Toshikazu Karino

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Higashimurayama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transferring mechanism
- Patent number 6,143,083
- Issue date Nov 7, 2000
- Kokusai Electric Co., Ltd.
- Shuji Yonemitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with a processing chamber, transfer...
- Patent number 6,066,210
- Issue date May 23, 2000
- Kokusai Electric Co., Ltd.
- Shuji Yonemitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 5,788,447
- Issue date Aug 4, 1998
- Kokusai Electric Co., Ltd.
- Shuji Yonemitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer reaction furnace with wafer transfer means
- Patent number 5,387,265
- Issue date Feb 7, 1995
- Kokusai Electric Co., Ltd.
- Satoshi Kakizaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer transfer mechanism in vertical CVD diffusion apparatus
- Patent number 5,217,340
- Issue date Jun 8, 1993
- Kokusai Electric Co., Ltd.
- Yasuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer transfer method in vertical CVD diffusion apparatus
- Patent number 5,112,641
- Issue date May 12, 1992
- Kokusai Electric Co., Ltd.
- Yasuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...