Tomohito Komatsu

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,508,556
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma probe device and plasma processing apparatus
- Patent number 11,164,730
- Issue date Nov 2, 2021
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and gas introduction mechanism
- Patent number 10,804,078
- Issue date Oct 13, 2020
- Tokyo Electron Limited
- Yutaka Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma source and plasma processing apparatus
- Patent number 10,727,030
- Issue date Jul 28, 2020
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device with shower plate having protrusion for su...
- Patent number 10,557,200
- Issue date Feb 11, 2020
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma source and plasma processing apparatus
- Patent number 10,211,032
- Issue date Feb 19, 2019
- Tokyo Electron Limited
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,991,097
- Issue date Jun 5, 2018
- Tokyo Electron Limited
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna for plasma generation, plasma processing apparatus and plas...
- Patent number 9,552,966
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave radiation antenna, microwave plasma source and plasma pro...
- Patent number 9,548,187
- Issue date Jan 17, 2017
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma generation antenna
- Patent number 9,543,123
- Issue date Jan 10, 2017
- TOKYO ELECTRONICS LIMITED
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave emission mechanism, microwave plasma source and surface w...
- Patent number 9,520,272
- Issue date Dec 13, 2016
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table structure, and processing apparatus
- Patent number 8,334,481
- Issue date Dec 18, 2012
- Tokyo Electron Limited
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure and heat treatment apparatus
- Patent number 8,203,104
- Issue date Jun 19, 2012
- Tokyo Electron Limited
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate stage mechanism and substrate processing apparatus
- Patent number 8,055,125
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater for manufacturing semiconductor
- Patent number D601521
- Issue date Oct 6, 2009
- Tokyo Electron Limited
- Tomohito Komatsu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for manufacturing semiconductor
- Patent number D589471
- Issue date Mar 31, 2009
- Tokyo Electron Limited
- Tomohito Komatsu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Trapping device, processing system, and method removing impurities
- Patent number 7,488,374
- Issue date Feb 10, 2009
- Tokyo Electron Limited
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate-placing mechanism having substrate-heating function
- Patent number 7,299,566
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20220277935
- Publication date Sep 1, 2022
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20190189398
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190075644
- Publication date Mar 7, 2019
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROBE DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20190074166
- Publication date Mar 7, 2019
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180337023
- Publication date Nov 22, 2018
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180114677
- Publication date Apr 26, 2018
- TOKYO ELECTRON LIMITED
- Tomohito KOMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS INTRODUCTION MECHANISM
- Publication number 20170309452
- Publication date Oct 26, 2017
- Yutaka FUJINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20160358757
- Publication date Dec 8, 2016
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20160222516
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPEDANCE MATCHING SLUG, IMPEDANCE MATCHING DEVICE, ELECTROMAGNETIC...
- Publication number 20150348758
- Publication date Dec 3, 2015
- TOKYO ELECTRON LIMITED
- Hiroyuki MIYASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20150170881
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Tomohito KOMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE W...
- Publication number 20140361684
- Publication date Dec 11, 2014
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING APPARATUS AND PLAS...
- Publication number 20140339981
- Publication date Nov 20, 2014
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PRO...
- Publication number 20140158302
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA GENERATION ANTENNA
- Publication number 20120247675
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20120145697
- Publication date Jun 14, 2012
- TOKYO ELECTRON LIMMITED
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS
- Publication number 20120031889
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADING TABLE STRUCTURE AND PROCESSING DEVICE
- Publication number 20110005686
- Publication date Jan 13, 2011
- TOKYO ELECTRON LIMITED
- Sumi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPORIZER, MATERIAL GAS SUPPLY SYSTEM INCLUDING VAPORIZER AND FILM...
- Publication number 20100186673
- Publication date Jul 29, 2010
- TOKYO ELECTRON LIMITED
- Sumi TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MOUNTING TABLE STRUCTURE, AND PROCESSING APPARATUS
- Publication number 20090277895
- Publication date Nov 12, 2009
- TOKYO ELECTRON LIMITED
- Tomohito KOMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING TABLE STRUCTURE, METHOD FOR MANUFACTURING PLACING TABLE STR...
- Publication number 20090139979
- Publication date Jun 4, 2009
- TOKYO ELECTRON LIMITED
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE STAGE MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20090123140
- Publication date May 14, 2009
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS
- Publication number 20090095733
- Publication date Apr 16, 2009
- TOKYO ELECTRON LIMITED
- Tomohito KOMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate-placing mechanism having substrate-heating function
- Publication number 20060207120
- Publication date Sep 21, 2006
- TOKYO ELECTRON LIMITED
- Tomohito Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus
- Publication number 20060160359
- Publication date Jul 20, 2006
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Trapping device, processing system, and method removing impurities
- Publication number 20060144234
- Publication date Jul 6, 2006
- TOKYO ELECTRON LIMITED
- Tomohito Komatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tomohito Komatsu

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Plasma probe device and plasma processing apparatus

Plasma processing apparatus and gas introduction mechanism

Microwave plasma source and plasma processing apparatus

Plasma processing device with shower plate having protrusion for su...

Microwave plasma source and plasma processing apparatus

Plasma processing apparatus

Antenna for plasma generation, plasma processing apparatus and plas...

Microwave radiation antenna, microwave plasma source and plasma pro...

Plasma processing apparatus and plasma generation antenna

Microwave emission mechanism, microwave plasma source and surface w...

Mounting table structure, and processing apparatus

Mounting table structure and heat treatment apparatus

Substrate stage mechanism and substrate processing apparatus

Heater for manufacturing semiconductor

Heater for manufacturing semiconductor

Trapping device, processing system, and method removing impurities

Substrate-placing mechanism having substrate-heating function

Patents Applicationslast 30 patents

MICROWAVE PLASMA PROCESSING APPARATUS

MICROWAVE PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROBE DEVICE AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND GAS INTRODUCTION MECHANISM

MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING DEVICE

IMPEDANCE MATCHING SLUG, IMPEDANCE MATCHING DEVICE, ELECTROMAGNETIC...

MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS

MICROWAVE EMISSION MECHANISM, MICROWAVE PLASMA SOURCE AND SURFACE W...

ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING APPARATUS AND PLAS...

MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PRO...

PLASMA PROCESSING APPARATUS AND PLASMA GENERATION ANTENNA

HEAT TREATMENT APPARATUS

MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS

LOADING TABLE STRUCTURE AND PROCESSING DEVICE

VAPORIZER, MATERIAL GAS SUPPLY SYSTEM INCLUDING VAPORIZER AND FILM...

MOUNTING TABLE STRUCTURE, AND PROCESSING APPARATUS

PLACING TABLE STRUCTURE, METHOD FOR MANUFACTURING PLACING TABLE STR...

SUBSTRATE STAGE MECHANISM AND SUBSTRATE PROCESSING APPARATUS

MOUNTING TABLE STRUCTURE AND HEAT TREATMENT APPARATUS

Substrate-placing mechanism having substrate-heating function

Vacuum processing apparatus

Trapping device, processing system, and method removing impurities