Tom E. Blomberg

Person

Vantaa, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon oxide deposition method
- Patent number 12,148,609
- Issue date Nov 19, 2024
- ASM IP Holding B.V.
- Varun Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor container
- Patent number 12,146,218
- Issue date Nov 19, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 12,094,686
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of III-V compounds to form V-NAND devices
- Patent number 11,956,977
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead device for semiconductor processing system
- Patent number 11,948,813
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor container
- Patent number 11,873,558
- Issue date Jan 16, 2024
- Picosun Oy
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-containing conductive films
- Patent number 11,823,976
- Issue date Nov 21, 2023
- ASM IP Holding, B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,428
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,739,427
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming doped metal oxide films on a substrate by cyclic...
- Patent number 11,658,030
- Issue date May 23, 2023
- ASM IP Holding B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 11,640,899
- Issue date May 2, 2023
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for passivating dielectric films
- Patent number 11,549,177
- Issue date Jan 10, 2023
- ASM INTERNATIONAL, N.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-containing conductive films
- Patent number 11,450,591
- Issue date Sep 20, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead device for semiconductor processing system
- Patent number 11,437,249
- Issue date Sep 6, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 11,365,478
- Issue date Jun 21, 2022
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoactive devices and materials
- Patent number 11,362,222
- Issue date Jun 14, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,770
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 11,230,769
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 11,183,367
- Issue date Nov 23, 2021
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition on metal or metallic surfaces relative to diel...
- Patent number 11,174,550
- Issue date Nov 16, 2021
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of III-V compounds to form V-NAND devices
- Patent number 11,139,308
- Issue date Oct 5, 2021
- ASM IP Holding B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor, system including the reactor, and methods of manufacturing...
- Patent number 11,114,283
- Issue date Sep 7, 2021
- ASM IP Holding B.V.
- Tom Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid distributing device for a thin-film deposition apparatus, rel...
- Patent number 10,982,325
- Issue date Apr 20, 2021
- Picosun Oy
- Juhana Kostamo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoactive devices and materials
- Patent number 10,861,986
- Issue date Dec 8, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of antimony oxide films
- Patent number 10,699,899
- Issue date Jun 30, 2020
- ASM International N.V.
- Raija H. Matero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,534
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching processes
- Patent number 10,665,425
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer etching processes
- Patent number 10,662,533
- Issue date May 26, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-containing conductive films
- Patent number 10,643,925
- Issue date May 5, 2020
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing nickel films and for making nickel silicide...
- Patent number 10,553,440
- Issue date Feb 4, 2020
- ASM International N.V.
- Viljami J. Pore
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...
- Publication number 20240410052
- Publication date Dec 12, 2024
- Picosun Oy
- Jesse KALLIOMÄKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20240332039
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOLAMINATE COATING, RELATED COATED ITEMS AND USES, METHOD FOR IMP...
- Publication number 20240261467
- Publication date Aug 8, 2024
- Picosun Oy
- Riina RITASALO
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PRECURSOR CONTAINER
- Publication number 20240084449
- Publication date Mar 14, 2024
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20240026548
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230374671
- Publication date Nov 23, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM WITH GAS LINE FOR TRANSPORTING EXCI...
- Publication number 20230290613
- Publication date Sep 14, 2023
- ASM IP HOLDING B.V.
- Varun Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...
- Publication number 20230260784
- Publication date Aug 17, 2023
- ASM IP HOLDING B.V.
- Tom Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20230253182
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20230102839
- Publication date Mar 30, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORINE-CONTAINING CONDUCTIVE FILMS
- Publication number 20230085443
- Publication date Mar 16, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR CONTAINER
- Publication number 20230076675
- Publication date Mar 9, 2023
- Picosun Oy
- Tom BLOMBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20220356577
- Publication date Nov 10, 2022
- Picosun Oy
- Väinö KILPI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20220356575
- Publication date Nov 10, 2022
- Picosun Oy
- Väinö KILPI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Combination CVD/ALD method, source and pulse profile modification
- Publication number 20220316057
- Publication date Oct 6, 2022
- ASM IP HOLDING B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119961
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220119962
- Publication date Apr 21, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON OXIDE DEPOSITION METHOD
- Publication number 20220084817
- Publication date Mar 17, 2022
- ASM IP HOLDING B.V.
- Varun Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20220051872
- Publication date Feb 17, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION ON METAL OR METALLIC SURFACES RELATIVE TO DIEL...
- Publication number 20220025513
- Publication date Jan 27, 2022
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF III-V COMPOUNDS TO FORM V-NAND DEVICES
- Publication number 20220028870
- Publication date Jan 27, 2022
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHODS OF MANUFACTURING...
- Publication number 20210358721
- Publication date Nov 18, 2021
- ASM IP HOLDING B.V.
- Tom Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...
- Publication number 20210087682
- Publication date Mar 25, 2021
- Picosun Oy
- Juhana KOSTAMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOACTIVE DEVICES AND MATERIALS
- Publication number 20210074865
- Publication date Mar 11, 2021
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR VAPOR ETCHING DEVICE WITH INTERMEDIATE CHAMBER
- Publication number 20210020469
- Publication date Jan 21, 2021
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210020468
- Publication date Jan 21, 2021
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20200308709
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCHING PROCESSES
- Publication number 20200308710
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING FOR JOINT IMPLANTS
- Publication number 20200306410
- Publication date Oct 1, 2020
- Picosun Oy
- Tom Blomberg
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ATOMIC LAYER ETCHING PROCESSES
- Publication number 20200312620
- Publication date Oct 1, 2020
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- H01 - BASIC ELECTRIC ELEMENTS

