Tomohiro KANEKO

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,194,594
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Nobutaka Fukunaga
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing system and sub...
- Patent number 12,191,153
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Munehisa Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Setting method of protective component and manufacturing method of...
- Patent number 11,810,794
- Issue date Nov 7, 2023
- Disco Corporation
- Norihisa Arifuku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Notification device in vehicle
- Patent number 11,524,628
- Issue date Dec 13, 2022
- Honda Motor Co., Ltd.
- Masayoshi Takori
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,189,481
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Tomohiro Kaneko
- B08 - CLEANING
Information Patent Grant
Package substrate cutting jig table
- Patent number 10,549,452
- Issue date Feb 4, 2020
- Disco Corporation
- Tomohiro Kaneko
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,395,957
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Tomohiro Kaneko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Reactor
- Patent number 10,118,148
- Issue date Nov 6, 2018
- IHI Corporation
- Shigeki Sakakura
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 9,786,533
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, method of operating the same and...
- Patent number 9,411,235
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Tomohiro Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, coating and developing method and...
- Patent number 9,377,691
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Tomohiro Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system
- Patent number 9,305,819
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yukiyoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, alarm management method of substrat...
- Patent number 9,224,283
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Tomohiro Kaneko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing system, substrate transfer method and storage...
- Patent number 9,070,727
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 9,004,788
- Issue date Apr 14, 2015
- Tokyo Electron Limited
- Kenichirou Matsuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing system, method of controlling coating and de...
- Patent number 8,747,949
- Issue date Jun 10, 2014
- Tokyo Electron Limited
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 8,448,600
- Issue date May 28, 2013
- Tokyo Electron Limited
- Kenichirou Matsuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate convey processing device, trouble countermeasure method i...
- Patent number 8,393,845
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system control method of controlling coating...
- Patent number 8,377,501
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 8,306,646
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Tomohiro Kaneko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Coating and developing apparatus, operating method for same, and st...
- Patent number 7,844,359
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Tomonori Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, substrate processing method and c...
- Patent number 7,599,042
- Issue date Oct 6, 2009
- Tokyo Electron Limited
- Akira Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating/developing apparatus and operation method thereof
- Patent number 7,575,382
- Issue date Aug 18, 2009
- Tokyo Electron Limited
- Tomohiro Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating/developing apparatus and substrate transfer method
- Patent number 7,563,043
- Issue date Jul 21, 2009
- Tokyo Electron Limited
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240331998
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240017375
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Takeshi TAMURA
- B24 - GRINDING POLISHING
Information Patent Application
DEBURRING UNIT AND CUTTING MACHINE
- Publication number 20230398658
- Publication date Dec 14, 2023
- Disco Corporation
- Xiaoming QIU
- B24 - GRINDING POLISHING
Information Patent Application
THICKNESS MEASURING DEVICE AND THICKNESS MEASURING METHOD
- Publication number 20230341224
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Takeshi TAMURA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230008278
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Shuhei Goto
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220402094
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220402087
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUB...
- Publication number 20220277962
- Publication date Sep 1, 2022
- TOKYO ELECTRON LIMITED
- Munehisa KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING LIQUID SUPPLY DEVICE
- Publication number 20220080552
- Publication date Mar 17, 2022
- Disco Corporation
- Hideji HORITA
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...
- Publication number 20210362290
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Tomohiro KANEKO
- B24 - GRINDING POLISHING
Information Patent Application
NOTIFICATION DEVICE IN VEHICLE
- Publication number 20210300239
- Publication date Sep 30, 2021
- Honda Motor Co., Ltd.
- Masayoshi TAKORI
- B60 - VEHICLES IN GENERAL
Information Patent Application
SETTING METHOD OF PROTECTIVE COMPONENT AND MANUFACTURING METHOD OF...
- Publication number 20210151331
- Publication date May 20, 2021
- Disco Corporation
- Norihisa ARIFUKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190393028
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PACKAGE SUBSTRATE CUTTING JIG TABLE
- Publication number 20180133930
- Publication date May 17, 2018
- Disco Corporation
- Tomohiro Kaneko
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
REACTOR
- Publication number 20180093241
- Publication date Apr 5, 2018
- IHI Corporation
- Shigeki SAKAKURA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20150132085
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Yukiyoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...
- Publication number 20150077726
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, METHOD OF OPERATING THE SAME AND...
- Publication number 20150077727
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20150027638
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ALARM MANAGEMENT METHOD OF SUBSTRAT...
- Publication number 20140203941
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- G08 - SIGNALLING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE TRANSFER METHOD AND STORAGE...
- Publication number 20130280017
- Publication date Oct 24, 2013
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20130236838
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20130032179
- Publication date Feb 7, 2013
- Tomohiro KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20110297085
- Publication date Dec 8, 2011
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING SYSTEM, METHOD OF CONTROLLING COATING AND DE...
- Publication number 20110029122
- Publication date Feb 3, 2011
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING SYSTEM CONTROL METHOD OF CONTROLLING COATING...
- Publication number 20100021621
- Publication date Jan 28, 2010
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20090299515
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- G05 - CONTROLLING REGULATING
Information Patent Application
COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD AND C...
- Publication number 20090041926
- Publication date Feb 12, 2009
- TOKYO ELECTRON LIMITED
- Akira Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING/DEVELOPING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20090021704
- Publication date Jan 22, 2009
- TOKYO ELECTRON LIMITED
- Tomohiro KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CONVEY PROCESSING DEVICE, TROUBLE COUNTERMEASURE METHOD I...
- Publication number 20090016860
- Publication date Jan 15, 2009
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Tomohiro KANEKO

