Toshifumi Kimba

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical film-thickness measuring apparatus and polishing apparatus
- Patent number 11,951,588
- Issue date Apr 9, 2024
- Ebara Corporation
- Masaki Kinoshita
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,911,867
- Issue date Feb 27, 2024
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,612,982
- Issue date Mar 28, 2023
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,413,720
- Issue date Aug 16, 2022
- Ebara Corporation
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,045,921
- Issue date Jun 29, 2021
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Film-thickness measuring apparatus, polishing apparatus, and polish...
- Patent number 10,816,323
- Issue date Oct 27, 2020
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,663,287
- Issue date May 26, 2020
- Ebara Corporation
- Toshifumi Kimba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 10,343,255
- Issue date Jul 9, 2019
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Film thickness measuring method, film thickness measuring apparatus...
- Patent number 10,256,104
- Issue date Apr 9, 2019
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,124,462
- Issue date Nov 13, 2018
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,969,048
- Issue date May 15, 2018
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 9,842,783
- Issue date Dec 12, 2017
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 9,604,337
- Issue date Mar 28, 2017
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 9,561,577
- Issue date Feb 7, 2017
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 9,406,480
- Issue date Aug 2, 2016
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,401,293
- Issue date Jul 26, 2016
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 9,266,214
- Issue date Feb 23, 2016
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Electron beam apparatus for inspecting a pattern on a sample using...
- Patent number 9,136,091
- Issue date Sep 15, 2015
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Polishing pad for substrate polishing apparatus
- Patent number D731448
- Issue date Jun 9, 2015
- Ebara Corporation
- Masaki Kinoshita
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,946,631
- Issue date Feb 3, 2015
- Ebara Corporation
- Nobuharu Noji
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 8,771,038
- Issue date Jul 8, 2014
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Testing apparatus using charged particles and device manufacturing...
- Patent number 8,742,341
- Issue date Jun 3, 2014
- Ebara Corporation
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Grant
Method of monitoring progress of substrate polishing and polishing...
- Patent number 8,687,197
- Issue date Apr 1, 2014
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Electron beam apparatus for inspecting a pattern on a sample using...
- Patent number 8,639,463
- Issue date Jan 28, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Method of making diagram for use in selection of wavelength of ligh...
- Patent number 8,585,460
- Issue date Nov 19, 2013
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,414,355
- Issue date Apr 9, 2013
- Ebara Corporation
- Toshifumi Kimba
- B24 - GRINDING POLISHING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,368,031
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PAD SURFACE DETERMINING METHOD AND PAD SURFACE DETERMINING SYSTEM
- Publication number 20240338812
- Publication date Oct 10, 2024
- EBARA CORPORATION
- Toshifumi KIMBA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING APPARATUS
- Publication number 20240278378
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Yoichi SHIOKAWA
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PROPERTY MEASURING APPARATUS FOR POLISHING PAD, SURFACE PRO...
- Publication number 20240075579
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Kohei OHSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PROPERTY MEASURING SYSTEM, SURFACE PROPERTY MEASURING METHO...
- Publication number 20240075580
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PROPERTY JUDGING METHOD AND SURFACE PROPERTY JUDGING SYSTEM
- Publication number 20240027190
- Publication date Jan 25, 2024
- EBARA CORPORATION
- Toshifumi KIMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS FOR WORKPIECE
- Publication number 20230311267
- Publication date Oct 5, 2023
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
OPTICAL FILM-THICKNESS MEASURING APPARATUS AND POLISHING APPARATUS
- Publication number 20220105601
- Publication date Apr 7, 2022
- EBARA CORPORATION
- Masaki Kinoshita
- B24 - GRINDING POLISHING
Information Patent Application
FILM THICKNESS MEASUREMENT APPARATUS, POLISHING APPARATUS, AND FILM...
- Publication number 20210354262
- Publication date Nov 18, 2021
- EBARA CORPORATION
- Hirotaka Satori
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20200282512
- Publication date Sep 10, 2020
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING PAD FOR SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLIS...
- Publication number 20200001424
- Publication date Jan 2, 2020
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20190219381
- Publication date Jul 18, 2019
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20190118331
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Nobuyuki TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20190022820
- Publication date Jan 24, 2019
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
FILM-THICKNESS MEASURING APPARATUS, POLISHING APPARATUS, AND POLISH...
- Publication number 20190017808
- Publication date Jan 17, 2019
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180339392
- Publication date Nov 29, 2018
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20180229346
- Publication date Aug 16, 2018
- EBARA CORPORATION
- Itsuki KOBATA
- B24 - GRINDING POLISHING
Information Patent Application
FILM THICKNESS MEASURING METHOD, FILM THICKNESS MEASURING APPARATUS...
- Publication number 20180130667
- Publication date May 10, 2018
- EBARA CORPORATION
- Toshifumi KIMBA
- G01 - MEASURING TESTING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20170103928
- Publication date Apr 13, 2017
- EBARA CORPORATION
- Toshifumi KIMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20160354894
- Publication date Dec 8, 2016
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20160325399
- Publication date Nov 10, 2016
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING METHOD
- Publication number 20160129546
- Publication date May 12, 2016
- EBARA CORPORATION
- Toshifumi KIMBA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20150332943
- Publication date Nov 19, 2015
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20150122993
- Publication date May 7, 2015
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20150017745
- Publication date Jan 15, 2015
- EBARA CORPORATION
- Toshifumi KIMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20140323016
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Toshifumi KIMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...
- Publication number 20140158885
- Publication date Jun 12, 2014
- EBARA CORPORATION
- Nobuharu Noji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS FOR INSPECTING A PATTERN ON A SAMPLE USING...
- Publication number 20140107959
- Publication date Apr 17, 2014
- EBARA CORPORATION
- Toshifumi KIMBA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Toshifumi Kimba