Tom E. Blomberg

Person

Patents Grantslast 30 patents

Silicon oxide deposition method

Precursor container

Atomic layer etching processes

Atomic layer deposition of III-V compounds to form V-NAND devices

Showerhead device for semiconductor processing system

Precursor container

Fluorine-containing conductive films

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Method for forming doped metal oxide films on a substrate by cyclic...

Atomic layer etching processes

Process for passivating dielectric films

Fluorine-containing conductive films

Showerhead device for semiconductor processing system

Combination CVD/ALD method, source and pulse profile modification

Photoactive devices and materials

Thermal atomic layer etching processes

Thermal atomic layer etching processes

Atomic layer etching processes

Selective deposition on metal or metallic surfaces relative to diel...

Atomic layer deposition of III-V compounds to form V-NAND devices

Reactor, system including the reactor, and methods of manufacturing...

Fluid distributing device for a thin-film deposition apparatus, rel...

Photoactive devices and materials

Atomic layer deposition of antimony oxide films

Thermal atomic layer etching processes

Atomic layer etching processes

Thermal atomic layer etching processes

Fluorine-containing conductive films

Methods for depositing nickel films and for making nickel silicide...

Patents Applicationslast 30 patents

MULTIFUNCTIONAL COATING, METHOD OF MANUFACTURING THEREOF, RELATED C...

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

NANOLAMINATE COATING, RELATED COATED ITEMS AND USES, METHOD FOR IMP...

PRECURSOR CONTAINER

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

SEMICONDUCTOR PROCESSING SYSTEM WITH GAS LINE FOR TRANSPORTING EXCI...

METHOD FOR FORMING DOPED METAL OXIDE FILMS ON A SUBSTRATE BY CYCLIC...

ATOMIC LAYER ETCHING PROCESSES

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

FLUORINE-CONTAINING CONDUCTIVE FILMS

PRECURSOR CONTAINER

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD

Combination CVD/ALD method, source and pulse profile modification

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

SILICON OXIDE DEPOSITION METHOD

ATOMIC LAYER ETCHING PROCESSES

SELECTIVE DEPOSITION ON METAL OR METALLIC SURFACES RELATIVE TO DIEL...

ATOMIC LAYER DEPOSITION OF III-V COMPOUNDS TO FORM V-NAND DEVICES

REACTOR, SYSTEM INCLUDING THE REACTOR, AND METHODS OF MANUFACTURING...

FLUID DISTRIBUTING DEVICE FOR A THIN-FILM DEPOSITION APPARATUS, REL...

PHOTOACTIVE DEVICES AND MATERIALS

SEMICONDUCTOR VAPOR ETCHING DEVICE WITH INTERMEDIATE CHAMBER

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

THERMAL ATOMIC LAYER ETCHING PROCESSES

THERMAL ATOMIC LAYER ETCHING PROCESSES

COATING FOR JOINT IMPLANTS

ATOMIC LAYER ETCHING PROCESSES