Tomas Plettner

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam electronics scan
- Patent number 12,014,895
- Issue date Jun 18, 2024
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped aperture set for multi-beam array configurations
- Patent number 11,615,939
- Issue date Mar 28, 2023
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-column scanning electron microscopy system
- Patent number 10,840,056
- Issue date Nov 17, 2020
- KLA Corporation
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-column scanning electron microscopy system
- Patent number 10,354,832
- Issue date Jul 16, 2019
- KLA-Tencor Corporation
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent-magnet particle beam apparatus and method incorporating a...
- Patent number 10,211,021
- Issue date Feb 19, 2019
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for optical inspection, magnetic field and hei...
- Patent number 9,513,230
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- John Gerling
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Asymmetrical detector design and methodology
- Patent number 9,418,819
- Issue date Aug 16, 2016
- KLA-Tencor Corporation
- John Gerling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DC high-voltage super-radiant free-electron based EUV source
- Patent number 9,053,833
- Issue date Jun 9, 2015
- KLA-Tencor Technologies, Corporation
- Tomas Plettner
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus and methods for forming an electrical conduction path thr...
- Patent number 8,618,513
- Issue date Dec 31, 2013
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-planar extractor structure for electron source
- Patent number 8,513,619
- Issue date Aug 20, 2013
- KLA-Tencor Corporation
- Mehran Nasser-Ghodsi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-driven deflection arrangements and methods involving charged...
- Patent number 7,994,472
- Issue date Aug 9, 2011
- The Board of Trustees of the Leland Stanford Junior University
- Tomas Plettner
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SHAPED APERTURE SET FOR MULTI-BEAM ARRAY CONFIGURATIONS
- Publication number 20220310355
- Publication date Sep 29, 2022
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM ELECTRONICS SCAN
- Publication number 20220199352
- Publication date Jun 23, 2022
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM
- Publication number 20210090844
- Publication date Mar 25, 2021
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Column Scanning Electron Microscopy System
- Publication number 20180358200
- Publication date Dec 13, 2018
- KLA-Tencor Corporation
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Column Scanning Electron Microscopy System
- Publication number 20180226219
- Publication date Aug 9, 2018
- KLA-Tencor Corporation
- Robert Haynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERMANENT-MAGNET PARTICLE BEAM APPARATUS AND METHOD INCORPORATING A...
- Publication number 20170294286
- Publication date Oct 12, 2017
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED...
- Publication number 20150076697
- Publication date Mar 19, 2015
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY
- Publication number 20150069234
- Publication date Mar 12, 2015
- KLA-Tencor Corporation
- John Gerling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DC HIGH-VOLTAGE SUPER-RADIANT FREE-ELECTRON BASED EUV SOURCE
- Publication number 20140239805
- Publication date Aug 28, 2014
- KLA-Tencor Corporation
- TOMAS PLETTNER
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS AND METHOD FOR OPTICAL INSPECTION, MAGNETIC FIELD AND HEI...
- Publication number 20140218503
- Publication date Aug 7, 2014
- KLA-Tencor Corporation
- John Gerling
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR FORMING AN ELECTRICAL CONDUCTION PATH THR...
- Publication number 20120298879
- Publication date Nov 29, 2012
- Tomas PLETTNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-DRIVEN DEFLECTION ARRANGEMENTS AND METHODS INVOLVING CHARGED...
- Publication number 20090314949
- Publication date Dec 24, 2009
- Tomas Plettner
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Tomas Plettner

Person

Patents Grantslast 30 patents

Multi-beam electronics scan

Shaped aperture set for multi-beam array configurations

Multi-column scanning electron microscopy system

Multi-column scanning electron microscopy system

Permanent-magnet particle beam apparatus and method incorporating a...

Apparatus and method for optical inspection, magnetic field and hei...

Asymmetrical detector design and methodology

DC high-voltage super-radiant free-electron based EUV source

Apparatus and methods for forming an electrical conduction path thr...

Non-planar extractor structure for electron source

Laser-driven deflection arrangements and methods involving charged...

Patents Applicationslast 30 patents

SHAPED APERTURE SET FOR MULTI-BEAM ARRAY CONFIGURATIONS

MULTI-BEAM ELECTRONICS SCAN

MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM

Multi-Column Scanning Electron Microscopy System

Multi-Column Scanning Electron Microscopy System

PERMANENT-MAGNET PARTICLE BEAM APPARATUS AND METHOD INCORPORATING A...

DUMMY BARRIER LAYER FEATURES FOR PATTERNING OF SPARSELY DISTRIBUTED...

ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY

DC HIGH-VOLTAGE SUPER-RADIANT FREE-ELECTRON BASED EUV SOURCE

APPARATUS AND METHOD FOR OPTICAL INSPECTION, MAGNETIC FIELD AND HEI...

APPARATUS AND METHODS FOR FORMING AN ELECTRICAL CONDUCTION PATH THR...

LASER-DRIVEN DEFLECTION ARRANGEMENTS AND METHODS INVOLVING CHARGED...