Tosiya Asano

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Simulation method, simulation apparatus, storage medium, film formi...
- Patent number 12,079,551
- Issue date Sep 3, 2024
- Canon Kabushiki Kaisha
- Tosiya Asano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Control device, lithography apparatus, measurement apparatus, proce...
- Patent number 11,809,089
- Issue date Nov 7, 2023
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Simulation method, simulation apparatus, and storage medium
- Patent number 11,651,118
- Issue date May 16, 2023
- Canon Kabushiki Kaisha
- Tosiya Asano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Control device for generating a control deviation via machine learning
- Patent number 11,460,781
- Issue date Oct 4, 2022
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Forming apparatus and method of manufacturing article
- Patent number 11,314,165
- Issue date Apr 26, 2022
- Canon Kabushiki Kaisha
- Setsuo Yoshida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, method of manufacturing article
- Patent number 10,634,994
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 10,495,989
- Issue date Dec 3, 2019
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 10,241,424
- Issue date Mar 26, 2019
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 10,011,056
- Issue date Jul 3, 2018
- Canon Kabushiki Kaisha
- Tetsuji Okada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithography apparatus, and method of manufacturing article
- Patent number 9,977,346
- Issue date May 22, 2018
- Canon Kabushiki Kaisha
- Tetsuji Okada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration suppression apparatus and vibration suppression method
- Patent number 9,394,966
- Issue date Jul 19, 2016
- Canon Kabushiki Kaisha
- Tosiya Asano
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus having a vibration suppressing feature and metho...
- Patent number 9,104,121
- Issue date Aug 11, 2015
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, exposure apparatus and device manufacturing...
- Patent number 8,970,821
- Issue date Mar 3, 2015
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Anti-vibration apparatus
- Patent number 8,915,479
- Issue date Dec 23, 2014
- Canon Kabushiki Kaisha
- Mitsuhiro Furumoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Positioning apparatus
- Patent number 8,786,831
- Issue date Jul 22, 2014
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, method for controlling stage device, exposure apparat...
- Patent number 8,288,972
- Issue date Oct 16, 2012
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Positioning apparatus, exposure apparatus using thereof and device...
- Patent number 8,159,652
- Issue date Apr 17, 2012
- Canon Kabushiki Kaisha
- Asano Tosiya
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Positioning apparatus
- Patent number 8,031,328
- Issue date Oct 4, 2011
- Canon Kabushiki Kaisha
- Tosiya Asano
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment apparatus, exposure apparatus, and device manufacturing m...
- Patent number 7,737,419
- Issue date Jun 15, 2010
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, exposure apparatus using thereof and device...
- Patent number 7,378,764
- Issue date May 27, 2008
- Canon Kabushiki Kaisha
- Asano Tosiya
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Magnetic guiding apparatus
- Patent number 7,345,865
- Issue date Mar 18, 2008
- Canon Kabushiki Kaisha
- Asano Tosiya
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Moving control apparatus and moving control method
- Patent number 7,276,866
- Issue date Oct 2, 2007
- Canon Kabushiki Kaisha
- Tosiya Asano
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Moving member mechanism and control method therefor
- Patent number 7,154,242
- Issue date Dec 26, 2006
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Positioning apparatus, exposure apparatus, device manufacturing met...
- Patent number 6,442,858
- Issue date Sep 3, 2002
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan exposure method and apparatus
- Patent number 5,917,580
- Issue date Jun 29, 1999
- Canon Kabushiki Kaisha
- Ryuichi Ebinuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SIMULATION METHOD, SIMULATION APPARATUS, STORAGE MEDIUM, FILM FORMI...
- Publication number 20240346209
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- TOSIYA ASANO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20230112689
- Publication date Apr 13, 2023
- Canon Kabushiki Kaisha
- Masahiro Tamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CONTROL DEVICE, LITHOGRAPHY APPARATUS, MEASUREMENT APPARATUS, PROCE...
- Publication number 20220390856
- Publication date Dec 8, 2022
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SIMULATION METHOD AND SIMULATION APPARATUS
- Publication number 20210350047
- Publication date Nov 11, 2021
- Canon Kabushiki Kaisha
- Tosiya Asano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SIMULATION METHOD, SIMULATION APPARATUS, AND STORAGE MEDIUM
- Publication number 20200394346
- Publication date Dec 17, 2020
- Canon Kabushiki Kaisha
- Tosiya Asano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SIMULATION METHOD, SIMULATION APPARATUS, STORAGE MEDIUM FILM FORMIN...
- Publication number 20200394349
- Publication date Dec 17, 2020
- Canon Kabushiki Kaisha
- Tosiya Asano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL DEVICE, LITHOGRAPHY APPARATUS, MEASUREMENT APPARATUS, PROCE...
- Publication number 20200233316
- Publication date Jul 23, 2020
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Application
FORMING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20200110333
- Publication date Apr 9, 2020
- Canon Kabushiki Kaisha
- Setsuo Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE
- Publication number 20200086534
- Publication date Mar 19, 2020
- Canon Kabushiki Kaisha
- Tetsuji Okada
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20180319075
- Publication date Nov 8, 2018
- Canon Kabushiki Kaisha
- Tosiya Asano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, METHOD OF MANUFACTURING ARTICLE
- Publication number 20170269484
- Publication date Sep 21, 2017
- Canon Kabushiki Kaisha
- Tosiya Asano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20170246657
- Publication date Aug 31, 2017
- Canon Kabushiki Kaisha
- Wataru Tamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20170242346
- Publication date Aug 24, 2017
- Canon Kabushiki Kaisha
- Tetsuji Okada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS, IMPRINTING METHOD, AND METHOD OF MANUFACTURIN...
- Publication number 20170008219
- Publication date Jan 12, 2017
- Canon Kabushiki Kaisha
- Tosiya Asano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160320697
- Publication date Nov 3, 2016
- CANON KABUSHIKI KAISHA
- Tosiya Asano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160257060
- Publication date Sep 8, 2016
- Canon Kabushiki Kaisha
- Hirohito Ito
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160238954
- Publication date Aug 18, 2016
- Canon Kabushiki Kaisha
- Tosiya Asano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160223918
- Publication date Aug 4, 2016
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160009021
- Publication date Jan 14, 2016
- Canon Kabushiki Kaisha
- Tetsuji Okada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
VIBRATION SUPPRESSION APPARATUS AND VIBRATION SUPPRESSION METHOD
- Publication number 20130240705
- Publication date Sep 19, 2013
- Canon Kabushiki Kaisha
- Tosiya ASANO
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20130044306
- Publication date Feb 21, 2013
- Canon Kabushiki Kaisha
- Keiji EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-VIBRATION APPARATUS
- Publication number 20130037687
- Publication date Feb 14, 2013
- Canon Kabushiki Kaisha
- Mitsuhiro FURUMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20120307228
- Publication date Dec 6, 2012
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20120281194
- Publication date Nov 8, 2012
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS
- Publication number 20110248578
- Publication date Oct 13, 2011
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE DEVICE, METHOD FOR CONTROLLING STAGE DEVICE, EXPOSURE APPARAT...
- Publication number 20100310994
- Publication date Dec 9, 2010
- Canon Kabushiki Kaisha
- Tosiya Asano
- G05 - CONTROLLING REGULATING
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS USING THEREOF AND DEVICE...
- Publication number 20080170214
- Publication date Jul 17, 2008
- Canon Kabushiki Kaisha
- Asano Tosiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...
- Publication number 20080067415
- Publication date Mar 20, 2008
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning apparatus
- Publication number 20060175910
- Publication date Aug 10, 2006
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVING CONTROL APPARATUS AND MOVING CONTROL METHOD
- Publication number 20060170888
- Publication date Aug 3, 2006
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tosiya Asano

