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ANTENNA AND PLASMA DEPOSITION APPARATUS
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Publication number 20190180984
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Publication date Jun 13, 2019
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TOKYO ELECTRON LIMITED
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Taro IKEDA
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20170342564
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Publication date Nov 30, 2017
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TOKYO ELECTRON LIMITED
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Takahiro HIRANO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20170298514
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Publication date Oct 19, 2017
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Takahiro Hirano
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20170236690
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Publication date Aug 17, 2017
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TOKYO ELECTRON LIMITED
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Takahiro HIRANO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20160358758
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Publication date Dec 8, 2016
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TOKYO ELECTRON LIMITED
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Takahiro HIRANO
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H01 - BASIC ELECTRIC ELEMENTS
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FILM-FORMING APPARATUS
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Publication number 20150279627
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Publication date Oct 1, 2015
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TOKYO ELECTRON LIMITED
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Masahide Iwasaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20150232993
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Publication date Aug 20, 2015
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TOKYO ELECTRON LIMITED
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Toshihiko IWAO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILM FORMING APPARATUS
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Publication number 20150211124
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Publication date Jul 30, 2015
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TOKYO ELECTRON LIMITED
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Toshihisa Nozawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20150194290
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Publication date Jul 9, 2015
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TOKYO ELECTRON LIMITED
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Toshihisa Nozawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILM FORMATION DEVICE
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Publication number 20150007774
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Publication date Jan 8, 2015
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TOKYO ELECTRON LIMITED
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Masahide Iwasaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20140251541
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Publication date Sep 11, 2014
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TOKYO ELECTRON LIMITED
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Toshihiko IWAO
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H01 - BASIC ELECTRIC ELEMENTS
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