Tony Luong

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Air platen for leading edge and trailing edge control
- Patent number 7,018,276
- Issue date Mar 28, 2006
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for heating polishing pad
- Patent number 6,896,586
- Issue date May 24, 2005
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid dispense manifold for chemical-mechanical polisher
- Patent number 6,896,600
- Issue date May 24, 2005
- Lam Research Corporation
- Patrick P. H. Wu
- B24 - GRINDING POLISHING
Information Patent Grant
Air platen for leading edge and trailing edge control
- Patent number 6,761,626
- Issue date Jul 13, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for applying downward force on wafer during CMP
- Patent number 6,712,670
- Issue date Mar 30, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Belt wiper for a chemical mechanical planarization system
- Patent number 6,666,755
- Issue date Dec 23, 2003
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Air platen for leading edge and trailing edge control
- Publication number 20040242136
- Publication date Dec 2, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for applying downward force on wafer during CMP
- Publication number 20040161939
- Publication date Aug 19, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for heating polishing pad
- Publication number 20030186623
- Publication date Oct 2, 2003
- Lam Research Corp.
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for applying downward force on wafer during CMP
- Publication number 20030139115
- Publication date Jul 24, 2003
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Air platen for leading edge and trailing edge control
- Publication number 20030119433
- Publication date Jun 26, 2003
- Anthony de la Llera
- B24 - GRINDING POLISHING