Toshifumi Suganaga

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming resist pattern and method of manufacturing semico...
- Patent number 7,727,709
- Issue date Jun 1, 2010
- Renesas Technology Corp.
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method and semiconductor device fabric...
- Patent number 6,717,652
- Issue date Apr 6, 2004
- Renesas Technology Corp.
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle for use in exposing semiconductor, method of producing the...
- Patent number 6,352,800
- Issue date Mar 5, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus correcting method and method of manufacturing semiconductor d...
- Patent number 6,295,629
- Issue date Sep 25, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device with reduced stepped portions
- Patent number 6,087,693
- Issue date Jul 11, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Toshifumi Suganaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a semiconductor device having reduced stepped po...
- Patent number 5,776,825
- Issue date Jul 7, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Toshifumi Suganaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic random access memory device having reduced stepped portions
- Patent number 5,539,231
- Issue date Jul 23, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Toshifumi Suganaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING RESIST PATTERN AND METHOD OF MANUFACTURING SEMICO...
- Publication number 20100203456
- Publication date Aug 12, 2010
- Renesas Technology Corp.
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of forming resist pattern and method of maufacturing semicon...
- Publication number 20070224546
- Publication date Sep 27, 2007
- RENESAS TECHNOLOGY CORP.
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method and semiconductor device fabric...
- Publication number 20020072000
- Publication date Jun 13, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Toshifumi Suganaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Toshifumi Suganaga

Person

Patents Grantslast 30 patents

Method of forming resist pattern and method of manufacturing semico...

Exposure apparatus, exposure method and semiconductor device fabric...

Reticle for use in exposing semiconductor, method of producing the...

Focus correcting method and method of manufacturing semiconductor d...

Semiconductor device with reduced stepped portions

Method for forming a semiconductor device having reduced stepped po...

Dynamic random access memory device having reduced stepped portions

Patents Applicationslast 30 patents

METHOD OF FORMING RESIST PATTERN AND METHOD OF MANUFACTURING SEMICO...

Method of forming resist pattern and method of maufacturing semicon...

Exposure apparatus, exposure method and semiconductor device fabric...