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TORU FURUSHIGE
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Osaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing apparatus and polishing method
Patent number
11,541,503
Issue date
Jan 3, 2023
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Yuji Yamamoto
B24 - GRINDING POLISHING
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Patent Grant
Wafer separating apparatus and wafer separating method
Patent number
9,190,301
Issue date
Nov 17, 2015
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Michirou Yoshino
B32 - LAYERED PRODUCTS
Patents Applications
last 30 patents
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Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20200324383
Publication date
Oct 15, 2020
Panasonic Intellectual Property Management Co., Ltd.
YUJI YAMAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
WAFER SEPARATING APPARATUS AND WAFER SEPARATING METHOD
Publication number
20140130986
Publication date
May 15, 2014
PANASONIC CORPORATION
MICHIROU YOSHINO
B32 - LAYERED PRODUCTS