Toshiaki Shinozaki

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern forming method utilizing material with photoresist film und...
- Patent number 5,188,924
- Issue date Feb 23, 1993
- Kabushiki Kaisha Toshiba
- Kunihiro Ikari
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 5,051,338
- Issue date Sep 24, 1991
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 4,897,337
- Issue date Jan 30, 1990
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of inspecting masks and apparatus thereof
- Patent number 4,748,327
- Issue date May 31, 1988
- Kabushiki Kaisha Toshiba
- Toshiaki Shinozaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 4,717,645
- Issue date Jan 5, 1988
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam pattern transfer system having an autofocusing mechanism
- Patent number 4,572,956
- Issue date Feb 25, 1986
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toru Tojo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Fixed-slit type photoelectric microscope
- Patent number 4,560,278
- Issue date Dec 24, 1985
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toshiaki Shinozaki
- G02 - OPTICS
Information Patent Grant
Electron beam pattern transfer device and method for aligning mask...
- Patent number 4,469,949
- Issue date Sep 4, 1984
- Kabushiki Kaisha Toshiba
- Ichiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam image transfer device
- Patent number 4,467,210
- Issue date Aug 21, 1984
- Tokyo Shibaura Denki Kabushiki Kaisha
- Kazuyoshi Sugihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for transferring a fine pattern onto a target
- Patent number 4,411,013
- Issue date Oct 18, 1983
- Tokyo Shibaura Denki Kabushiki Kaisha
- Shinichiro Takasu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam type pattern transfer apparatus
- Patent number 4,366,383
- Issue date Dec 28, 1982
- Vlsi Technology Research Association
- Shunichi Sano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Aperture stop
- Patent number 4,269,653
- Issue date May 26, 1981
- Vlsi Technology Research Association
- Hirotsugu Wada
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electron beam exposure apparatus
- Patent number 4,218,621
- Issue date Aug 19, 1980
- Vlsi Technology Research Association
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS

Toshiaki Shinozaki

Person

Patents Grantslast 30 patents

Pattern forming method utilizing material with photoresist film und...

Method and apparatus for forming resist pattern

Method and apparatus for forming resist pattern

Method of inspecting masks and apparatus thereof

Method and apparatus for forming resist pattern

Electron beam pattern transfer system having an autofocusing mechanism

Fixed-slit type photoelectric microscope

Electron beam pattern transfer device and method for aligning mask...

Electron-beam image transfer device

System for transferring a fine pattern onto a target

Electron beam type pattern transfer apparatus

Aperture stop

Electron beam exposure apparatus