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Tomoshi Inoue
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for polishing a substrate
Patent number
11,548,113
Issue date
Jan 10, 2023
Ebara Corporation
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for polishing a substrate
Patent number
10,307,882
Issue date
Jun 4, 2019
Ebara Corporation
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for polishing a substrate
Patent number
9,308,621
Issue date
Apr 12, 2016
Ebara Corporation
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, polishing apparatus, and polishing method
Patent number
8,485,866
Issue date
Jul 16, 2013
Ebara Corporation
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
8,357,029
Issue date
Jan 22, 2013
Ebara Corporation
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, polishing apparatus, and polishing method
Patent number
8,267,746
Issue date
Sep 18, 2012
Ebara Corporation
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, polishing apparatus, and polishing method
Patent number
8,100,739
Issue date
Jan 24, 2012
Ebara Corporation
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holding apparatus, polishing apparatus, and polishing method
Patent number
7,967,665
Issue date
Jun 28, 2011
Ebara Corporation
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Grant
Elastic membrane for semiconductor wafer polishing apparatus
Patent number
D634719
Issue date
Mar 22, 2011
Ebara Corporation
Hozumi Yasuda
D13 - Equipment for production, distribution, or transformation of energy
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
Publication number
20190240801
Publication date
Aug 8, 2019
EBARA CORPORATION
Makoto FUKUSHIMA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
Publication number
20160176011
Publication date
Jun 23, 2016
EBARA CORPORATION
Makoto FUKUSHIMA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDING APPARATUS, POLISHING APPARATUS, AND POLISHING METHOD
Publication number
20120309277
Publication date
Dec 6, 2012
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
Publication number
20110159783
Publication date
Jun 30, 2011
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20100273405
Publication date
Oct 28, 2010
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding apparatus, polishing apparatus, and polishing method
Publication number
20080318499
Publication date
Dec 25, 2008
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding apparatus, polishing apparatus, and polishing method
Publication number
20080318492
Publication date
Dec 25, 2008
Hozumi Yasuda
B24 - GRINDING POLISHING
Information
Patent Application
Substrate holding apparatus, polishing apparatus, and polishing method
Publication number
20070232193
Publication date
Oct 4, 2007
Hozumi Yasuda
B24 - GRINDING POLISHING