Number | Date | Country | Kind |
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2000-127810 | Apr 2000 | JP |
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5665166 | Deguchi et al. | Sep 1997 | A |
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Number | Date | Country |
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11-260534 | Sep 1999 | JP |
Entry |
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U.S. Ser. No. 09/299,807 Layered Ceramic/Metallic Assembly and an Electrostatic Chuck Using Such an Assembly Technical Field. |
U.S. Ser. No. 09/814,277 Ceramic Heater Device and Film Forming Device Using the Same. |
U.S. Ser. No. 09/847,844 Filing Date: May 1, 2001 Toshihiro Tachikawa and Toshihiko Hanamachi Heating Apparatus. |