Tomoko SUGANO

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for processing a substrate and substrate processing apparatus
- Patent number 10,151,031
- Issue date Dec 11, 2018
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing a substrate and substrate processing apparatus
- Patent number 9,714,467
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170268104
- Publication date Sep 21, 2017
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150225849
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...