Tomio Uno

Person

Osaka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for flow rate control of clustering fluid and device for flo...
- Patent number 7,926,509
- Issue date Apr 19, 2011
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Internal pressure controller of chamber and internal pressure subje...
- Patent number 7,798,167
- Issue date Sep 21, 2010
- FUJIKIN INCORPORATED
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supply facility of a chamber and a method for an internal press...
- Patent number 7,594,517
- Issue date Sep 29, 2009
- Fujikin Incorporated
- Hiroshi Kannan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Differential pressure type flowmeter and differential pressure type...
- Patent number 7,367,241
- Issue date May 6, 2008
- Fujikin Incorporated
- Tadahiro Ohmi
- G01 - MEASURING TESTING
Information Patent Grant
Small hole diameter automatic measuring apparatus, small hole diame...
- Patent number 7,219,533
- Issue date May 22, 2007
- Fujikin Incorporated
- Tadahiro Ohmi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for the correction of temperature drift for pressure sens...
- Patent number 7,085,628
- Issue date Aug 1, 2006
- Fujikin Incorporated
- Tadahiro Ohmi
- G01 - MEASURING TESTING
Information Patent Grant
Pressure-type flow rate control apparatus
- Patent number 6,964,279
- Issue date Nov 15, 2005
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Patent number 6,848,470
- Issue date Feb 1, 2005
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Patent number 6,820,632
- Issue date Nov 23, 2004
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of detecting abnormalities in flow rate in pressure-type flo...
- Patent number 6,450,190
- Issue date Sep 17, 2002
- Tokyo Electron Ltd.
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Patent number 6,422,264
- Issue date Jul 23, 2002
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Fluid control valve and fluid supply/exhaust system
- Patent number 6,394,415
- Issue date May 28, 2002
- Fujikin, Inc.
- Tadahiro Ohmi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for detection of orifice clogging in pressure-...
- Patent number 6,302,130
- Issue date Oct 16, 2001
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supply system equipped with pressure-type flow rate control unit
- Patent number 6,289,923
- Issue date Sep 18, 2001
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Fluid control valve and fluid supply/exhaust system
- Patent number 6,193,212
- Issue date Feb 27, 2001
- Tohoku Steel Co., Ltd.
- Tadahiro Ohmi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Orifice for pressure type flow rate control unit and process for ma...
- Patent number 6,158,679
- Issue date Dec 12, 2000
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pressure-type flow rate control apparatus
- Patent number 6,152,168
- Issue date Nov 28, 2000
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Gas Supply Facility Of A Chamber And A Fethod For An Internal Press...
- Publication number 20070193628
- Publication date Aug 23, 2007
- Hiroshi Kannan
- G05 - CONTROLLING REGULATING
Information Patent Application
Differential pressure type flowmeter and differential pressure type...
- Publication number 20060236781
- Publication date Oct 26, 2006
- Fujikin Incorporated
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
INTERNAL PRESSURE CONTROLLER OF CHAMBER AND INTERNAL PRESSURE SUBJE...
- Publication number 20060207595
- Publication date Sep 21, 2006
- FUJIKIN INCORPORATED
- Tadahiro OHMI
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for flow rate control of clustering fluid and device for flo...
- Publication number 20060076060
- Publication date Apr 13, 2006
- FUJIKIN INCORPORATED
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Small hole diameter automatic measuring apparatus, small hole diame...
- Publication number 20050257603
- Publication date Nov 24, 2005
- Fujikin Incorporated and Tadahiro Ohmi
- Tadahiro Ohmi
- G01 - MEASURING TESTING
Information Patent Application
Advance pressure type flow control device
- Publication number 20040204794
- Publication date Oct 14, 2004
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Publication number 20040154664
- Publication date Aug 12, 2004
- FUJIKIN INCORPORATED
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Pressure sensor, pressure controller and temperature drift correcto...
- Publication number 20040144178
- Publication date Jul 29, 2004
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Publication number 20020179149
- Publication date Dec 5, 2002
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of detecting abnormalities in flow rate in pressure-type flo...
- Publication number 20020005785
- Publication date Jan 17, 2002
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING
Information Patent Application
Parallel divided flow-type fluid supply apparatus, and fluid-switch...
- Publication number 20010004903
- Publication date Jun 28, 2001
- Tadahiro Ohmi
- G05 - CONTROLLING REGULATING

Person

Patents Grantslast 30 patents

Method for flow rate control of clustering fluid and device for flo...

Internal pressure controller of chamber and internal pressure subje...

Gas supply facility of a chamber and a method for an internal press...

Differential pressure type flowmeter and differential pressure type...

Small hole diameter automatic measuring apparatus, small hole diame...

Apparatus for the correction of temperature drift for pressure sens...

Pressure-type flow rate control apparatus

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Method of detecting abnormalities in flow rate in pressure-type flo...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Fluid control valve and fluid supply/exhaust system

Method and apparatus for detection of orifice clogging in pressure-...

Gas supply system equipped with pressure-type flow rate control unit

Fluid control valve and fluid supply/exhaust system

Orifice for pressure type flow rate control unit and process for ma...

Pressure-type flow rate control apparatus

Patents Applicationslast 30 patents

Gas Supply Facility Of A Chamber And A Fethod For An Internal Press...

Differential pressure type flowmeter and differential pressure type...

INTERNAL PRESSURE CONTROLLER OF CHAMBER AND INTERNAL PRESSURE SUBJE...

Method for flow rate control of clustering fluid and device for flo...

Small hole diameter automatic measuring apparatus, small hole diame...

Advance pressure type flow control device

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Pressure sensor, pressure controller and temperature drift correcto...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...

Method of detecting abnormalities in flow rate in pressure-type flo...

Parallel divided flow-type fluid supply apparatus, and fluid-switch...