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Yokosuka, JP
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last 30 patents
Information
Patent Grant
Sputtered silicide film
Patent number
5,612,571
Issue date
Mar 18, 1997
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target and method of manufacturing the same
Patent number
5,508,000
Issue date
Apr 16, 1996
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering target and method of manufacturing the same
Patent number
5,409,517
Issue date
Apr 25, 1995
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...