Toshio Yokoyama

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,027,402
- Issue date Jul 2, 2024
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,020,954
- Issue date Jun 25, 2024
- Ebara Corporation
- Hirotaka Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Copper oxide solid for use in plating of a substrate, method of pro...
- Patent number 11,781,233
- Issue date Oct 10, 2023
- Ebara Corporation
- Junitsu Yamakawa
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Copper oxide solid for use in plating of a substrate, method of pro...
- Patent number 11,767,606
- Issue date Sep 26, 2023
- Ebara Corporation
- Junitsu Yamakawa
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Plating apparatus
- Patent number 11,434,580
- Issue date Sep 6, 2022
- Ebara Corporation
- Tomonori Hirao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Plating apparatus
- Patent number 11,332,838
- Issue date May 17, 2022
- Ebara Corporation
- Gaku Yamasaki
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Copper oxide solid for use in plating of a substrate, method of pro...
- Patent number 11,230,780
- Issue date Jan 25, 2022
- Ebara Corporation
- Junitsu Yamakawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Plating system, a plating system control method, and a storage medi...
- Patent number 11,098,414
- Issue date Aug 24, 2021
- Ebara Corporation
- Takashi Mitsuya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus
- Patent number 11,024,520
- Issue date Jun 1, 2021
- Ebara Corporation
- Keiichi Kurashina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder and plating apparatus
- Patent number 11,015,261
- Issue date May 25, 2021
- Ebara Corporation
- Yoshitaka Mukaiyama
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate attachment/detachment device, plating device, control dev...
- Patent number 10,665,495
- Issue date May 26, 2020
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supply-liquid producing apparatus and supply-liquid producing method
- Patent number 10,654,017
- Issue date May 19, 2020
- Ebara Corporation
- Suguru Ozawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Plating system, a plating system control method, and a storage medi...
- Patent number 10,501,862
- Issue date Dec 10, 2019
- Ebara Corporation
- Takashi Mitsuya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus
- Patent number 10,468,274
- Issue date Nov 5, 2019
- Ebara Corporation
- Keiichi Kurashina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rinsing bath and substrate cleaning method using such rinsing bath
- Patent number 10,160,013
- Issue date Dec 25, 2018
- Ebara Corporation
- Masahiko Sekimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 10,141,211
- Issue date Nov 27, 2018
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of transferring a substrate
- Patent number 9,786,532
- Issue date Oct 10, 2017
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and processed substrate manufacturin...
- Patent number 9,673,067
- Issue date Jun 6, 2017
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lifting device, substrate processing apparatus having lifting devic...
- Patent number 9,666,469
- Issue date May 30, 2017
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate transfer method and subst...
- Patent number 9,530,676
- Issue date Dec 27, 2016
- Ebara Corporation
- Toshio Yokoyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing method and apparatus
- Patent number 8,225,803
- Issue date Jul 24, 2012
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 7,976,362
- Issue date Jul 12, 2011
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,959,977
- Issue date Jun 14, 2011
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and apparatus
- Patent number 7,735,451
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus
- Patent number 7,735,450
- Issue date Jun 15, 2010
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate polishing apparatus and method
- Patent number 7,585,205
- Issue date Sep 8, 2009
- Ebara Corporation
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,575,636
- Issue date Aug 18, 2009
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,442,257
- Issue date Oct 28, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing unit and substrate processing apparatus
- Patent number 7,368,016
- Issue date May 6, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 7,341,634
- Issue date Mar 11, 2008
- Ebara Corporation
- Toshio Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COPPER OXIDE SOLID FOR USE IN PLATING OF A SUBSTRATE, METHOD OF PRO...
- Publication number 20220074065
- Publication date Mar 10, 2022
- EBARA CORPORATION
- Junitsu Yamakawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COPPER OXIDE SOLID FOR USE IN PLATING OF A SUBSTRATE, METHOD OF PRO...
- Publication number 20220074064
- Publication date Mar 10, 2022
- EBARA CORPORATION
- Junitsu Yamakawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210391190
- Publication date Dec 16, 2021
- Hirotaka Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210210368
- Publication date Jul 8, 2021
- EBARA CORPORATION
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COPPER OXIDE SOLID FOR USE IN PLATING OF A SUBSTRATE, METHOD OF PRO...
- Publication number 20210180202
- Publication date Jun 17, 2021
- EBARA CORPORATION
- Junitsu Yamakawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS
- Publication number 20200277709
- Publication date Sep 3, 2020
- EBARA CORPORATION
- Tomonori Hirao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE-HOLDER INSPECTION APPARATUS, PLATING APPARATUS INCLUDING...
- Publication number 20200255968
- Publication date Aug 13, 2020
- EBARA CORPORATION
- Yoshitaka MUKAIYAMA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...
- Publication number 20200056301
- Publication date Feb 20, 2020
- EBARA CORPORATION
- Takashi MITSUYA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200027758
- Publication date Jan 23, 2020
- EBARA CORPORATION
- Keiichi KURASHINA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200027759
- Publication date Jan 23, 2020
- EBARA CORPORATION
- Keiichi KURASHINA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...
- Publication number 20190214278
- Publication date Jul 11, 2019
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING APPARATUS
- Publication number 20190093250
- Publication date Mar 28, 2019
- EBARA CORPORATION
- Gaku YAMASAKI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDER AND PLATING APPARATUS
- Publication number 20190084777
- Publication date Mar 21, 2019
- EBARA CORPORATION
- Yoshitaka MUKAIYAMA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUPPLY-LIQUID PRODUCING APPARATUS AND SUPPLY-LIQUID PRODUCING METHOD
- Publication number 20190015801
- Publication date Jan 17, 2019
- EBARA CORPORATION
- Suguru OZAWA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLATING APPARATUS AND SUBSTRATE HOLDER USED TOGETHER WITH PLATING A...
- Publication number 20180223444
- Publication date Aug 9, 2018
- EBARA CORPORATION
- Toshio YOKOYAMA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE ATTACHMENT/DETACHMENT DEVICE, PLATING DEVICE, CONTROL DEV...
- Publication number 20180182659
- Publication date Jun 28, 2018
- EBARA CORPORATION
- Toshio YOKOYAMA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...
- Publication number 20180038008
- Publication date Feb 8, 2018
- EBARA CORPORATION
- Takashi MITSUYA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20170358472
- Publication date Dec 14, 2017
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS
- Publication number 20170200623
- Publication date Jul 13, 2017
- EBARA CORPORATION
- Suguru OZAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160284571
- Publication date Sep 29, 2016
- EBARA CORPORATION
- Keiichi KURASHINA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RINSING BATH AND SUBSTRATE CLEANING METHOD USING SUCH RINSING BATH
- Publication number 20160059271
- Publication date Mar 3, 2016
- EBARA CORPORATION
- Masahiko SEKIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...
- Publication number 20150357213
- Publication date Dec 10, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT
- Publication number 20150270147
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20150270151
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...
- Publication number 20150221536
- Publication date Aug 6, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LIFTING DEVICE, SUBSTRATE PROCESSING APPARATUS HAVING LIFTING DEVIC...
- Publication number 20150082613
- Publication date Mar 26, 2015
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSED SUBSTRATE MANUFACTURIN...
- Publication number 20140311532
- Publication date Oct 23, 2014
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...
- Publication number 20120308356
- Publication date Dec 6, 2012
- Toshio YOKOYAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND METHOD
- Publication number 20110237163
- Publication date Sep 29, 2011
- Seiji Katsuoka
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND APPARATUS
- Publication number 20110203518
- Publication date Aug 25, 2011
- Seiji Katsuoka
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Toshio Yokoyama

