Tomonori Nakano

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Aberration corrector and electron microscope
- Patent number 11,069,505
- Issue date Jul 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multipole lens, aberration corrector using the same, and charged pa...
- Patent number 11,004,650
- Issue date May 11, 2021
- HITACHI HIGH-TECH CORPORATION
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction method, aberration correction system, and cha...
- Patent number 10,446,361
- Issue date Oct 15, 2019
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and arithmetic device
- Patent number 9,530,614
- Issue date Dec 27, 2016
- Hitachi High-Technologies Corporation
- Kotoko Urano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multipole and charged particle radiation apparatus using the same
- Patent number 9,343,260
- Issue date May 17, 2016
- Hitachi High-Technologies Corporation
- Kotoko Urano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and charged particle beam apparatus using the...
- Patent number 9,287,084
- Issue date Mar 15, 2016
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multipole measurement apparatus
- Patent number 8,987,680
- Issue date Mar 24, 2015
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Scanning charged particle beam device and method for correcting chr...
- Patent number 8,772,732
- Issue date Jul 8, 2014
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and geometrical aberration measurem...
- Patent number 8,581,190
- Issue date Nov 12, 2013
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus including aberration corrector
- Patent number 8,558,171
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of tilted illumination observation
- Patent number 8,436,899
- Issue date May 7, 2013
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle radiation device provided with aberration corrector
- Patent number 8,258,475
- Issue date Sep 4, 2012
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,168,951
- Issue date May 1, 2012
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus including aberration corrector
- Patent number 8,129,680
- Issue date Mar 6, 2012
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for estimation of probe shape in charged particle beam instr...
- Patent number 7,915,582
- Issue date Mar 29, 2011
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and charged particle beam apparatus using the...
- Patent number 7,834,326
- Issue date Nov 16, 2010
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,718,976
- Issue date May 18, 2010
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, aberration correction value calcul...
- Patent number 7,714,286
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle optical apparatus with aberration corrector
- Patent number 7,619,218
- Issue date Nov 17, 2009
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam column
- Patent number 7,531,799
- Issue date May 12, 2009
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,521,675
- Issue date Apr 21, 2009
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 7,504,624
- Issue date Mar 17, 2009
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam column
- Patent number 7,223,983
- Issue date May 29, 2007
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220199356
- Publication date Jun 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTIC...
- Publication number 20210249218
- Publication date Aug 12, 2021
- HITACHI HIGH-TECH CORPORATION
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPOLE LENS, ABERRATION CORRECTOR USING THE SAME, AND CHARGED PA...
- Publication number 20200373117
- Publication date Nov 26, 2020
- Hitachi High-Technologies Corporation
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND ELECTRON MICROSCOPE
- Publication number 20200152414
- Publication date May 14, 2020
- Hitachi High-Technologies Corporation
- Tomonori NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTION METHOD, ABERRATION CORRECTION SYSTEM, AND CHA...
- Publication number 20180190469
- Publication date Jul 5, 2018
- Hitachi High-Technologies Corporation
- Zhaohui CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...
- Publication number 20150248944
- Publication date Sep 3, 2015
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND ARITHMETIC DEVICE
- Publication number 20150060654
- Publication date Mar 5, 2015
- Hitachi High-Technolgies Corporation
- Kotoko Urano
- G01 - MEASURING TESTING
Information Patent Application
MULTIPOLE MEASUREMENT APPARATUS
- Publication number 20140217304
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
MULTIPOLE AND CHARGED PARTICLE RADIATION APPARATUS USING THE SAME
- Publication number 20130320227
- Publication date Dec 5, 2013
- Hitachi High-Technologies Corporation
- Kotoko Urano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION COR...
- Publication number 20130068949
- Publication date Mar 21, 2013
- Kotoko Urano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING CHR...
- Publication number 20120199739
- Publication date Aug 9, 2012
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR
- Publication number 20120153146
- Publication date Jun 21, 2012
- Hitachi High-Technologies Corporation
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR
- Publication number 20110272578
- Publication date Nov 10, 2011
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM INSTRUMENT COMPRISING AN ABERRATION CORRECTOR
- Publication number 20110210248
- Publication date Sep 1, 2011
- Hitachi High-Technologies Corporation
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND GEOMETRICAL ABERRATION MEASUREM...
- Publication number 20110139980
- Publication date Jun 16, 2011
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTIMATION OF PROBE SHAPE IN CHARGED PARTICLE BEAM INSTR...
- Publication number 20100264309
- Publication date Oct 21, 2010
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus of Tilted Illumination Observation
- Publication number 20100033560
- Publication date Feb 11, 2010
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR
- Publication number 20090212228
- Publication date Aug 27, 2009
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20090184243
- Publication date Jul 23, 2009
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...
- Publication number 20090039281
- Publication date Feb 12, 2009
- Takeshi KAWASAKI
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...
- Publication number 20090008550
- Publication date Jan 8, 2009
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20080067378
- Publication date Mar 20, 2008
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam column
- Publication number 20070221860
- Publication date Sep 27, 2007
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle optical apparatus with aberration corrector
- Publication number 20070181806
- Publication date Aug 9, 2007
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam device
- Publication number 20060255269
- Publication date Nov 16, 2006
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20060175548
- Publication date Aug 10, 2006
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam column
- Publication number 20060033037
- Publication date Feb 16, 2006
- Takeshi Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS

Tomonori Nakano

Person

Patents Grantslast 30 patents

Aberration corrector and electron microscope

Multipole lens, aberration corrector using the same, and charged pa...

Aberration correction method, aberration correction system, and cha...

Charged particle beam device and arithmetic device

Multipole and charged particle radiation apparatus using the same

Aberration corrector and charged particle beam apparatus using the...

Multipole measurement apparatus

Scanning charged particle beam device and method for correcting chr...

Charged particle beam apparatus and geometrical aberration measurem...

Charged particle beam apparatus including aberration corrector

Method and apparatus of tilted illumination observation

Charged particle radiation device provided with aberration corrector

Charged particle beam apparatus

Charged particle beam apparatus including aberration corrector

Method for estimation of probe shape in charged particle beam instr...

Aberration corrector and charged particle beam apparatus using the...

Charged particle beam apparatus

Charged particle beam apparatus, aberration correction value calcul...

Charged particle optical apparatus with aberration corrector

Charged particle beam column

Charged particle beam apparatus

Charged particle beam device

Charged particle beam column

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS

MULTIPOLE LENS, ABERRATION CORRECTOR USING SAME, AND CHARGED PARTIC...

MULTIPOLE LENS, ABERRATION CORRECTOR USING THE SAME, AND CHARGED PA...

ABERRATION CORRECTOR AND ELECTRON MICROSCOPE

ABERRATION CORRECTION METHOD, ABERRATION CORRECTION SYSTEM, AND CHA...

ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...

CHARGED PARTICLE BEAM DEVICE AND ARITHMETIC DEVICE

MULTIPOLE MEASUREMENT APPARATUS

MULTIPOLE AND CHARGED PARTICLE RADIATION APPARATUS USING THE SAME

CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION COR...

SCANNING CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING CHR...

CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR

CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR

CHARGED PARTICLE BEAM INSTRUMENT COMPRISING AN ABERRATION CORRECTOR

CHARGED PARTICLE BEAM APPARATUS AND GEOMETRICAL ABERRATION MEASUREM...

METHOD FOR ESTIMATION OF PROBE SHAPE IN CHARGED PARTICLE BEAM INSTR...

Method and Apparatus of Tilted Illumination Observation

CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR

CHARGED PARTICLE BEAM APPARATUS

ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...

CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...

CHARGED PARTICLE BEAM APPARATUS

Charged particle beam column

Charged particle optical apparatus with aberration corrector

Charged particle beam device

Charged particle beam apparatus

Charged particle beam column