Person

Patents Grantslast 30 patents

Optical film-thickness measuring apparatus and polishing apparatus

Polishing apparatus and polishing method

Polishing method and polishing apparatus

Polishing apparatus

Polishing apparatus and polishing method

Film-thickness measuring apparatus, polishing apparatus, and polish...

Polishing apparatus

Polishing apparatus

Film thickness measuring method, film thickness measuring apparatus...

Polishing apparatus

Polishing apparatus

Polishing method and polishing apparatus

Polishing method

Polishing method and polishing apparatus

Testing apparatus using charged particles and device manufacturing...

Polishing apparatus and polishing method

Inspection system by charged particle beam and method of manufactur...

Polishing method and polishing apparatus

Electron beam apparatus for inspecting a pattern on a sample using...

Polishing pad for substrate polishing apparatus

Testing apparatus using charged particles and device manufacturing...

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Polishing apparatus

Testing apparatus using charged particles and device manufacturing...

Method of monitoring progress of substrate polishing and polishing...

Electron beam apparatus for inspecting a pattern on a sample using...

Method of making diagram for use in selection of wavelength of ligh...

Substrate processing apparatus

Inspection system by charged particle beam and method of manufactur...

Patents Applicationslast 30 patents

PAD SURFACE DETERMINING METHOD AND PAD SURFACE DETERMINING SYSTEM

POLISHING APPARATUS

SURFACE PROPERTY MEASURING APPARATUS FOR POLISHING PAD, SURFACE PRO...

SURFACE PROPERTY MEASURING SYSTEM, SURFACE PROPERTY MEASURING METHO...

SURFACE PROPERTY JUDGING METHOD AND SURFACE PROPERTY JUDGING SYSTEM

POLISHING METHOD AND POLISHING APPARATUS FOR WORKPIECE

OPTICAL FILM-THICKNESS MEASURING APPARATUS AND POLISHING APPARATUS

FILM THICKNESS MEASUREMENT APPARATUS, POLISHING APPARATUS, AND FILM...

POLISHING METHOD AND POLISHING APPARATUS

POLISHING PAD FOR SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLIS...

POLISHING APPARATUS

POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

FILM-THICKNESS MEASURING APPARATUS, POLISHING APPARATUS, AND POLISH...

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS

FILM THICKNESS MEASURING METHOD, FILM THICKNESS MEASURING APPARATUS...

POLISHING METHOD AND POLISHING APPARATUS

POLISHING APPARATUS

POLISHING APPARATUS

POLISHING METHOD

POLISHING APPARATUS

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

POLISHING METHOD AND POLISHING APPARATUS

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

POLISHING METHOD AND POLISHING APPARATUS

TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING...

ELECTRON BEAM APPARATUS FOR INSPECTING A PATTERN ON A SAMPLE USING...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...