Tomohiro Ohta

Person

Chiba-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device
- Patent number 7,476,619
- Issue date Jan 13, 2009
- Tokyo Electron Limited
- Eiichi Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method for a field-effect transistor, manufacturing m...
- Patent number 6,747,748
- Issue date Jun 8, 2004
- Tokyo Electron Limited
- Tatsuo Matsudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making metal interconnection
- Patent number 6,063,703
- Issue date May 16, 2000
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and an apparatus for m...
- Patent number 6,001,736
- Issue date Dec 14, 1999
- Kawasaki Steel Corporation
- Eiichi Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating solution and method for preparing the coating solution, met...
- Patent number 5,998,522
- Issue date Dec 7, 1999
- Kawasaki Steel Corporation
- Tadashi Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal interconnection and method for making
- Patent number 5,973,402
- Issue date Oct 26, 1999
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a multilevel interconnection structure
- Patent number 5,952,723
- Issue date Sep 14, 1999
- Kawasaki Steel Corporation
- Nobuyuki Takeyasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilevel interconnect method of manufacturing
- Patent number 5,946,799
- Issue date Sep 7, 1999
- Kawasaki Steel Corporation
- Hiroshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating solution and method for preparing the coating solution, met...
- Patent number 5,840,821
- Issue date Nov 24, 1998
- Kawasaki Steel Corporation
- Tadashi Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antifuse element and semiconductor device having antifuse elements
- Patent number 5,679,974
- Issue date Oct 21, 1997
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device with contact structure
- Patent number 5,652,180
- Issue date Jul 29, 1997
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antifuse element and semiconductor device having antifuse elements
- Patent number 5,641,985
- Issue date Jun 24, 1997
- Kawasaki Steel Corporation
- Yoshimitsu Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device having multilevel inte...
- Patent number 5,637,534
- Issue date Jun 10, 1997
- Kawasaki Steel Corporation
- Nobuyuki Takeyasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making metal interconnection with chlorine plasma etch
- Patent number 5,627,102
- Issue date May 6, 1997
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilevel interconnect structure
- Patent number 5,627,345
- Issue date May 6, 1997
- Kawasaki Steel Corporation
- Hiroshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing insulating film of semiconductor device and...
- Patent number 5,605,867
- Issue date Feb 25, 1997
- Kawasaki Steel Corporation
- Nobuyoshi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antifuse element, semiconductor device having antifuse elements, an...
- Patent number 5,565,702
- Issue date Oct 15, 1996
- Kawasaki Steel Corporation
- Yoshimitsu Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for supplying liquid material and process for forming thin f...
- Patent number 5,552,181
- Issue date Sep 3, 1996
- Kawasaki Steel Corporation
- Eiichi Kondoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of chemical mechanical polishing planarization of an insulat...
- Patent number 5,532,191
- Issue date Jul 2, 1996
- Kawasaki Steel Corporation
- Tadashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric structure for anti-fuse programming element
- Patent number 5,521,423
- Issue date May 28, 1996
- Kawasaki Steel Corporation
- Hiroshi Shinriki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming multilayered wiring structure in semiconductor de...
- Patent number 5,486,492
- Issue date Jan 23, 1996
- Kawasaki Steel Corporation
- Hiroshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photochemical vapor deposition process
- Patent number 5,308,651
- Issue date May 3, 1994
- Kawasaki Steel Corp.
- Tomohiro Ohta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilevel interconnect structure and method of manufacturing the same
- Patent number 5,305,519
- Issue date Apr 26, 1994
- Kawasaki Steel Corporation
- Hiroshi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for depositing titanium nitride film by CVD
- Patent number 5,300,321
- Issue date Apr 5, 1994
- Kawasaki Steel Corporation
- Tadashi Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming interlayer-insulating film using ozone and organi...
- Patent number 5,290,736
- Issue date Mar 1, 1994
- Kawasaki Steel Corporation
- Nobuyoshi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition method for forming thin film
- Patent number 5,225,245
- Issue date Jul 6, 1993
- Kawasaki Steel Corporation
- Tomohiro Ohta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus for forming thin film
- Patent number 5,209,182
- Issue date May 11, 1993
- Kawasaki Steel Corporation
- Tomohiro Ohta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film Forming Method and Film Forming Apparatus
- Publication number 20080311313
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Yasuo Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device
- Publication number 20060154482
- Publication date Jul 13, 2006
- Eiichi Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, semiconductor device production method...
- Publication number 20050260846
- Publication date Nov 24, 2005
- Eiichi Kondoh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for producing material of electronic device
- Publication number 20050227500
- Publication date Oct 13, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming film
- Publication number 20040253777
- Publication date Dec 16, 2004
- Hidenori Miyoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing method for a field-effect transistor, manufacturing m...
- Publication number 20020115304
- Publication date Aug 22, 2002
- Tatsuo Matsudo
- H01 - BASIC ELECTRIC ELEMENTS

Tomohiro Ohta

Person

Patents Grantslast 30 patents

Semiconductor device

Manufacturing method for a field-effect transistor, manufacturing m...

Method for making metal interconnection

Method of manufacturing semiconductor device and an apparatus for m...

Coating solution and method for preparing the coating solution, met...

Metal interconnection and method for making

Semiconductor device having a multilevel interconnection structure

Multilevel interconnect method of manufacturing

Coating solution and method for preparing the coating solution, met...

Antifuse element and semiconductor device having antifuse elements

Method of manufacturing semiconductor device with contact structure

Antifuse element and semiconductor device having antifuse elements

Method of manufacturing semiconductor device having multilevel inte...

Method for making metal interconnection with chlorine plasma etch

Multilevel interconnect structure

Method of manufacturing insulating film of semiconductor device and...

Antifuse element, semiconductor device having antifuse elements, an...

Method for supplying liquid material and process for forming thin f...

Method of chemical mechanical polishing planarization of an insulat...

Dielectric structure for anti-fuse programming element

Method of forming multilayered wiring structure in semiconductor de...

Photochemical vapor deposition process

Multilevel interconnect structure and method of manufacturing the same

Process for depositing titanium nitride film by CVD

Method of forming interlayer-insulating film using ozone and organi...

Chemical vapor deposition method for forming thin film

Chemical vapor deposition apparatus for forming thin film

Patents Applicationslast 30 patents

Film Forming Method and Film Forming Apparatus

Semiconductor device

Substrate processing method, semiconductor device production method...

Method for producing material of electronic device

Method and apparatus for forming film

Manufacturing method for a field-effect transistor, manufacturing m...