Tooru Komatu

Person

  • Yokosuka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtered silicide film

    • Patent number 5,612,571
    • Issue date Mar 18, 1997
    • Kabushiki Kaisha Toshiba
    • Michio Satou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering target and method of manufacturing the same

    • Patent number 5,508,000
    • Issue date Apr 16, 1996
    • Kabushiki Kaisha Toshiba
    • Michio Satou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering target and method of manufacturing the same

    • Patent number 5,409,517
    • Issue date Apr 25, 1995
    • Kabushiki Kaisha Toshiba
    • Michio Satou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...