TREA

Toshihiko HANAMACHI

Follow

Person

  • Kanagawa, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Member for plasma processing device
    • Patent number 12,247,296
    • Issue date Mar 11, 2025
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Stage, film-forming apparatus, and film-processing apparatus
    • Patent number 12,211,710
    • Issue date Jan 28, 2025
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Heater unit
    • Patent number 11,490,464
    • Issue date Nov 1, 2022
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Sheath heater
    • Patent number 11,477,858
    • Issue date Oct 18, 2022
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Substrate supporting unit and film forming device having the substr...
    • Patent number 11,201,040
    • Issue date Dec 14, 2021
    • NHK Spring Co., Ltd.
    • Go Takahara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of manufacturing ceramic sintered body, ceramic sintered bod...
    • Patent number 10,462,850
    • Issue date Oct 29, 2019
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Grant

    Heater unit
    • Patent number 10,290,529
    • Issue date May 14, 2019
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Method of manufacturing plate with passage, plate with passage, tem...
    • Patent number 10,279,441
    • Issue date May 7, 2019
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support device
    • Patent number 10,276,410
    • Issue date Apr 30, 2019
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate support device
    • Patent number 9,551,071
    • Issue date Jan 24, 2017
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Lamination and method for manufacturing lamination
    • Patent number 9,162,251
    • Issue date Oct 20, 2015
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Ceramics heater
    • Patent number 7,372,001
    • Issue date May 13, 2008
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Apparatus for vapor deposition
    • Patent number 7,241,346
    • Issue date Jul 10, 2007
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 6,687,113
    • Issue date Feb 3, 2004
    • NHK Spring Co., Ltd.
    • Shinji Saito
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Layered ceramic/metallic assembly, and an electrostatic chuck using...
    • Patent number 6,535,371
    • Issue date Mar 18, 2003
    • Takashi Kayamoto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Heating apparatus
    • Patent number 6,376,808
    • Issue date Apr 23, 2002
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate holding apparatus for processing semiconductor
    • Patent number 6,159,301
    • Issue date Dec 12, 2000
    • ASM Japan K.K.
    • Kiyoshi Sato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLATE WITH FLOW CHANNEL
    • Publication number 20220026151
    • Publication date Jan 27, 2022
    • NHK Spring Co., Ltd.
    • Yoshihito Araki
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    JOINING METHOD AND JOINED BODY
    • Publication number 20220009022
    • Publication date Jan 13, 2022
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    STAGE AND METHOD OF MANUFACTURING STAGE
    • Publication number 20210398839
    • Publication date Dec 23, 2021
    • NHK Spring Co., Ltd.
    • Toshihiko HANAMACHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    JOINED BODY
    • Publication number 20210324889
    • Publication date Oct 21, 2021
    • NHK Spring Co., Ltd.
    • Masaru Takimoto
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    MEMBER FOR PLASMA PROCESSING DEVICE
    • Publication number 20210292911
    • Publication date Sep 23, 2021
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATER AND STAGE HAVING THE HEATER
    • Publication number 20210235550
    • Publication date Jul 29, 2021
    • NHK Spring Co., Ltd.
    • Toshihiko HANAMACHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    STAGE, FILM-FORMING APPARATUS, AND FILM-PROCESSING APPARATUS
    • Publication number 20210217638
    • Publication date Jul 15, 2021
    • NHK Spring Co., Ltd.
    • Toshihiko HANAMACHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATER UNIT
    • Publication number 20200043638
    • Publication date Feb 6, 2020
    • NHK SPRING CO., LTD.
    • Toshihiko HANAMACHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHEATH HEATER
    • Publication number 20200045779
    • Publication date Feb 6, 2020
    • NHK SPRING CO., LTD.
    • Toshihiko HANAMACHI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUBSTRATE SUPPORTING UNIT AND FILM FORMING DEVICE HAVING THE SUBSTR...
    • Publication number 20190385827
    • Publication date Dec 19, 2019
    • NHK Spring Co., Ltd.
    • Go TAKAHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATER UNIT
    • Publication number 20180226285
    • Publication date Aug 9, 2018
    • NHK Spring Co., Ltd.
    • Toshihiko HANAMACHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE SUPPORT DEVICE
    • Publication number 20150376783
    • Publication date Dec 31, 2015
    • NHK SPRING CO., LTD.
    • Toshihiko HANAMACHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LAMINATED BODY AND METHOD OF MANUFACTURING LAMINATED BODY
    • Publication number 20140134448
    • Publication date May 15, 2014
    • NHK Spring Co., Ltd.
    • Yuichiro Yamauchi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    LAMINATION, CONDUCTIVE MATERIAL, AND METHOD FOR MANUFACTURING LAMIN...
    • Publication number 20140069700
    • Publication date Mar 13, 2014
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • B32 - LAYERED PRODUCTS
  • Information Patent Application

    LAMINATION AND METHOD FOR MANUFACTURING LAMINATION
    • Publication number 20140023875
    • Publication date Jan 23, 2014
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    METHOD OF MANUFACTURING CERAMIC SINTERED BODY, CERAMIC SINTERED BOD...
    • Publication number 20130200067
    • Publication date Aug 8, 2013
    • NHK Spring Co., Ltd.
    • Satoshi Hirano
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Application

    SUBSTRATE SUPPORT DEVICE
    • Publication number 20130134148
    • Publication date May 30, 2013
    • NHK Spring Co., Ltd.
    • Toshihiro TACHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING PLATE WITH PASSAGE, PLATE WITH PASSAGE, TEM...
    • Publication number 20130112383
    • Publication date May 9, 2013
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SQUIRREL-CAGE ROTOR AND MANUFACTURING METHOD OF SQUIRREL-CAGE ROTOR
    • Publication number 20130106233
    • Publication date May 2, 2013
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    Apparatus for vapor deposition
    • Publication number 20040194710
    • Publication date Oct 7, 2004
    • NHK SPRING CO., LTD
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Ceramics heater
    • Publication number 20040112888
    • Publication date Jun 17, 2004
    • NHK SPRING CO., LTD
    • Toshihiro Tachikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Electrostatic chuck
    • Publication number 20010055190
    • Publication date Dec 27, 2001
    • NHK Spring Co., Ltd.
    • Shinji Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Heating apparatus
    • Publication number 20010042744
    • Publication date Nov 22, 2001
    • NHK Spring Co., Ltd.
    • Toshihiro Tachikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ceramic heater device and film forming device using the same
    • Publication number 20010029895
    • Publication date Oct 18, 2001
    • NHK Spring Co., Ltd.
    • Toshihiko Hanamachi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...