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, substrate processing system and sub...

Setting method of protective component and manufacturing method of...

Notification device in vehicle

Substrate processing apparatus and substrate processing method

Package substrate cutting jig table

Substrate processing apparatus, substrate processing method and sto...

Reactor

Substrate processing apparatus, substrate processing method and sto...

Coating and developing apparatus, method of operating the same and...

Coating and developing apparatus, coating and developing method and...

Substrate processing system

Substrate processing apparatus, alarm management method of substrat...

Substrate processing system, substrate transfer method and storage...

Substrate processing apparatus, substrate processing method, and st...

Coating and developing system, method of controlling coating and de...

Substrate processing apparatus, substrate processing method, and st...

Substrate convey processing device, trouble countermeasure method i...

Coating and developing system control method of controlling coating...

Coating and developing apparatus, coating and developing method, an...

Coating and developing apparatus, operating method for same, and st...

Coating and developing apparatus, substrate processing method and c...

Coating/developing apparatus and operation method thereof

Coating/developing apparatus and substrate transfer method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

DEBURRING UNIT AND CUTTING MACHINE

THICKNESS MEASURING DEVICE AND THICKNESS MEASURING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUB...

POLISHING LIQUID SUPPLY DEVICE

PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...

NOTIFICATION DEVICE IN VEHICLE

SETTING METHOD OF PROTECTIVE COMPONENT AND MANUFACTURING METHOD OF...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PACKAGE SUBSTRATE CUTTING JIG TABLE

REACTOR

SUBSTRATE PROCESSING SYSTEM

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD AND...

COATING AND DEVELOPING APPARATUS, METHOD OF OPERATING THE SAME AND...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS, ALARM MANAGEMENT METHOD OF SUBSTRAT...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE TRANSFER METHOD AND STORAGE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

COATING AND DEVELOPING SYSTEM, METHOD OF CONTROLLING COATING AND DE...

COATING AND DEVELOPING SYSTEM CONTROL METHOD OF CONTROLLING COATING...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...

COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD AND C...

COATING/DEVELOPING APPARATUS AND OPERATION METHOD THEREOF

SUBSTRATE CONVEY PROCESSING DEVICE, TROUBLE COUNTERMEASURE METHOD I...