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Substrate processing apparatus
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Patent number 11,512,392
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Issue date Nov 29, 2022
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Kokusai Electric Corporation
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Takayuki Nakada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,495,477
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Issue date Nov 8, 2022
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Kokusai Electric Corporation
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Shuhei Saido
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,396,700
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Issue date Jul 26, 2022
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Kokusai Electric Corporation
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Sadao Hisakado
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,222,796
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Issue date Jan 11, 2022
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Kokusai Electric Corporation
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Shuhei Saido
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H01 - BASIC ELECTRIC ELEMENTS
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Boat for wafer processing apparatus
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Patent number D939459
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Issue date Dec 28, 2021
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Kokusai Electric Corporation
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Hironori Shimada
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D13 - Equipment for production, distribution, or transformation of energy
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Substrate processing apparatus
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Patent number 11,124,873
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Issue date Sep 21, 2021
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Kokusai Electric Corporation
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Takayuki Nakada
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 10,615,061
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Issue date Apr 7, 2020
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Kokusai Electric Corporation
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Shuhei Saido
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 10,550,468
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Issue date Feb 4, 2020
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Kokusai Electric Corporation
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Takayuki Nakada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 10,508,336
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Issue date Dec 17, 2019
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Kokusai Electric Corporation
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Takayuki Nakada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 9,966,286
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Issue date May 8, 2018
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Hitachi Kokusai Electric Inc.
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Takashi Nogami
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H01 - BASIC ELECTRIC ELEMENTS
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Reaction tube
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Patent number D791090
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Issue date Jul 4, 2017
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Hitachi Kokusai Electric Inc.
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Hidenari Yoshida
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D13 - Equipment for production, distribution, or transformation of energy
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Reaction tube
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Patent number D772824
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Issue date Nov 29, 2016
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Hitachi Kokusai Electric Inc.
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Hidenari Yoshida
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D13 - Equipment for production, distribution, or transformation of energy
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Reaction tube
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Patent number D770993
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Issue date Nov 8, 2016
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Hitachi Kokusai Electric Inc.
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Hidenari Yoshida
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D13 - Equipment for production, distribution, or transformation of energy
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Boat for substrate processing apparatus
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Patent number D747279
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Issue date Jan 12, 2016
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Hitachi Kokusai Electric Inc.
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Hidenari Yoshida
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D13 - Equipment for production, distribution, or transformation of energy
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Boat for substrate processing apparatus
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Patent number D738329
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Issue date Sep 8, 2015
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Hitachi Kokusai Electric Inc.
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Hidenari Yoshida
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D13 - Equipment for production, distribution, or transformation of energy