Toshiyuki Tsukamoto

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Ushiku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Abatement system for ClF3 containing exhaust gases
- Patent number 6,060,034
- Issue date May 9, 2000
- L'Air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation des Procedes Ge...
- Toshiyuki Tsukamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Process for distributing ultra high purity gases with minimized cor...
- Patent number 5,676,762
- Issue date Oct 14, 1997
- L'Air Liquide
- Masao Kimura
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Process for distributing ultra high purity gases with minimized con...
- Patent number 5,591,273
- Issue date Jan 7, 1997
- L'Air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation des Procedes Ge...
- Toshiyuki Tsukamoto
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS