Toru Kagaya

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas injector for substrate processing apparatus
- Patent number D1020668
- Issue date Apr 2, 2024
- Kokusai Electric Corporation
- Toru Kagaya
- D23 - Environmental heating and cooling
Information Patent Grant
Substrate processing apparatus and producing method of semiconducto...
- Patent number 8,598,047
- Issue date Dec 3, 2013
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,366,868
- Issue date Feb 5, 2013
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and reaction container
- Patent number 8,261,692
- Issue date Sep 11, 2012
- Hitachi Kokusai Electric Inc.
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,211,802
- Issue date Jul 3, 2012
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and reaction container
- Patent number 8,047,158
- Issue date Nov 1, 2011
- Hitachi Kokusai Electric Inc.
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and reaction container
- Patent number 7,900,580
- Issue date Mar 8, 2011
- Hitachi Kokusai Electric Inc.
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method for film formation
- Patent number 7,713,582
- Issue date May 11, 2010
- Hitachi Kokusai Electric
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a semiconductor device
- Patent number 7,622,396
- Issue date Nov 24, 2009
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical type semiconductor device producing apparatus
- Patent number 6,905,549
- Issue date Jun 14, 2005
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, NOZZLE ASSEMBLY, SUBSTRATE PROCESSI...
- Publication number 20230332290
- Publication date Oct 19, 2023
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230055506
- Publication date Feb 23, 2023
- Kokusai Electric Corporation
- Toru KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20130133696
- Publication date May 30, 2013
- Hitachi Kokusai Electric Inc.
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20120240348
- Publication date Sep 27, 2012
- Kazuyuki Okuda
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF SEMICONDUCTO...
- Publication number 20120034788
- Publication date Feb 9, 2012
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL TYPE SEMICONDUCTOR DEVICE PRODUCING APPARATUS
- Publication number 20110176967
- Publication date Jul 21, 2011
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20110130001
- Publication date Jun 2, 2011
- Kazuyuki Okuda
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND REACTION CONTAINER
- Publication number 20100263593
- Publication date Oct 21, 2010
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Producing Method of Semiconducto...
- Publication number 20090186467
- Publication date Jul 23, 2009
- Masanori SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090178694
- Publication date Jul 16, 2009
- Kazuyuki Okuda
- B08 - CLEANING
Information Patent Application
Vertical type semiconductor device producing apparatus
- Publication number 20080250619
- Publication date Oct 16, 2008
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Reaction Container
- Publication number 20080251015
- Publication date Oct 16, 2008
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Reaction Container
- Publication number 20080251014
- Publication date Oct 16, 2008
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080160214
- Publication date Jul 3, 2008
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Reaction Container
- Publication number 20080121180
- Publication date May 29, 2008
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate treatment apparatus and method of manufacturing semicondu...
- Publication number 20060258174
- Publication date Nov 16, 2006
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20060150905
- Publication date Jul 13, 2006
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20060060142
- Publication date Mar 23, 2006
- Kazuyuki Okuda
- B08 - CLEANING
Information Patent Application
Vertical type semiconductor device producing apparatus
- Publication number 20050217577
- Publication date Oct 6, 2005
- Hitachi Kokusai Electric, Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and reaction container
- Publication number 20040025786
- Publication date Feb 12, 2004
- Tadashi Kontani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20030221779
- Publication date Dec 4, 2003
- Kazuyuki Okuda
- B08 - CLEANING
Information Patent Application
Vertical type semiconductor device producing apparatus
- Publication number 20030213435
- Publication date Nov 20, 2003
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20030024477
- Publication date Feb 6, 2003
- Hitachi Kokusai Electric Inc.
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toru Kagaya

Person

Patents Grantslast 30 patents

Gas injector for substrate processing apparatus

Substrate processing apparatus and producing method of semiconducto...

Substrate processing apparatus

Substrate processing apparatus and reaction container

Substrate processing apparatus

Substrate processing apparatus and reaction container

Substrate processing apparatus and reaction container

Substrate processing method for film formation

Method of producing a semiconductor device

Vertical type semiconductor device producing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, NOZZLE ASSEMBLY, SUBSTRATE PROCESSI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF SEMICONDUCTO...

VERTICAL TYPE SEMICONDUCTOR DEVICE PRODUCING APPARATUS

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS AND REACTION CONTAINER

Substrate Processing Apparatus and Producing Method of Semiconducto...

SUBSTRATE PROCESSING APPARATUS

Vertical type semiconductor device producing apparatus

Substrate Processing Apparatus and Reaction Container

Substrate Processing Apparatus and Reaction Container

SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus and Reaction Container

Substrate treatment apparatus and method of manufacturing semicondu...

Substrate processing apparatus

Substrate processing apparatus

Vertical type semiconductor device producing apparatus

Substrate processing apparatus and reaction container

Substrate processing apparatus

Vertical type semiconductor device producing apparatus

Substrate processing apparatus