Toshio Uehara

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for clamping a work piece
- Patent number 11,282,732
- Issue date Mar 22, 2022
- Trek, Inc.
- Toshio Uehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
- Patent number 9,120,704
- Issue date Sep 1, 2015
- Nippon Tungsten Co., Ltd.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Electrostatic clamp optimizer
- Patent number 8,514,544
- Issue date Aug 20, 2013
- Trek, Inc.
- Peter McAnn
- G05 - CONTROLLING REGULATING
Information Patent Grant
Platen for electrostatic wafer clamping apparatus
- Patent number 6,660,665
- Issue date Dec 9, 2003
- Japan Fine Ceramics Center
- Hiroaki Yanagida
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Sensor for non-contacting electrostatic detector
- Patent number 6,600,323
- Issue date Jul 29, 2003
- Trek, Inc.
- Jerzy Kieres
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic force detector with cantilever for an electrostatic f...
- Patent number 6,507,197
- Issue date Jan 14, 2003
- Trek, Inc.
- Akiyoshi Itoh
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic force detector with cantilever and shield for an elec...
- Patent number 6,337,478
- Issue date Jan 8, 2002
- Trek, Inc.
- Toshio Uehara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Computed tomography using radiation
- Patent number 4,219,876
- Issue date Aug 26, 1980
- Tokyo Shibaura Electric Co., Ltd.
- Hiroyuki Mizutani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for subsection analysis using computed tomography
- Patent number 4,189,775
- Issue date Feb 19, 1980
- Tokyo Shibaura Electric Co., Ltd.
- Tamon Inouye
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic Force Detector With Improved Shielding And Method Of...
- Publication number 20190072519
- Publication date Mar 7, 2019
- Trek, Inc.
- Toshio Uehara
- G01 - MEASURING TESTING
Information Patent Application
System And Method For Clamping A Work Piece
- Publication number 20170162415
- Publication date Jun 8, 2017
- Trek, Inc.
- Toshio Uehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20140103612
- Publication date Apr 17, 2014
- NIPPON TUNGSTEN CO., LTD.
- Kouta Tsutsumi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Method and device for moving a sensor close to a surface
- Publication number 20130085714
- Publication date Apr 4, 2013
- TREK, INC.
- Akiyoshi Itoh
- G01 - MEASURING TESTING
Information Patent Application
Electrostatic Clamp Optimizer
- Publication number 20110032654
- Publication date Feb 10, 2011
- Peter McAnn
- G05 - CONTROLLING REGULATING
Information Patent Application
PLATEN FOR ELECTROSTATIC WAFER CLAMPING APPARATUS
- Publication number 20030207596
- Publication date Nov 6, 2003
- Hiroaki Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sensor for non-contacting electrostatic detector
- Publication number 20030042907
- Publication date Mar 6, 2003
- Jerzy Kieres
- G01 - MEASURING TESTING

Toshio Uehara

Person

Patents Grantslast 30 patents

System and method for clamping a work piece

Dielectric layer for electrostatic chuck and electrostatic chuck

Electrostatic clamp optimizer

Platen for electrostatic wafer clamping apparatus

Sensor for non-contacting electrostatic detector

Electrostatic force detector with cantilever for an electrostatic f...

Electrostatic force detector with cantilever and shield for an elec...

Computed tomography using radiation

Method and apparatus for subsection analysis using computed tomography

Patents Applicationslast 30 patents

Electrostatic Force Detector With Improved Shielding And Method Of...

System And Method For Clamping A Work Piece

DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

Method and device for moving a sensor close to a surface

Electrostatic Clamp Optimizer

PLATEN FOR ELECTROSTATIC WAFER CLAMPING APPARATUS

Sensor for non-contacting electrostatic detector