Toshio Hiroe

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 7,938,129
- Issue date May 10, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,615,118
- Issue date Nov 10, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiro Fukui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,541,285
- Issue date Jun 2, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Yoshitaka Abiko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 7,422,681
- Issue date Sep 9, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Substrate treating apparatus
- Patent number 7,267,128
- Issue date Sep 11, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 7,243,911
- Issue date Jul 17, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yoshitaka Abiko
- B08 - CLEANING
Information Patent Grant
Apparatus for dipping substrates in processing fluid
- Patent number 5,656,088
- Issue date Aug 12, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dipping type surface treatment apparatus
- Patent number 5,191,908
- Issue date Mar 9, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
WAFER THINNING METHOD IN WAFER TREATING SYSTEM
- Publication number 20110256728
- Publication date Oct 20, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Toshio HIROE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080083501
- Publication date Apr 10, 2008
- Kenichiro ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER THINNING APPARATUS AND WAFER TREATING SYSTEM
- Publication number 20070277861
- Publication date Dec 6, 2007
- Toshio Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070240743
- Publication date Oct 18, 2007
- Toshio Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070072436
- Publication date Mar 29, 2007
- Katsuhiro FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070042511
- Publication date Feb 22, 2007
- Yoshitaka ABIKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20050258085
- Publication date Nov 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
Substrate treating apparatus
- Publication number 20050161839
- Publication date Jul 28, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yoshitaka Abiko
- B08 - CLEANING
Information Patent Application
Cleaning apparatus and substrate processing apparatus
- Publication number 20040211449
- Publication date Oct 28, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Ryu Yokomoto
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20040200415
- Publication date Oct 14, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Tadashi Maegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20040071531
- Publication date Apr 15, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Toshio Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate holding apparatus
- Publication number 20030178379
- Publication date Sep 25, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS

Toshio Hiroe

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treating apparatus

Substrate treating apparatus

Substrate treating apparatus

Apparatus for dipping substrates in processing fluid

Dipping type surface treatment apparatus

Patents Applicationslast 30 patents

WAFER THINNING METHOD IN WAFER TREATING SYSTEM

SUBSTRATE PROCESSING APPARATUS

WAFER THINNING APPARATUS AND WAFER TREATING SYSTEM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate treating apparatus

Substrate treating apparatus

Cleaning apparatus and substrate processing apparatus

Substrate processing apparatus

Substrate treating apparatus

Substrate holding apparatus