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Meshing method and apparatus
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Patent number 6,259,453
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Issue date Jul 10, 2001
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International Business Machines Corporation
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Takayuki Itoh
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Micro actuator
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Patent number 5,489,812
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Issue date Feb 6, 1996
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International Business Machines Corporation
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Tomotake Furuhata
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Micro-actuator
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Patent number 5,418,418
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Issue date May 23, 1995
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International Business Machines Corporation
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Toshiki Hirano
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Micro positioning device
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Patent number 5,351,412
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Issue date Oct 4, 1994
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International Business Machines Corporation
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Tomotake Furuhata
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B81 - MICRO-STRUCTURAL TECHNOLOGY