Troy Alan Gomm

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck for use in semiconductor processing
- Patent number 11,817,341
- Issue date Nov 14, 2023
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal including backside gas-delivery tube
- Patent number 11,634,817
- Issue date Apr 25, 2023
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck for use in semiconductor processing
- Patent number 11,289,355
- Issue date Mar 29, 2022
- Lam Research Corporation
- Troy Alan Gomm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate pedestal module including backside gas delivery tube and...
- Patent number 10,655,225
- Issue date May 19, 2020
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature substrate pedestal module and components thereof
- Patent number 10,177,024
- Issue date Jan 8, 2019
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal module including backside gas delivery tube and...
- Patent number 9,738,975
- Issue date Aug 22, 2017
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
- Publication number 20240038568
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
- Publication number 20230220549
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...
- Publication number 20220333239
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Ashish SAURABH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
- Publication number 20220181184
- Publication date Jun 9, 2022
- LAM RESEARCH CORPORATION
- Troy Alan GOMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
- Publication number 20200325578
- Publication date Oct 15, 2020
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
- Publication number 20180350649
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...
- Publication number 20170321324
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...
- Publication number 20160333475
- Publication date Nov 17, 2016
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- B32 - LAYERED PRODUCTS
Information Patent Application
HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF
- Publication number 20160336213
- Publication date Nov 17, 2016
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Troy Alan Gomm

Person

Patents Grantslast 30 patents

Electrostatic chuck for use in semiconductor processing

Substrate pedestal including backside gas-delivery tube

Electrostatic chuck for use in semiconductor processing

Substrate pedestal module including backside gas delivery tube and...

High temperature substrate pedestal module and components thereof

Substrate pedestal module including backside gas delivery tube and...

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE

TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND...

HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF