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Tomoaki SATO
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Yamaguchi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Treatment liquid for semiconductor wafers
Patent number
12,195,658
Issue date
Jan 14, 2025
Tokuyama Corporation
Yuki Kikkawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Onium salt-containing treatment liquid for semiconductor wafers
Patent number
12,024,663
Issue date
Jul 2, 2024
Tokuyama Corporation
Yuki Kikkawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inhibitor for RuO4 gas generation and method for inhibiting RuO4 ga...
Patent number
11,932,590
Issue date
Mar 19, 2024
Tokuyama Corporation
Tomoaki Sato
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Treatment liquid for semiconductor with ruthenium and method of pro...
Patent number
11,674,230
Issue date
Jun 13, 2023
Tokuyama Corporation
Tomoaki Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quaternary alkyl ammonium hypochlorite solution, method of producin...
Patent number
11,572,331
Issue date
Feb 7, 2023
Tokuyama Corporation
Takafumi Shimoda
B08 - CLEANING
Information
Patent Grant
Quaternary alkyl ammonium hypochlorite solution, method of producin...
Patent number
11,390,577
Issue date
Jul 19, 2022
Tokuyama Corporation
Takafumi Shimoda
B08 - CLEANING
Information
Patent Grant
Group III nitride semiconductor light-emitting element and wafer in...
Patent number
10,818,823
Issue date
Oct 27, 2020
Stanley Electric Co., Ltd.
Tomoaki Sato
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INHIBITOR FOR RuO4 GAS GENERATION AND METHOD FOR INHIBITING RuO4 GA...
Publication number
20240182404
Publication date
Jun 6, 2024
Tokuyama Corporation
Tomoaki SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROCESSING SEMICONDUCTOR CONTAINING TRANSITION METAL, ME...
Publication number
20240055272
Publication date
Feb 15, 2024
Tokuyama Corporation
Yuki KIKKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR WAFER PROCESSING LIQUID CONTAINING HYPOBROMITE IONS A...
Publication number
20240014045
Publication date
Jan 11, 2024
Tokuyama Corporation
Takafumi SHIMODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT LIQUID FOR SEMICONDUCTOR WITH RUTHENIUM AND METHOD OF PRO...
Publication number
20230257887
Publication date
Aug 17, 2023
Tokuyama Corporation
Tomoaki SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT LIQUID FOR SEMICONDUCTOR WITH RUTHENIUM
Publication number
20230207329
Publication date
Jun 29, 2023
Tokuyama Corporation
Tomoaki SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT LIQUID FOR SEMICONDUCTORS AND METHOD FOR PRODUCING SAME
Publication number
20230126771
Publication date
Apr 27, 2023
Tokuyama Corporation
Yuki KIKKAWA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SEMICONDUCTOR WAFER TREATMENT LIQUID AND PRODUTION METHOD THEREOF
Publication number
20220411937
Publication date
Dec 29, 2022
Tokuyama Corporation
Tomoaki SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR TREATMENT LIQUID
Publication number
20220328320
Publication date
Oct 13, 2022
Tokuyama Corporation
Yuki KIKKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
QUATERNARY ALKYL AMMONIUM HYPOCHLORITE SOLUTION, METHOD OF PRODUCIN...
Publication number
20220315522
Publication date
Oct 6, 2022
Tokuyama Corporation
Takafumi SHIMODA
B08 - CLEANING
Information
Patent Application
RUTHENIUM OXIDE GAS ABSORBENT LIQUID, ANALYSIS METHOD FOR RUTHENIUM...
Publication number
20220316996
Publication date
Oct 6, 2022
Tokuyama Corporation
Tomoaki SATO
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
TREATMENT LIQUID FOR SEMICONDUCTOR WAFERS
Publication number
20220298416
Publication date
Sep 22, 2022
Tokuyama Corporation
Yuki KIKKAWA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
ONIUM SALT-CONTAINING TREATMENT LIQUID FOR SEMICONDUCTOR WAFERS
Publication number
20220073820
Publication date
Mar 10, 2022
Tokuyama Corporation
Yuki KIKKAWA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD FOR INHIBITING GENERATION OF RUTHENIUM-CONTAINING GAS FROM R...
Publication number
20220033976
Publication date
Feb 3, 2022
Tokuyama Corporation
Tomoaki SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR WAFER TREATMENT LIQUID CONTAINING HYPOCHLORITE IONS A...
Publication number
20220010206
Publication date
Jan 13, 2022
Tokuyama Corporation
Takafumi SHIMODA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
TREATMENT LIQUID FOR SEMICONDUCTOR WITH RUTHENIUM AND METHOD OF PRO...
Publication number
20210388508
Publication date
Dec 16, 2021
Tokuyama Corporation
Tomoaki SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INHIBITOR FOR RuO4 GAS GENERATION AND METHOD FOR INHIBITING RuO4 GA...
Publication number
20210340095
Publication date
Nov 4, 2021
Tokuyama Corporation
Tomoaki SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
QUATERNARY ALKYL AMMONIUM HYPOCHLORITE SOLUTION, METHOD OF PRODUCIN...
Publication number
20210155878
Publication date
May 27, 2021
Tokuyama Corporation
Takafumi SHIMODA
B08 - CLEANING
Information
Patent Application
GROUP III NITRIDE SEMICONDUCTOR LIGHT-EMITTING ELEMENT AND WAFER IN...
Publication number
20190198714
Publication date
Jun 27, 2019
STANLEY ELECTRIC CO., LTD
Tomoaki SATO
H01 - BASIC ELECTRIC ELEMENTS