Claims
- 1. A micro actuator using vibration force as its driving force, comprising:
- a substrate;
- a piezo electric element connected to a top surface of said substrate,
- said piezo electric element having at least two electrodes; and
- a contact pin connected across said at least two electrodes and extending upwards from a top surface of said piezo electric element.
- 2. A micro actuator using Coulomb's force as its driving force, comprising:
- a substrate;
- a cavity in a surface of said substrate;
- at least two electrodes partially obstructing said cavity; and
- a contact pin connected across said at least two electrodes and extending upwards therefrom, whereby
- a voltage applied between one of said at least two electrodes and said substrate generates said Coulomb's force there between.
- 3. The micro actuator as recited in claim 2, wherein at least a portion of said electrodes is made of silicon nitrite.
- 4. The micro actuator as recited in claim 2, wherein said contact pin is made of resist.
- 5. A micro actuator using fluid as its driving force, comprising:
- a substrate;
- an orifice in said substrate;
- deformable means on top of said substrate, at said orifice;
- a wedged shaped valve extending from said deformable means towards said orifice; and
- a contact pin extending from said deformable means opposite said wedged shaped valve, wherein
- fluid injected through said orifice against said wedged shaped valve urges said deformable means away from said substrate, thereby forcing said contact pin in an upward motion.
- 6. The micro actuator as recited in claim 5, wherein said fluid is air.
- 7. The micro actuator as recited in claim 5, wherein said contact pin is made of resist.
- 8. A micro actuator using vibration force as its driving force, comprising:
- a. a substrate;
- b. a piezo electric element connected to said substrate;
- c. at least two electrodes deposited on said piezo electric element; and
- d. a contact pin formed across said at least two electrodes.
- 9. The actuator as recited in claim 8, wherein said electrodes are aluminium electrodes.
- 10. The actuator as recited in claim 8, wherein said contact pin is made of resist.
- 11. The actuator of claim 10, wherein said resist is polyimide.
- 12. A micro actuator comprising:
- a substrate;
- driving means connected to said substrate for generating a substantially vertical motion; and
- conversion means coupled to said driving means for converting said substantially vertical motion into rotational motion.
- 13. The micro actuator as recited in claim 12, wherein said driving means further comprises:
- a piezo element connected to a top surface of said substrate,
- said piezo electric element having at least two electrodes.
- 14. The micro actuator as recited in claim 13, wherein said electrodes are aluminum electrodes.
- 15. The micro actuator as recited in claim 13, wherein said conversion means further comprises: a contact pin connected across said at least two electrodes and extending upwards from a top surface of a piezo electric element.
- 16. The micro actuator as recited in claim 15, wherein said contact pin is made of resist.
- 17. The micro actuator of claim 16, wherein said resist is polyimide.
- 18. The micro actuator as recited in claim 12, wherein said substrate is provided with a cavity and said driving means further comprises two electrodes partially obstructing said cavity, and wherein by applying a voltage between one of said two electrodes and said substrate, a force is generated therebetween, thereby generating a substantially vertical motion.
Parent Case Info
This application is a divisional application of U.S. Ser. No. 07/890,455, filed on May 29, 1992, issued on Oct. 4, 1994 as U.S. Pat. No. 5,351,412.
US Referenced Citations (10)
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Divisions (1)
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Number |
Date |
Country |
Parent |
890455 |
May 1992 |
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