Tom Yu

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San Leandro, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Deposition of thin continuous PVD seed layers having improved adhes...
- Patent number 7,645,696
- Issue date Jan 12, 2010
- Novellus Systems, Inc.
- Alexander Dulkin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for improving film uniformity in a physical va...
- Patent number 6,471,831
- Issue date Oct 29, 2002
- Novellus Systems, Inc.
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for reducing redeposition in a physical vapor...
- Patent number 6,468,404
- Issue date Oct 22, 2002
- Novellus Systems, Inc.
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for reducing redeposition in a physical vapor...
- Publication number 20020096427
- Publication date Jul 25, 2002
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for improving film uniformity in a physical va...
- Publication number 20020088711
- Publication date Jul 11, 2002
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...