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Tomokazu Suda
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Sammu-shi, JP
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last 30 patents
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Patent Application
SPUTTERING DEPOSITION APPARATUS AND ADHESION PREVENTING MEMBER
Publication number
20130098757
Publication date
Apr 25, 2013
ULVAC, Inc.
Tetsuhiro OHNO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SPUTTER DEPOSITION APPARATUS
Publication number
20130092533
Publication date
Apr 18, 2013
ULVAC, Inc.
Shigemitsu Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SPUTTER DEPOSITION APPARATUS
Publication number
20130068614
Publication date
Mar 21, 2013
ULVAC, Inc.
Tatsunori Isobe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...