Tony Ricci

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 11,302,556
- Issue date Apr 12, 2022
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching utilizing cryogenic wafer temperatures
- Patent number 11,289,306
- Issue date Mar 29, 2022
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic layer for electrostatic chuck including embedded faraday ca...
- Patent number 11,101,107
- Issue date Aug 24, 2021
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal configurations for a lower electrode assembly
- Patent number 10,892,197
- Issue date Jan 12, 2021
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck including clamp electrode assembly forming port...
- Patent number 10,892,179
- Issue date Jan 12, 2021
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled substrate support assembly
- Patent number 10,879,053
- Issue date Dec 29, 2020
- Lam Research Corporation
- Anthony Ricci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 10,636,689
- Issue date Apr 28, 2020
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic layer for electrostatic chuck including embedded faraday ca...
- Patent number 10,475,623
- Issue date Nov 12, 2019
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic electrostatic chuck including embedded faraday cage for RF...
- Patent number 10,192,767
- Issue date Jan 29, 2019
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 10,090,211
- Issue date Oct 2, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic electrostatic chuck including embedded Faraday cage for RF...
- Patent number 10,079,168
- Issue date Sep 18, 2018
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck including embedded faraday cage for RF delivery...
- Patent number 10,014,161
- Issue date Jul 3, 2018
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching utilizing cryogenic wafer temperatures
- Patent number 9,779,955
- Issue date Oct 3, 2017
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parasitic plasma prevention in plasma processing chambers
- Patent number 9,728,429
- Issue date Aug 8, 2017
- Lam Research Corporation
- Anthony Ricci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck including embedded faraday cage for RF delivery...
- Patent number 9,673,025
- Issue date Jun 6, 2017
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 8,821,639
- Issue date Sep 2, 2014
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for spatial and temporal control of temperature on a substrate
- Patent number 8,735,298
- Issue date May 27, 2014
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal plate with planar thermal zones for semiconductor processing
- Patent number 8,587,113
- Issue date Nov 19, 2013
- Lam Research Corporation
- Keith William Gaff
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Thermal plate with planar thermal zones for semiconductor processing
- Patent number 8,461,674
- Issue date Jun 11, 2013
- Lam Research Corporation
- Keith William Gaff
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for temperature control of a semiconductor sub...
- Patent number 8,410,393
- Issue date Apr 2, 2013
- Lam Research Corporation
- Anthony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing apparatus for spatial and temporal control...
- Patent number 8,051,556
- Issue date Nov 8, 2011
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 8,038,796
- Issue date Oct 18, 2011
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of protecting a bond layer in a substrate support adapted fo...
- Patent number 7,998,296
- Issue date Aug 16, 2011
- Lam Research Corporation
- Tony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of protecting a bond layer in a substrate support adapted fo...
- Patent number 7,431,788
- Issue date Oct 7, 2008
- Lam Research Corporation
- Anthony Ricci
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20200251370
- Publication date Aug 6, 2020
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...
- Publication number 20200035455
- Publication date Jan 30, 2020
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Edge Seal Configurations For A Lower Electrode Assembly
- Publication number 20180366379
- Publication date Dec 20, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...
- Publication number 20180358254
- Publication date Dec 13, 2018
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Including Clamp Electrode Assembly Forming Port...
- Publication number 20180130689
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...
- Publication number 20180130690
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES
- Publication number 20170372911
- Publication date Dec 28, 2017
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...
- Publication number 20170287680
- Publication date Oct 5, 2017
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...
- Publication number 20170263418
- Publication date Sep 14, 2017
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES
- Publication number 20170250087
- Publication date Aug 31, 2017
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20170110298
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- Anthony RICCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...
- Publication number 20170032935
- Publication date Feb 2, 2017
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20150187614
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20140356985
- Publication date Dec 4, 2014
- LAM RESEARCH CORPORATION
- Anthony Ricci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20140332161
- Publication date Nov 13, 2014
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20130269368
- Publication date Oct 17, 2013
- Keith William GAFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20130072024
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20130072035
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARASITIC PLASMA PREVENTION IN PLASMA PROCESSING CHAMBERS
- Publication number 20120024449
- Publication date Feb 2, 2012
- LAM RESEARCH CORPORATION
- Anthony Ricci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20120018411
- Publication date Jan 26, 2012
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF A SEMICONDUCTOR SUB...
- Publication number 20110284505
- Publication date Nov 24, 2011
- LAM RESEARCH CORPORATION
- Anthony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing apparatus for spatial and temporal control...
- Publication number 20090078360
- Publication date Mar 26, 2009
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of protecting a bond layer in a substrate support adapted fo...
- Publication number 20080314508
- Publication date Dec 25, 2008
- LAM RESEARCH CORPORATION
- Tony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of protecting a bond layer in a substrate support adapted fo...
- Publication number 20070131350
- Publication date Jun 14, 2007
- Anthony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for spatial and temporal control of temperature on a subs...
- Publication number 20060144516
- Publication date Jul 6, 2006
- Lam Research Inc., a Delaware Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pretreated gas distribution plate
- Publication number 20040244685
- Publication date Dec 9, 2004
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Apparatus for spatial and temporal control of temperature on a subs...

Ion beam etching utilizing cryogenic wafer temperatures

Ceramic layer for electrostatic chuck including embedded faraday ca...

Edge seal configurations for a lower electrode assembly

Electrostatic chuck including clamp electrode assembly forming port...

Temperature controlled substrate support assembly

Apparatus for spatial and temporal control of temperature on a subs...

Ceramic layer for electrostatic chuck including embedded faraday ca...

Ceramic electrostatic chuck including embedded faraday cage for RF...

Edge seal for lower electrode assembly

Ceramic electrostatic chuck including embedded Faraday cage for RF...

Electrostatic chuck including embedded faraday cage for RF delivery...

Ion beam etching utilizing cryogenic wafer temperatures

Parasitic plasma prevention in plasma processing chambers

Electrostatic chuck including embedded faraday cage for RF delivery...

Apparatus for spatial and temporal control of temperature on a subs...

Method for spatial and temporal control of temperature on a substrate

Thermal plate with planar thermal zones for semiconductor processing

Thermal plate with planar thermal zones for semiconductor processing

Apparatus and method for temperature control of a semiconductor sub...

Method of manufacturing apparatus for spatial and temporal control...

Apparatus for spatial and temporal control of temperature on a subs...

Method of protecting a bond layer in a substrate support adapted fo...

Method of protecting a bond layer in a substrate support adapted fo...

Patents Applicationslast 30 patents

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...

Edge Seal Configurations For A Lower Electrode Assembly

Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...

Electrostatic Chuck Including Clamp Electrode Assembly Forming Port...

Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...

ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES

Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...

Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...

ION BEAM ETCHING UTILIZING CRYOGENIC WAFER TEMPERATURES

TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

THERMAL PLATE WITH PLANAR THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

PARASITIC PLASMA PREVENTION IN PLASMA PROCESSING CHAMBERS

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF A SEMICONDUCTOR SUB...

Method of manufacturing apparatus for spatial and temporal control...

Method of protecting a bond layer in a substrate support adapted fo...

Method of protecting a bond layer in a substrate support adapted fo...

Apparatus for spatial and temporal control of temperature on a subs...

Pretreated gas distribution plate