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Toshihiro Maki
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Yokohama-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Interconnector line of thin film, sputter target for forming the wi...
Patent number
RE45481
Issue date
Apr 21, 2015
Kabushiki Kaisha Toshiba
Takashi Ishigami
257 - Active solid-state devices
Information
Patent Grant
Interconnector line of thin film, sputter target for forming the wi...
Patent number
RE41975
Issue date
Nov 30, 2010
Kabushiki Kaisha Toshiba
Takashi Ishigami
438 - Semiconductor device manufacturing: process
Information
Patent Grant
Mo-W material for formation of wiring, Mo-W target and method for p...
Patent number
7,153,589
Issue date
Dec 26, 2006
Kabushiki Kaisha Toshiba
Yasuo Kohsaka
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Refractory metal silicide target, method of manufacturing the targe...
Patent number
6,352,628
Issue date
Mar 5, 2002
Kabushiki Kaisha Toshiba
Michio Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Interconnector line of thin film, sputter target for forming the wi...
Patent number
6,329,275
Issue date
Dec 11, 2001
Kabushiki Kaisha Toshiba
Takashi Ishigami
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Refractory metal silicide target, method of manufacturing the targe...
Patent number
6,309,593
Issue date
Oct 30, 2001
Kabushiki Kaisha Toshiba
Michio Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mo-W material for formation of wiring, Mo-W target and method for p...
Patent number
6,200,694
Issue date
Mar 13, 2001
Kabushiki Kaisha Toshiba
Yasuo Kohsaka
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Mo-W material for formation of wiring, Mo-W target and method for p...
Patent number
5,913,100
Issue date
Jun 15, 1999
Kabushiki Kaisha Toshiba
Yasuo Kohsaka
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Highly purified metal material and sputtering target using the same
Patent number
5,679,983
Issue date
Oct 21, 1997
Kabushiki Kaisha Toshiba
Takashi Ishigami
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Ti-W sputtering target and method for manufacturing same
Patent number
5,470,527
Issue date
Nov 28, 1995
Kabushiki Kaisha Toshiba
Takashi Yamanobe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Highly purified metal material and sputtering target using the same
Patent number
5,458,697
Issue date
Oct 17, 1995
Kabushiki Kaisha Toshiba
Takashi Ishigami
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Sputtering target and method of manufacturing the same
Patent number
5,418,071
Issue date
May 23, 1995
Kabushiki Kaisha Toshiba
Michio Satou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Highly purified metal material and sputtering target using the same
Patent number
5,196,916
Issue date
Mar 23, 1993
Kabushiki Kaisha Toshiba
Takashi Ishigami
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Patents Applications
last 30 patents
Information
Patent Application
Refractory metal silicide target, method of manufacturing the targe...
Publication number
20010037938
Publication date
Nov 8, 2001
KABUSHIKI KAISHA TOSHIBA
Michio Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...