Toshiya Saito

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing apparatus
- Patent number 8,313,359
- Issue date Nov 20, 2012
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method of reconditioning polishing pad
- Patent number 7,708,621
- Issue date May 4, 2010
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus including separate retainer rings
- Patent number 7,662,025
- Issue date Feb 16, 2010
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Dresser and apparatus for chemical mechanical polishing and method...
- Patent number 7,559,827
- Issue date Jul 14, 2009
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device
- Patent number 7,488,240
- Issue date Feb 10, 2009
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250169137
- Publication date May 22, 2025
- RENESAS ELECTRONICS CORPORATION
- Takahiro MARUYAMA
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS
- Publication number 20100197207
- Publication date Aug 5, 2010
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
ALIGNMENT MARK AND ALIGNMENT METHOD USING THE ALIGNMENT MARK
- Publication number 20090312981
- Publication date Dec 17, 2009
- Elpida Memory, Inc.
- Toshiya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND METHOD OF RECONDITIONING POLISHING PAD
- Publication number 20080242199
- Publication date Oct 2, 2008
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
DRESSER AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING AND METHOD...
- Publication number 20080233842
- Publication date Sep 25, 2008
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus including separate retainer rings
- Publication number 20080176486
- Publication date Jul 24, 2008
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
Polishing device
- Publication number 20070270089
- Publication date Nov 22, 2007
- ELPIDA MEMORY, INC.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING DEVICE AND METHOD
- Publication number 20070270087
- Publication date Nov 22, 2007
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
Polishing equipment having a longer operating time length
- Publication number 20060283839
- Publication date Dec 21, 2006
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING

Toshiya Saito

Person

Patents Grantslast 30 patents

Chemical mechanical polishing apparatus

Polishing apparatus and method of reconditioning polishing pad

Polishing apparatus including separate retainer rings

Dresser and apparatus for chemical mechanical polishing and method...

Polishing device

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

CHEMICAL MECHANICAL POLISHING APPARATUS

ALIGNMENT MARK AND ALIGNMENT METHOD USING THE ALIGNMENT MARK

POLISHING APPARATUS AND METHOD OF RECONDITIONING POLISHING PAD

DRESSER AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING AND METHOD...

Polishing apparatus including separate retainer rings

Polishing device

POLISHING DEVICE AND METHOD

Polishing equipment having a longer operating time length