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Copper oxide solid for use in plating of a substrate, method of pro...

Copper oxide solid for use in plating of a substrate, method of pro...

Plating apparatus

Plating apparatus

Copper oxide solid for use in plating of a substrate, method of pro...

Plating system, a plating system control method, and a storage medi...

Substrate processing apparatus

Substrate holder and plating apparatus

Substrate attachment/detachment device, plating device, control dev...

Supply-liquid producing apparatus and supply-liquid producing method

Plating system, a plating system control method, and a storage medi...

Substrate processing apparatus

Rinsing bath and substrate cleaning method using such rinsing bath

Substrate processing apparatus and substrate transfer method

Substrate processing apparatus and method of transferring a substrate

Substrate processing apparatus and processed substrate manufacturin...

Lifting device, substrate processing apparatus having lifting devic...

Substrate processing apparatus, substrate transfer method and subst...

Substrate processing method and apparatus

Substrate polishing apparatus and method

Substrate processing method and apparatus

Substrate processing method and apparatus

Substrate holding apparatus

Substrate polishing apparatus and method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing unit and substrate processing apparatus

Apparatus for and method of processing substrate

Patents Applicationslast 30 patents

COPPER OXIDE SOLID FOR USE IN PLATING OF A SUBSTRATE, METHOD OF PRO...

COPPER OXIDE SOLID FOR USE IN PLATING OF A SUBSTRATE, METHOD OF PRO...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

COPPER OXIDE SOLID FOR USE IN PLATING OF A SUBSTRATE, METHOD OF PRO...

PLATING APPARATUS

SUBSTRATE-HOLDER INSPECTION APPARATUS, PLATING APPARATUS INCLUDING...

PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...

PLATING APPARATUS

SUBSTRATE HOLDER AND PLATING APPARATUS

SUPPLY-LIQUID PRODUCING APPARATUS AND SUPPLY-LIQUID PRODUCING METHOD

PLATING APPARATUS AND SUBSTRATE HOLDER USED TOGETHER WITH PLATING A...

SUBSTRATE ATTACHMENT/DETACHMENT DEVICE, PLATING DEVICE, CONTROL DEV...

PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS

RINSING BATH AND SUBSTRATE CLEANING METHOD USING SUCH RINSING BATH

SUBSTRATE ATTACHING/DETACHING UNIT FOR SUBSTRATE HOLDER, WET-TYPE S...

SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...

LIFTING DEVICE, SUBSTRATE PROCESSING APPARATUS HAVING LIFTING DEVIC...

SUBSTRATE PROCESSING APPARATUS AND PROCESSED SUBSTRATE MANUFACTURIN...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...

SUBSTRATE POLISHING APPARATUS AND METHOD

SUBSTRATE PROCESSING METHOD AND APPARATUS