Travis R. Taylor

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Autoclean for load locks in substrate processing systems
- Patent number 12,094,739
- Issue date Sep 17, 2024
- Lam Research Corporation
- Adam Patrick Bateman
- B08 - CLEANING
Information Patent Grant
Halogen removal module and associated systems and methods
- Patent number 10,903,065
- Issue date Jan 26, 2021
- Lam Research Corporation
- Travis R. Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Symmetric RF return path liner
- Patent number 9,953,825
- Issue date Apr 24, 2018
- Lam Research Corporation
- David Carman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma confinement ring assembly for plasma processing chambers
- Patent number 9,076,826
- Issue date Jul 7, 2015
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a gas distribution member for a plasma processing...
- Patent number 8,883,029
- Issue date Nov 11, 2014
- Lam Research Corporation
- Travis Robert Taylor
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Edge ring assembly for plasma etching chambers
- Patent number 8,845,856
- Issue date Sep 30, 2014
- Lam Research Corporation
- Michael S. Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High lifetime consumable silicon nitride-silicon dioxide plasma pro...
- Patent number 8,622,021
- Issue date Jan 7, 2014
- Lam Research Corporation
- Travis R. Taylor
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
System and method for in situ characterization and maintenance of p...
- Patent number 7,153,182
- Issue date Dec 26, 2006
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Assembly and method for generating a hydrodynamic air bearing
- Patent number 7,025,660
- Issue date Apr 11, 2006
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and associated method for conditioning in chemical mechan...
- Patent number 7,004,825
- Issue date Feb 28, 2006
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for edge polishing uniformity control
- Patent number 6,991,512
- Issue date Jan 31, 2006
- Lam Research Corporation
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
300 mm platen and belt configuration
- Patent number 6,887,338
- Issue date May 3, 2005
- Lam Research Corporation
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Fluid conserving platen for optimizing edge polishing
- Patent number 6,790,128
- Issue date Sep 14, 2004
- Lam Research Corporation
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Fluid venting platen for optimizing wafer polishing
- Patent number 6,769,970
- Issue date Aug 3, 2004
- Lam Research Corporation
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for an air bearing platen with raised topography
- Patent number 6,752,898
- Issue date Jun 22, 2004
- Lam Research Corporation
- Robert L. Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
Platen assembly having a topographically altered platen surface
- Patent number 6,712,679
- Issue date Mar 30, 2004
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Belt wiper for a chemical mechanical planarization system
- Patent number 6,666,755
- Issue date Dec 23, 2003
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
AUTOCLEAN FOR LOAD LOCKS IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20220375773
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Adam Patrick BATEMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Halogen Removal Module and Associated Systems and Methods
- Publication number 20180330942
- Publication date Nov 15, 2018
- LAM RESEARCH CORPORATION
- Travis R. Taylor
- B08 - CLEANING
Information Patent Application
IN SITU CLEAN USING HIGH VAPOR PRESSURE AEROSOLS
- Publication number 20180311707
- Publication date Nov 1, 2018
- LAM RESEARCH CORPORATION
- Travis R. Taylor
- B08 - CLEANING
Information Patent Application
CHAMBERS FOR PARTICLE REDUCTION IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20160233114
- Publication date Aug 11, 2016
- LAM RESEARCH CORPORATION
- Travis R. Taylor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING A GAS DISTRIBUTION MEMBER FOR A PLASMA PROCESSING...
- Publication number 20150024582
- Publication date Jan 22, 2015
- LAM RESEARCH CORPORATION
- Travis Robert Taylor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS
- Publication number 20140367047
- Publication date Dec 18, 2014
- Michael S. Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING A GAS DISTRIBUTION MEMBER FOR A PLASMA PROCESSING...
- Publication number 20140227866
- Publication date Aug 14, 2014
- LAM RESEARCH CORPORATION
- Travis Robert Taylor
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER...
- Publication number 20140127911
- Publication date May 8, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...
- Publication number 20140113453
- Publication date Apr 24, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Symmetric RF Return Path Liner
- Publication number 20130133833
- Publication date May 30, 2013
- David Carman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS
- Publication number 20120073754
- Publication date Mar 29, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS
- Publication number 20110126984
- Publication date Jun 2, 2011
- LAM RESEARCH CORPORATION
- Michael S. Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH LIFETIME CONSUMABLE SILICON NITRIDE-SILICON DIOXIDE PLASMA PRO...
- Publication number 20110021031
- Publication date Jan 27, 2011
- Travis R. Taylor
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Assembly and method for generating a hydrodynamic air bearing
- Publication number 20050037692
- Publication date Feb 17, 2005
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Application
Platen assembly having a topographically altered platen surface
- Publication number 20030032379
- Publication date Feb 13, 2003
- Lam Research Corportion
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for edge polishing uniformity control
- Publication number 20020151256
- Publication date Oct 17, 2002
- Lam Research Corp.
- Travis Robert Taylor
- B24 - GRINDING POLISHING

Travis R. Taylor

Person

Patents Grantslast 30 patents

Autoclean for load locks in substrate processing systems

Halogen removal module and associated systems and methods

Symmetric RF return path liner

Plasma confinement ring assembly for plasma processing chambers

Method of making a gas distribution member for a plasma processing...

Edge ring assembly for plasma etching chambers

High lifetime consumable silicon nitride-silicon dioxide plasma pro...

System and method for in situ characterization and maintenance of p...

Assembly and method for generating a hydrodynamic air bearing

Apparatus and associated method for conditioning in chemical mechan...

Apparatus for edge polishing uniformity control

300 mm platen and belt configuration

Fluid conserving platen for optimizing edge polishing

Fluid venting platen for optimizing wafer polishing

Method and apparatus for an air bearing platen with raised topography

Platen assembly having a topographically altered platen surface

Belt wiper for a chemical mechanical planarization system

Patents Applicationslast 30 patents

AUTOCLEAN FOR LOAD LOCKS IN SUBSTRATE PROCESSING SYSTEMS

Halogen Removal Module and Associated Systems and Methods

IN SITU CLEAN USING HIGH VAPOR PRESSURE AEROSOLS

CHAMBERS FOR PARTICLE REDUCTION IN SUBSTRATE PROCESSING SYSTEMS

METHOD OF MAKING A GAS DISTRIBUTION MEMBER FOR A PLASMA PROCESSING...

EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS

METHOD OF MAKING A GAS DISTRIBUTION MEMBER FOR A PLASMA PROCESSING...

PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER...

TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...

Symmetric RF Return Path Liner

PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS

EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS

HIGH LIFETIME CONSUMABLE SILICON NITRIDE-SILICON DIOXIDE PLASMA PRO...

Assembly and method for generating a hydrodynamic air bearing

Platen assembly having a topographically altered platen surface

Apparatus for edge polishing uniformity control