Tomonori Umezaki

Person

Ube-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon carbide single crystal
- Patent number 11,643,748
- Issue date May 9, 2023
- Central Glass Co., Ltd.
- Kazuto Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing crystal of silicon carbide, and crystal produc...
- Patent number 10,151,046
- Issue date Dec 11, 2018
- National University Corporation Nagoya University
- Toru Ujihara
- C30 - CRYSTAL GROWTH
Information Patent Grant
Sacrificial-film removal method and substrate processing device
- Patent number 9,852,914
- Issue date Dec 26, 2017
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching agent and dry etching method using the same
- Patent number 9,230,821
- Issue date Jan 5, 2016
- Central Glass Company, Limited
- Yasuo Hibino
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Dry etching method
- Patent number 9,165,776
- Issue date Oct 20, 2015
- Central Glass Company, Limited
- Tomonori Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching agent and dry etching method using the same
- Patent number 9,093,388
- Issue date Jul 28, 2015
- Central Glass Company, Limited
- Yasuo Hibino
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Pattern forming method
- Patent number 9,082,725
- Issue date Jul 14, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching agent and dry etching method
- Patent number 9,017,571
- Issue date Apr 28, 2015
- Central Glass Company, Limited
- Tomonori Umezaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Dry cleaning method of substrate processing apparatus
- Patent number 8,562,751
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Isao Gunji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SINGLE-CRYSTAL SILICON CARBIDE WAFER, SINGLE-CRYSTAL SILICON CARBID...
- Publication number 20240368806
- Publication date Nov 7, 2024
- Central Glass Company, Limited
- Tomonori UMEZAKI
- C30 - CRYSTAL GROWTH
Information Patent Application
SINGLE-CRYSTAL SILICON CARBIDE WAFER, AND SINGLE-CRYSTAL SILICON CA...
- Publication number 20240344237
- Publication date Oct 17, 2024
- Central Glass Company, Limited
- Tomonori UMEZAKI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL
- Publication number 20200347511
- Publication date Nov 5, 2020
- CENTRAL GLASS CO., LTD.
- Kazuto KUMAGAI
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for Producing Crystal of Silicon Carbide, and Crystal Produc...
- Publication number 20170260647
- Publication date Sep 14, 2017
- NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- Toru UJIHARA
- C30 - CRYSTAL GROWTH
Information Patent Application
SACRIFICIAL-FILM REMOVAL METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20160254162
- Publication date Sep 1, 2016
- SCREEN Holdings Co., Ltd.
- Manabu Okutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Gas and Cleaning Method
- Publication number 20160002574
- Publication date Jan 7, 2016
- Central Glass Company, Limited
- Hiroyuki OOMORI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Method for Dry-Cleaning Metal Film in Film-Formation Apparatus
- Publication number 20150047680
- Publication date Feb 19, 2015
- Central Glass Company, Limited
- Tomonori Umezaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCHING AGENT
- Publication number 20140302683
- Publication date Oct 9, 2014
- Central Glass Company, Limited
- Akiou Kikuchi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Dry Etching Agent and Dry Etching Method Using the Same
- Publication number 20140242803
- Publication date Aug 28, 2014
- Central Glass Company, Limited
- Yasuo Hibino
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Dry Etching Method
- Publication number 20140206196
- Publication date Jul 24, 2014
- Central Glass Company, Limited
- Tomonori Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD
- Publication number 20140199852
- Publication date Jul 17, 2014
- Masahiro Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry Cleaning Method
- Publication number 20130333729
- Publication date Dec 19, 2013
- Central Glass Company, Limited
- Tomonori Umezaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN-CONTAINING GAS SUPPLY APPARATUS AND HALOGEN-CONTAINING GAS...
- Publication number 20130221024
- Publication date Aug 29, 2013
- Central Glass Company, Limited
- Akifumi Yao
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Dry Etching Agent and Dry Etching Method
- Publication number 20130105728
- Publication date May 2, 2013
- Central Glass Company, Limited
- Tomonori Umezaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Valve For Container Filled With Halogen Gas Or Halogen Compound Gas
- Publication number 20130032600
- Publication date Feb 7, 2013
- Central Glass Company, Limited
- Tomonori Umezaki
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Dry Etching Agent and Dry Etching Method Using the Same
- Publication number 20120298911
- Publication date Nov 29, 2012
- Central Glass Company, Limited
- Yasuo Hibino
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
DRY CLEANING METHOD OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20120180811
- Publication date Jul 19, 2012
- Central Glass Company, Limited
- Isao GUNJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tomonori Umezaki

Person

Patents Grantslast 30 patents

Silicon carbide single crystal

Method for producing crystal of silicon carbide, and crystal produc...

Sacrificial-film removal method and substrate processing device

Dry etching agent and dry etching method using the same

Dry etching method

Dry etching agent and dry etching method using the same

Pattern forming method

Dry etching agent and dry etching method

Dry cleaning method of substrate processing apparatus

Patents Applicationslast 30 patents

SINGLE-CRYSTAL SILICON CARBIDE WAFER, SINGLE-CRYSTAL SILICON CARBID...

SINGLE-CRYSTAL SILICON CARBIDE WAFER, AND SINGLE-CRYSTAL SILICON CA...

METHOD FOR PRODUCING SILICON CARBIDE SINGLE CRYSTAL

Method for Producing Crystal of Silicon Carbide, and Crystal Produc...

SACRIFICIAL-FILM REMOVAL METHOD AND SUBSTRATE PROCESSING DEVICE

Cleaning Gas and Cleaning Method

Method for Dry-Cleaning Metal Film in Film-Formation Apparatus

DRY ETCHING AGENT

Dry Etching Agent and Dry Etching Method Using the Same

Dry Etching Method

PATTERN FORMING METHOD

Dry Cleaning Method

HALOGEN-CONTAINING GAS SUPPLY APPARATUS AND HALOGEN-CONTAINING GAS...

Dry Etching Agent and Dry Etching Method

Valve For Container Filled With Halogen Gas Or Halogen Compound Gas

Dry Etching Agent and Dry Etching Method Using the Same

DRY CLEANING METHOD OF SUBSTRATE PROCESSING APPARATUS