Person

Patents Grantslast 30 patents

Simulation method, simulation apparatus, storage medium, film formi...

Control device, lithography apparatus, measurement apparatus, proce...

Simulation method, simulation apparatus, and storage medium

Control device for generating a control deviation via machine learning

Forming apparatus and method of manufacturing article

Imprint apparatus, imprint method, method of manufacturing article

Imprint apparatus and method of manufacturing article

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus and article manufacturing method

Lithography apparatus, and method of manufacturing article

Vibration suppression apparatus and vibration suppression method

Exposure apparatus having a vibration suppressing feature and metho...

Positioning apparatus, exposure apparatus and device manufacturing...

Anti-vibration apparatus

Positioning apparatus

Stage device, method for controlling stage device, exposure apparat...

Positioning apparatus, exposure apparatus using thereof and device...

Positioning apparatus

Alignment apparatus, exposure apparatus, and device manufacturing m...

Positioning apparatus, exposure apparatus using thereof and device...

Magnetic guiding apparatus

Moving control apparatus and moving control method

Moving member mechanism and control method therefor

Positioning apparatus, exposure apparatus, device manufacturing met...

Scan exposure method and apparatus

Patents Applicationslast 30 patents

SIMULATION METHOD, SIMULATION APPARATUS, STORAGE MEDIUM, FILM FORMI...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

CONTROL DEVICE, LITHOGRAPHY APPARATUS, MEASUREMENT APPARATUS, PROCE...

SIMULATION METHOD AND SIMULATION APPARATUS

SIMULATION METHOD, SIMULATION APPARATUS, AND STORAGE MEDIUM

SIMULATION METHOD, SIMULATION APPARATUS, STORAGE MEDIUM FILM FORMIN...

CONTROL DEVICE, LITHOGRAPHY APPARATUS, MEASUREMENT APPARATUS, PROCE...

FORMING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT METHOD, IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, METHOD OF MANUFACTURING ARTICLE

IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

IMPRINTING APPARATUS, IMPRINTING METHOD, AND METHOD OF MANUFACTURIN...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

VIBRATION SUPPRESSION APPARATUS AND VIBRATION SUPPRESSION METHOD

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

ANTI-VIBRATION APPARATUS

POSITIONING APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

POSITIONING APPARATUS

STAGE DEVICE, METHOD FOR CONTROLLING STAGE DEVICE, EXPOSURE APPARAT...

POSITIONING APPARATUS, EXPOSURE APPARATUS USING THEREOF AND DEVICE...

ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...

Positioning apparatus

MOVING CONTROL APPARATUS AND MOVING CONTROL METHOD