publication date Jan 30, 2020
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ferrite Cage RF Isolator For Power Circuitry
- Publication number 20190164729
- Publication date May 30, 2019
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20180374763
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20140154819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY (RF) POWER FILTERS AND PLASMA PROCESSING SYSTEMS IN...
- Publication number 20120032756
- Publication date Feb 9, 2012
- Maolin LONG
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MATCHING CIRCUIT FOR A COMPLEX RADIO FREQUENCY (RF) WAVEFORM
- Publication number 20090315596
- Publication date Dec 24, 2009
- LAM RESEARCH CORPORATION
- Andres Leming
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Megasonic cleaning efficiency using auto-tuning of a RF generator a...
- Publication number 20060000487
- Publication date Jan 5, 2006
- LAM RESEARCH CORPORATION
- John Boyd
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
PHOBIC BARRIER MENISCUS SEPARATION AND CONTAINMENT
- Publication number 20050217135
- Publication date Oct 6, 2005
- Lam Research Corp.
- Robert J. O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, method and apparatus for automatic control of an RF generat...
- Publication number 20050191769
- Publication date Sep 1, 2005
- LAM RESEARCH CORPORATION
- Thomas W. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pad conditioner control using feedback from a measured polishing pa...
- Publication number 20040259477
- Publication date Dec 23, 2004
- Thomas W. Anderson
- B24 - GRINDING POLISHING
Information Patent Application
System, method and apparatus for constant voltage control of RF gen...
- Publication number 20040174155
- Publication date Sep 9, 2004
- LAM RESEARCH CORPORATION
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Megasonic cleaning efficiency using auto-tuning of an RF generator...
- Publication number 20040154637
- Publication date Aug 12, 2004
- LAM RESEARCH CORPORATION
- John Boyd
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Phase control of megasonic RF generator for optimum operation
- Publication number 20040157349
- Publication date Aug 12, 2004
- LAM RESEARCH CORPORATION
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
System, method and apparatus for automatic control of an RF generat...
- Publication number 20040157348
- Publication date Aug 12, 2004
- LAM RESEARCH CORPORATION
- Thomas W. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor wafer lifting device and methods for implementing the...
- Publication number 20020141133
- Publication date Oct 3, 2002
- Thomas W. Anderson
- H01 - BASIC ELECTRIC ELEMENTS

Tom Anderson

Person

Patents Grantslast 30 patents

Compact high density plasma source

Magnetic shielding for plasma sources

Power switching system for ESC with array of thermal control elements

RF antenna producing a uniform near-field Poynting vector

Ferrite cage RF isolator for power circuitry

RF antenna producing a uniform near-field Poynting vector

Power switching system for ESC with array of thermal control elements

Radio frequency (RF) power filters and plasma processing systems in...

Megasonic cleaning efficiency using auto-tuning of a RF generator a...

Matching circuit for a complex radio frequency (RF) waveform

Solidifying layer for wafer cleaning

System, method and apparatus for automatic control of an RF generat...

Distribution of energy in a high frequency resonating wafer process...

Apparatus for oscillating a head and methods for implementing the same

System, method and apparatus for constant voltage control of RF gen...

Phase control of megasonic RF generator for optimum operation

Pad conditioner control using feedback from a measured polishing pa...

System, method and apparatus for automatic control of an RF generat...

Megasonic cleaning efficiency using auto-tuning of an RF generator...

Phobic barrier meniscus separation and containment

Semiconductor wafer lifting device and methods for implementing the...

Modular control system for manufacturing facility

Patents Applicationslast 30 patents

CONTROL OF PLASMA FORMATION BY RF COUPLING STRUCTURES

MAGNETIC SHIELDING FOR PLASMA SOURCES

COMPACT HIGH DENSITY PLASMA SOURCE

RF ANTENNA PRODUCING A UNIFORM NEAR-FIELD POYNTING VECTOR

MAGNETIC SHIELDING FOR PLASMA SOURCES

Ferrite Cage RF Isolator For Power Circuitry

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

RADIO FREQUENCY (RF) POWER FILTERS AND PLASMA PROCESSING SYSTEMS IN...

MATCHING CIRCUIT FOR A COMPLEX RADIO FREQUENCY (RF) WAVEFORM

Megasonic cleaning efficiency using auto-tuning of a RF generator a...

PHOBIC BARRIER MENISCUS SEPARATION AND CONTAINMENT

System, method and apparatus for automatic control of an RF generat...

Pad conditioner control using feedback from a measured polishing pa...

System, method and apparatus for constant voltage control of RF gen...

Megasonic cleaning efficiency using auto-tuning of an RF generator...

Phase control of megasonic RF generator for optimum operation

System, method and apparatus for automatic control of an RF generat...

Semiconductor wafer lifting device and methods for implementing the...