Membership
Tour
Register
Log in
Toshihiro Hayami
Follow
Person
Nirasaki-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and method
Patent number
10,854,431
Issue date
Dec 1, 2020
Tokyo Electron Limited
Akira Koshiishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Plasma processing apparatus and method
Patent number
10,546,727
Issue date
Jan 28, 2020
Tokyo Electron Limited
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
10,529,539
Issue date
Jan 7, 2020
Tokyo Electron Limited
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
9,490,105
Issue date
Nov 8, 2016
Tokyo Electron Limited
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing unit and high-frequency electric power supplying...
Patent number
8,628,640
Issue date
Jan 14, 2014
Tokyo Electron Limited
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
8,603,293
Issue date
Dec 10, 2013
Tokyo Electron Limited
Akira Koshiishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
High frequency power source and its control method, and plasma proc...
Patent number
8,286,581
Issue date
Oct 16, 2012
Tokyo Electron Limited
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing chamber, potential controlling apparatus, potenti...
Patent number
8,157,952
Issue date
Apr 17, 2012
Tokyo Electron Limited
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
8,038,833
Issue date
Oct 18, 2011
Tokyo Electron Limited
Satoshi Maebashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
7,988,816
Issue date
Aug 2, 2011
Tokyo Electron Limited
Akira Koshiishi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Plasma processing apparatus and method
Patent number
7,951,262
Issue date
May 31, 2011
Tokyo Electron Limited
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure for plasma processing chamber, plasma processing chamber,...
Patent number
7,895,970
Issue date
Mar 1, 2011
Tokyo Electron Limited
Masanobu Honda
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Grant
Temperature control system and substrate processing apparatus
Patent number
7,870,751
Issue date
Jan 18, 2011
Tokyo Electron Limited
Kengo Kaneko
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Substrate mounting table, substrate processing apparatus and substr...
Patent number
7,815,740
Issue date
Oct 19, 2010
Tokyo Electron Limited
Kaoru Oohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive coupling plasma processing apparatus
Patent number
7,767,055
Issue date
Aug 3, 2010
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate supporting member and substrate processing apparatus
Patent number
7,718,007
Issue date
May 18, 2010
Tokyo Electron Limited
Kaoru Oohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
7,368,876
Issue date
May 6, 2008
Tokyo Electron Limited
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrical joint forming member and plasma processing apparatus
Patent number
7,008,275
Issue date
Mar 7, 2006
Tokyo Electron Limited
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20210082669
Publication date
Mar 18, 2021
TOKYO ELECTRON LIMITED
Akira KOSHIISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20200111645
Publication date
Apr 9, 2020
TOKYO ELECTRON LIMITED
Akira KOSHIISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20170032936
Publication date
Feb 2, 2017
TOKYO ELECTRON LIMITED
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20160379805
Publication date
Dec 29, 2016
TOKYO ELECTRON LIMITED
Akira KOSHIISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20140124139
Publication date
May 8, 2014
TOKYO ELECTRON LIMITED
Akira KOSHIISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRICAL JOINT MEMBER FOR REDUCING AN ELECTRICAL RESISTANCE BETWE...
Publication number
20120009829
Publication date
Jan 12, 2012
TOKYO ELECTRON LIMITED
Satoshi Maebashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20110272097
Publication date
Nov 10, 2011
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20110214815
Publication date
Sep 8, 2011
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPRATUS AND METHOD AND APPARATUS FOR MEASURING D...
Publication number
20090277585
Publication date
Nov 12, 2009
TOKYO ELECTRON LIMITED
Satoshi Maebashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure for plasma processing chamber, plasma processing chamber,...
Publication number
20070068798
Publication date
Mar 29, 2007
TOKYO ELECTRON LIMITED
Masanobu Honda
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
Information
Patent Application
Plasma processing chamber, potential controlling apparatus, potenti...
Publication number
20060273733
Publication date
Dec 7, 2006
TOKYO ELECTRON LIMITED
Masanobu Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate mounting table, substrate processing apparatus and substr...
Publication number
20060207725
Publication date
Sep 21, 2006
TOKYO ELECTRONIC LIMITED
Kaoru Oohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate supporting member and substrate processing apparatus
Publication number
20060207507
Publication date
Sep 21, 2006
TOKYO ELECTRON LIMITED
Kaoru Oohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature control system and substrate processing apparatus
Publication number
20060201172
Publication date
Sep 14, 2006
TOKYO ELECTRON LIMITED
Kengo Kaneko
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Application
Capacitive coupling plasma processing apparatus
Publication number
20060118044
Publication date
Jun 8, 2006
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20060066247
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method
Publication number
20060037703
Publication date
Feb 23, 2006
TOKYO ELECTRON LIMITED
Akira Koshiishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and method and apparatus for measuring...
Publication number
20050095732
Publication date
May 5, 2005
TOKYO ELECTRON LIMITED
Satoshi Maebashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrical joint forming member and plasma processing apparatus
Publication number
20050070174
Publication date
Mar 31, 2005
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20050011452
Publication date
Jan 20, 2005
TOKYO ELECTRON LIMITED
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High frequency power source and its control method, and plasma proc...
Publication number
20040222184
Publication date
Nov 11, 2004
TOKYO ELECTRON LIMITED
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing unit and high-frequency electric power supplying...
Publication number
20040154540
Publication date
Aug 12, 2004
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature measuring method and plasma processing apparatus
Publication number
20040108066
Publication date
Jun 10, 2004
TOKYO ELECTRON LIMITED
Toshihiro Hayami
H01 - BASIC ELECTRIC ELEMENTS