Tomohiko TATSUMI

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma monitoring method and plasma monitoring system
- Patent number 9,412,567
- Issue date Aug 9, 2016
- Lapis Semiconductor Co., Ltd.
- Tomohiko Tatsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma monitoring method and plasma monitoring system
- Patent number 9,005,461
- Issue date Apr 14, 2015
- Lapis Semiconductor Co., Ltd.
- Tomohiko Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma monitoring method
- Patent number 8,427,168
- Issue date Apr 23, 2013
- Oki Semiconductor Co., Ltd.
- Tomohiko Tatsumi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma process detecting sensor
- Patent number 8,419,892
- Issue date Apr 16, 2013
- Lapis Semiconductor Co., Ltd.
- Tomohiko Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and manufacturing method thereof
- Patent number 7,807,518
- Issue date Oct 5, 2010
- Oki Semiconductor Co., Ltd.
- Tomohiko Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA MONITORING METHOD AND PLASMA MONITORING SYSTEM
- Publication number 20150179417
- Publication date Jun 25, 2015
- LAPIS SEMICONDUCTOR CO., LTD.
- Tomohiko TATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE INTER-TERMINAL VOLTAGE SENSING CIRCUIT
- Publication number 20110199224
- Publication date Aug 18, 2011
- Oki Semiconductor Co., Ltd.
- Tomohiko TATSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING METHOD
- Publication number 20100244861
- Publication date Sep 30, 2010
- Oki Semiconductor Co., Ltd.
- Tomohiko Tatsumi
- G01 - MEASURING TESTING
Information Patent Application
Plasma process detecting sensor
- Publication number 20090061540
- Publication date Mar 5, 2009
- Oki Electric Industry Co., Ltd.
- Tomohiko Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma monitoring method and plasma monitoring system
- Publication number 20090058424
- Publication date Mar 5, 2009
- Oki Electric Industry Co., Ltd.
- Tomohiko Tatsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor memory device and manufacturing method thereof
- Publication number 20080296647
- Publication date Dec 4, 2008
- Oki Electric Industry Co., Ltd.
- Tomohiko Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20070218609
- Publication date Sep 20, 2007
- Oki Electric Industry Co., Ltd.
- Tomohiko Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS

Tomohiko TATSUMI

Person

Patents Grantslast 30 patents

Plasma monitoring method and plasma monitoring system

Plasma monitoring method and plasma monitoring system

Plasma monitoring method

Plasma process detecting sensor

Semiconductor memory device and manufacturing method thereof

Patents Applicationslast 30 patents

PLASMA MONITORING METHOD AND PLASMA MONITORING SYSTEM

SUBSTRATE INTER-TERMINAL VOLTAGE SENSING CIRCUIT

PLASMA MONITORING METHOD

Plasma process detecting sensor

Plasma monitoring method and plasma monitoring system

Semiconductor memory device and manufacturing method thereof

Manufacturing method of semiconductor device